Turbomolecular pump (TMP 5154) - PTB Sales
Turbomolecular pump (TMP 5154) - PTB Sales
Turbomolecular pump (TMP 5154) - PTB Sales
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<strong>Turbomolecular</strong> <strong>pump</strong> (<strong>TMP</strong> <strong>5154</strong>)<br />
D 60<br />
SYMPTOM<br />
Critical failure<br />
ORIGIN / DIAGNOSTIC<br />
CONFIRMATION<br />
Chap. C<br />
“Error/information indicator and display”<br />
REMEDY<br />
<strong>Turbomolecular</strong> <strong>pump</strong><br />
failure<br />
<strong>Turbomolecular</strong> <strong>pump</strong><br />
overheating<br />
NO<br />
Check the connections :<br />
unplug and plug the cables<br />
on the P0326 board and<br />
the <strong>pump</strong>.<br />
<strong>Turbomolecular</strong> <strong>pump</strong><br />
Mechanical hard spot<br />
(does not spin freely by hand)<br />
Contact customer service.<br />
<strong>Turbomolecular</strong> <strong>pump</strong><br />
speed<br />
P0326<br />
Switch is in running-in<br />
NO<br />
The exhaust pressure of<br />
the turbomolecular <strong>pump</strong><br />
is not correct (≤ 5 mbar )<br />
Check the dry <strong>pump</strong>.<br />
Edition 02 - February 02<br />
GB 01288 -<br />
NO<br />
The exhaust valve<br />
has not opened<br />
NO<br />
Check the gross leak test<br />
mode valve.<br />
E “Valves installation<br />
and maintenance”.<br />
Leaks<br />
on lines, valves, <strong>pump</strong> or cell<br />
NO<br />
Alcatel Vacuum Technology France - ASM 182 TD+ - ASM 192 T2D+ User’s Manual<br />
Check the tightness of the<br />
canalisations, valves, <strong>pump</strong>s<br />
and cell. (alcohol test or use<br />
of another detector).<br />
1/2
<strong>Turbomolecular</strong> <strong>pump</strong> (<strong>TMP</strong> <strong>5154</strong>)<br />
D 60<br />
SYMPTOM<br />
ORIGIN / DIAGNOSTIC<br />
CONFIRMATION<br />
REMEDY<br />
Major fault<br />
Chap. C<br />
“Error/information indicator and display”<br />
<strong>Turbomolecular</strong> <strong>pump</strong><br />
speed (continued)<br />
Greasing of the ball bearings<br />
turbomolecular <strong>pump</strong><br />
to be performed<br />
Regrease the ball bearings<br />
turbomolecular <strong>pump</strong><br />
according to E 30.<br />
NO<br />
<strong>Turbomolecular</strong> <strong>pump</strong><br />
Mechanical hard spot (does<br />
not spin freely by hand)<br />
Contact customer service.<br />
Check the<br />
turbomolecular <strong>pump</strong><br />
connector<br />
<strong>Turbomolecular</strong> <strong>pump</strong> is<br />
not connected with turbomolecular<br />
<strong>pump</strong> controller<br />
board P0326<br />
Contact customer service.<br />
GB 01288 -<br />
Edition 02 - February 02<br />
2/2 Alcatel Vacuum Technology France - ASM 182 TD+ - ASM 192 T2D+ User’s Manual
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