EXT70H Turbo Pump Installation Guide

EXT70H Turbo Pump 

Installation Guide 

Revision A 

October 1999 

119574 

© Copyright 1999 ThermoQuest Corporation 

All Rights Reserved

Please read this guide in its entirety before you install the Turbo Pump. For more information, refer to 

the Edwards technical manuals for the turbomolecular pump model EXT-70H and pump controller 

model EXDC-80. 

This document is not intended to be a stand-alone document. The focus of this documentation is limited 

to installation instructions only. It is intended to assist ThermoQuest factory certified Field Engineers 

installing the Turbo Pump on the GCQ system. It does not contain complete safety and precautionary 

information. 

Important 

Declarations of conformity for the turbomolecular pump and controller are located inside the front 

cover of the Edwards instruction manuals. 

Warranty 

The Turbo Pump and accessories are warranted against defects in materials and workmanship for a 

period of twelve (12) months from the date of shipment. ThermoQuest will, at its option, repair or 

replace equipment that proves to be defective during the warranty period. This warranty covers pumps 

included with a new GCQ or with upgrade kits. This warranty does not include on-site labor. 

Spare parts are warranted for a period of ninety (90) days from the date of shipment. 

A Return Material Authorization (RMA) number must be obtained from the factory and clearly marked 

on the outside of the package before any equipment will be accepted for warranty work. ThermoQuest 

will pay the shipping costs of returning to the owner parts that are covered by warranty. 

ThermoQuest believes that the information in this manual is accurate. This document has been 

carefully reviewed for technical accuracy. In the event that technical or typographical errors exist, 

ThermoQuest reserves the right to make changes to subsequent editions of this document without prior 

notice to holders of this edition. The reader should contact ThermoQuest if errors are suspected. In no 

event shall ThermoQuest be liable for any damages arising from or related to this document or the 

information contained herein. 

Trademarks 

Xcalibur , GCQ Plus , and Polaris are trademarks and/or product names of ThermoQuest Corporation. EXT and 

EXDC are trademarks of Edwards High Vacuum International 

Other brand and product names may be trademarks or registered trademarks of their respective companies. 

NOTE: The name GCQ has been replaced with the new name of Polaris. Both 

names refer to the same instrument. 

Technical Acknowledgements 

Eric Johnson, Mark Okamura, Scott Quarmby, Ed McCauley—Technical Content 

2215 Grand Avenue Parkway, Austin, Texas 78728-3812 ❧ (800) 876-6711 Fax: (512) 251-1597 

Copyright © 1999 ThermoQuest. 

Published by Technical Publications, ThermoQuest, Austin, Texas. 

All rights reserved. Printed in the United States of America.

___________________________________________________________________Installation at a Glance 

Installation at a Glance 

EXT70H Turbo Pump Installation Manual...........................................................iv 

EXT70H Turbo Pump Parts List................................................................................................. v 

Completed Installation View...................................................................................vi 

Step 1. Shut down the GCQ System....................................................................1 

Step 2. Remove Cover and all Diffusion Pump Assemblies...............................2 

Step 3. Prepare mounting location for 24 V power supply ................................3 

Step 4. Replace the Diffusion Pump Controller with Turbo Pump Controller ............4 

Step 5. Modify Vacuum Pump Control Cable attached to P1 ............................6 

Step 6. Mount the Turbo Pump to the manifold ................................................7 

Step 7. Attach the Turbo Controller and adjust orientation .............................8 

Step 8. 

Assemble and Mount the 24 V DC Power Supply................................10 

Step 9. Replace Diffusion Foreline Block with Turbo Foreline Block .............13 

Step 10. 

Install Replacement Fan Assembly......................................................14 

Step 11. Attach Interface and Controller Cables ...............................................15 

Step 12. 

Turn on Power and Check Forepressure..............................................16 

Step 13. Attach Side and Top Panels .................................................................16 

Step 14. Dispose of Old Diffusion Pump Components .......................................16 

__________________________ EXT70H Turbo Pump Installation Guide _________________________ iii

EXT70H Turbo Pump Installation Manual ____________________________________________________ 

EXT70H Turbo Pump Installation Manual 

How to Use This Manual 

This guide contains instructions for successfully installing a EXT70H Turbo Pump 

into your GCQ. We organized this guide to provide step-by-step instructions, as well 

as additional information about the differences between the 110 V and 220 V turbo 

pumps. 

