RUVAC Roots vacuum pumps - Vacuum Products Canada Inc.

Semiconductor Technology
In the area of semiconductor technology,
Roots vacuum pumps are found
in etching processes among others,
and in use with dry compressing
vacuum pumps.
The pumping speed of the combination
of backing pumps amounts to
200 to 500 m 3 /h (118 to 295 cfm)
and it ensures a cut-in pressure of
10 -1 mbar (0.75 x 10 -1 Torr) for the turbomolecular
pump. In the case of dry
compression, corrosive gases which
also have a high particulate content
must be pumped.
Canned motors and PFPE fluids provide
a good seal against the outside and
allow long periods between servicing,
high reliability and thus very low operating
costs (WS PFPE types).
Specific suitable for this processes and
use in clean rooms are Roots vacuum
pumps filled with PFPE and watercooled
motors.
These kind of motor has only a little
heat dissipatoion.
Central Vacuum Supply
Systems
Large Roots vacuum pumps, usually in
connection with single-stage rotary
vane vacuum pumps serve several
consumers of vacuum (packaging
machines, for example) at the same
time.
Operational diagram of a single-stage Roots vacuum pump (with vertical pumping action)
Due to the uncontrolled influx of gas, a
high of pumping speed must be attained
quickly, in order to keep the
vacuum (1 to 30 mbar (0.75 to
22.5 Torr)) permanently available to all
consumers. This in particular, is implemented
by Roots vacuum pumps
having a pressure equalization line
(WAU types).
Chemistry
Replacement of vapor jet or gas jet
pumps on liquid ring pumps in drying
and distillation plants is necessary for
attaining the required operating pressure
of about 1 mbar (0.75 Torr).
Reduction of operating costs by entirely
eliminating vapor or gas quantities
includes separation of these on the
pressure side (WA and RA types).
Laser Systems
Continuous circulation of the gas in
order to remove heat from a closed
cycle in which pressure differentials of
up to 100 mbar (75 Torr) must be
maintained. The tough requirements
regarding purity necessitate a total
absence of contamination by oil and
dust. This is ensured by reducing the
pressure level in the oil chambers as
well as by coating the pump chamber.
The pumps are assembled and tested
under clean room conditions.
The canned motor ensures a high
degree of leak-tightness to the outside
and permits operation in connection
with a frequency converter (WSLF
types).
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