EXT70H Turbo Pump Installation Guide
EXT70H Turbo Pump Installation Guide
EXT70H Turbo Pump Installation Guide
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Step 12. Turn on Power and Check for Fore pressure__________________________________________<br />
Step 12. Turn on Power and Check for Fore<br />
pressure<br />
Turn on the GCQ main power breaker and check the fore pressure. Fix<br />
any leaks.<br />
Step 13. Attach Side and Top Panels<br />
When a good vacuum is obtained, put the side and top panels on. Press the service<br />
switch to Normal and place the top cover on the instrument. Reconfigure GCQ data<br />
system to reflect an installed turbo. This shortens the vent cycle.<br />
Step 14. Dispose of Old Diffusion <strong>Pump</strong><br />
Components<br />
Properly dispose of the old diffusion pump vacuum components. Follow disposal and<br />
safety practices according to local requirements. Do not return parts to the factory.<br />
The parts are not exchangeable.<br />
Note:<br />
<strong>Pump</strong>-down times are typically longer during the first few days with a new pump.<br />
After a few days at full vacuum, the time to pump-down shortens.<br />
16 __________________________ <strong>EXT70H</strong> <strong>Turbo</strong> <strong>Pump</strong> <strong>Installation</strong> <strong>Guide</strong> _______________________
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