How to Make This Guide Better 

No guide is successful, unless we hear that it works it for you. We have provided a 

Reader’s Survey in the back of this book that you can tear out, fill out, and mail 

back to us. Your comments help us make our publications better. Good luck and we 

look forward to hearing from you. 

iv___________________________ EXT70H Turbo Pump Installation Guide _______________________

___________________________________________________________ EXT 70H Turbo Pump Parts List 

EXT 70H Turbo Pump Parts List 

To ensure your safety and to ensure instrument performance, use only the 

recommended ThermoQuest spare parts for the EXT70H Turbo Pump listed below. 

TURBO PUMP RETROFIT KIT, 115 V (PN 119575-0115) 

DESCRIPTION TMQ PART NUMBER QTY. 

Bracket PS Ext70H Turbo 119569-0001 1 

Bumper, Rubber 23662-0002 1 

Cable Assembly, EXT70H 119568-0002 1 

Cable Assembly, TCI 119568-0001 1 

Clamp, Claw, Turbo Pump GCQ BL 76505-3003 4 

Hex Jack SCR 4-40 M-F 76350-0045 2 

Manual, INSTR, Turbo Option 119574 1 

Power Supply 100W, 24V w/Cover 76330-0100 1 

Ribbon Dope, ¼” A0301-16501 1 

Screw FH 6-32 x 3/16 SS 4232-0012 4 

Tab Faston 0.187 R Angle 76452-0034 2 

Turbo Foreline Block Assembly 119559-0001 1 

Turbo Inlet Fan Assembly, 110V 96000-60303 1 

Turbo Pump Controller Interface 96000-60302 1 

Turbo Pump EXT70H/ISO100-24V 76505-3006 1 

Turbo Pump Module 24V EDC80 76505-3005 1 

TURBO PUMP RETROFIT KIT, 230 V (PN 119575-0230) 

DESCRIPTION TMQ PART NUMBER QTY. 

Bracket PS Ext70H Turbo 119569-0001 1 

Bumper, Rubber 23662-0002 1 

Cable Assembly, EXT70H 119568-0002 1 

Cable Assembly, TCI 119568-0001 1 

Clamp, Claw, Turbo Pump GCQ BL 76505-3003 4 

Hex Jack SCR 4-40 M-F 76350-0045 2 

Manual, INSTR, Turbo Option 119574 1 

Power Supply 100W, 24V w/Cover 76330-0100 1 

Ribbon Dope, ¼” A0301-16501 1 

Screw FH 6-32 x 3/16 SS 4232-0012 4 

Tab Faston 0.187 R Angle 76452-0034 2 

Turbo Foreline Block Assembly 119559-0001 1 

Turbo Inlet Fan Assembly, 220V 96000-60304 1 

Turbo Pump Controller Interface 96000-60302 1 

Turbo Pump EXT70H/ISO100-24V 76505-3006 1 

Turbo Pump Module 24V EDC80 76505-3005 1 

Customer Service 

Toll Free: 1-800-876-6711 

(The Americas only) 

International: (512) 251-1494 

__________________________ EXT70H Turbo Pump Installation Guide _________________________ v

Completed Installation View_______________________________________________________________ 

Completed Installation View 

Figure 1 . View of a completed GCQ 

Figure 1 illustrates a completed GCQ, with the EXT70H Turbo Pump fully 

installed. When you complete the following installation steps, your system should 

closely resemble the one shown above. 

vi___________________________ EXT70H Turbo Pump Installation Guide _______________________

_______________________________________________________ Step 1. Shut Down the GCQ System 

Step 1. Shut Down the GCQ System 

Remove 

Remove 

Figure 2. Front view: GCQ with vacuum interlock 

P000140 

If your GCQ is currently running, perform the shutdown procedure and allow the 

diffusion pump to cool completely. Disconnect the GCQ from the AC line power. 

CAUTION 

Hot diffusion pump. To avoid minor or moderate burns, do not touch 

the pump until it is cool. 

