Tokyo Electron Limited (TEL)
Tokyo Electron Limited (TEL)
Tokyo Electron Limited (TEL)
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Topics in Recent Years 3<br />
2000 2<br />
Feb<br />
Shipments of CLEAN TRACK ACT8<br />
coater/developer reached 1,000 units.<br />
<br />
<br />
8<br />
Aug<br />
8<br />
Aug<br />
10<br />
Oct<br />
The trading unit for <strong>TEL</strong> stock changed from<br />
1,000 shares to 100 shares.<br />
<br />
Shipment of Telius, a plasma etch system<br />
with a new platform, started.<br />
<br />
<br />
<strong>TEL</strong> acquired Supercritical Systems, Inc. of<br />
the United States, a leader in supercritical<br />
cleaning and developing technology essential<br />
for 65nm technology and below.<br />
<br />
<br />
<br />
2001 2<br />
Feb<br />
<strong>TEL</strong> acquired a stake in Timbre<br />
Technologies, Inc., a leader in advanced<br />
metrology software.<br />
<br />
<br />
10<br />
Oct<br />
12<br />
Dec<br />
Shipment of SE-1200, a FPD plasma<br />
etch/ash system for 5th generation<br />
substrates, started.<br />
<br />
<br />
Trias SPA, a new plasma process system,<br />
announced.<br />
<br />
12 Order accepting for <strong>TEL</strong>FORMULA, a new<br />
Dec high-speed thermal processing system<br />
capable of flexible loading, started.<br />
<br />
<br />
2002 4 <strong>Tokyo</strong> <strong>Electron</strong> (Shanghai) Ltd. established.<br />
Apr<br />
<br />
4<br />
Apr<br />
9<br />
Sep<br />
Shipment of CL1200, a FPD<br />
coater/developer for 5th generation<br />
substrates, started.<br />
<br />
<br />
e-BEAM Corp., a joint venture developing,<br />
manufacturing and marketing low energy<br />
electron beam direct writing systems for<br />
semiconductor production, established.<br />
<br />
<br />
11 <strong>TEL</strong> announced participation in Albany<br />
Nov NanoTech project promoted by New York<br />
State.<br />
<br />
<br />
2003 3<br />
Mar<br />
<strong>Tokyo</strong> <strong>Electron</strong> Device Ltd. listed on the 2nd<br />
section of the <strong>Tokyo</strong> Stock Exchange.<br />
<br />
<br />
6<br />
Jun<br />
8<br />
Aug<br />
<strong>TEL</strong> received the Prime Minister’s Award for<br />
its contribution to Industry-Academia-<br />
Government collaboration in connection with<br />
the development of Trias SPA plasma<br />
processing system.<br />
<br />
<br />
<br />
<strong>TEL</strong> Technology Center, America, LLC.<br />
(TTCA) established in the U.S. to conduct<br />
research and development of cutting-edge<br />
semiconductor materials and processes.<br />
<br />
<br />
<br />
2004 1<br />
Jan<br />
<strong>TEL</strong> started volume production and<br />
shipment of CLEAN TRACK LITHIUS, a<br />
new coater/developer for 65nm node.<br />
<br />
<br />
4<br />
Apr<br />
7<br />
Jul<br />
7<br />
Jul<br />
7<br />
Jul<br />
<strong>Tokyo</strong> <strong>Electron</strong> AT Ltd. (surviving<br />
company) and <strong>Tokyo</strong> <strong>Electron</strong> Tohoku<br />
Ltd., manufacturing subsidiaries in Japan,<br />
merged.<br />
<br />
<br />
<strong>Tokyo</strong> <strong>Electron</strong> FE Ltd. (surviving company)<br />
and <strong>Tokyo</strong> <strong>Electron</strong> EE Ltd. merged.<br />
<br />
<br />
<strong>Tokyo</strong> <strong>Electron</strong> U.S. Holdings, Inc.<br />
established in the U.S., a holding company<br />
controlling U.S. subsidiaries : <strong>Tokyo</strong><br />
<strong>Electron</strong> America, <strong>Tokyo</strong> <strong>Electron</strong><br />
Massachusetts, and <strong>TEL</strong> Technology<br />
Center, America.<br />
<br />
<br />
<br />
<br />
<br />
Order acceptance for EXPEDIUS, a highperformance<br />
auto wet station for 65nm<br />
node, started.<br />
<br />
<br />
2005 1<br />
Jan<br />
<strong>TEL</strong> received Superior Corporate<br />
Disclosure Award from the <strong>Tokyo</strong> Stock<br />
Exchange for the second time following the<br />
award-winning in 1999.
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