__________________________ EXT70H Turbo Pump Installation Guide _________________________ 1

Step 2. Remove Cover and all Diffusion Pump Assemblies______________________________________ 

Step 2. Remove Cover and all Diffusion 

Pump Assemblies 

Remove 

Remove 

Figure 3. Front view: GCQ without vacuum interlock 

P000119 

Remove the top cover of the analyzer assembly and put a dust cover over the 

manifold. Remove all the diffusion pump assemblies and fan brackets. If your GCQ 

has the vacuum interlock, refer to figure 2, if not, refer to figure 3. 

2 ___________________________ EXT70H Turbo Pump Installation Guide _______________________

______________________________________ Step 3. Prepare Mounting Location for 24 V Power Supply 

Step 3. Prepare Mounting Location for 24 V 

Power Supply 

C 

A 

B 

Figure 4. View of GCQ with diffusion pump and cooling fans removed 

P000047 

A) Loosen, but do not remove the two screws on the RF front panel located just 

to the right of the ventilation slots (fig. 4). You will use these screws later to 

attach the 24 volt DC power supply. 

B) Remove the knurled screw. 

C) Later, you will make the power supply chassis ground connection here. 


Step 4. 

Replace Diffusion Pump Controller with Turbo Pump Controller ___________________________ 

Step 4. Replace Diffusion Pump Controller 

with Turbo Pump Controller 

A 

Figure 5. Bottom view of diffusion pump controller assembly 

P000138 

Disconnect all cables to the Diffusion Pump Controller (fig. 5). 

A) Remove the two screws under the diffusion pump controller bracket and 

replace the controller assembly with the Turbo Pump Control Interface 

(fig. 6). Attach the new assembly using the same screws. 


___________________________ Step 4. 

Replace Diffusion Pump Controller with Turbo Pump Controller 

P2 

P1 

P3 

B 

Figure 6. Front view of turbo pump control interface PCB 

P001819 

B) Attach the turbo pump control interface PCB to the screw holes indicated in 

(B). 


Step 5. Modify Vacuum Pump Control Cable Attached to P1 ____________________________________ 

Step 5. Modify Vacuum Pump Control Cable 

Attached to P1 

A 

B 

Figure 7. J1 supply line pin locations for 24 V DC turbo power supply 

P001779 

A) Modify the cable attached to P1 by inserting the blue wire of the EXT70H 

Cable (PN 119568-0002) into the empty pin location #3 of the connector 

housing (fig. 7). 

B) Likewise, insert the brown wire into pin location #9. Re-attach the cables 

and route the remaining end of the EXT70H Cable (PN 119568-0002) 

through the hole under the controller near the attachment point of the 24 V 

power supply. 


_______________________________________________ Step 6. Mount the Turbo Pump to the Manifold 

Step 6. Mount the Turbo Pump to the 

Manifold 

Unpack the Turbo Pump from the shipping container and remove the protective 

packaging. Place the pump upright on a flat surface and install the centering 

O-ring seal. The O-ring and corresponding sealing surfaces must be clean and 

lint-free. Insert two claw clamps into the rear mounting holes under the manifold. 

Partially screw in the bolts and face the claws towards the center of the pump 

flange. Carefully mount the turbo pump onto the manifold and onto the two rear 

claw clamps. Insert the remaining two clamps and tighten the bolts so that the 

pump is seated properly, making sure the O-ring is centered. The fore-pump flange 

should be located to the right of the instrument (fig. 15). 


Step 7. Attach Turbo Controller and Adjust Orientation _________________________________________ 

Step 7. Attach Turbo Controller and Adjust 

Orientation 

Figure 8. Front view: GCQ illustrating position of controller cable 

P001761 

Plug the controller unit onto the pump (fig. 8). The connector is keyed and will only 

fit in one way. 


_________________________________________ Step 7. Attach Turbo Controller and Adjust Orientation 

Figure 9. Turbo controller unit shown in vertical orientation 

P001762 

After the controller is mounted and the locking lever has been rotated to secure the 

unit, loosen the 1.5 mm hex screw on the side of the casting and rotate the 

controller into a vertical position (fig. 9). Re-tighten the locking screw. 


Step 8. Assemble and Mount 24 V DC Power Supply __________________________________________ 

Step 8. Assemble and Mount 24 V DC Power 

Supply 

A B C 

Figure 10. Power supply showing 24V attachment points 

P001789 

A) Attach the neutral (blue) wire of the EXT70H Cable (PN 119568-0002) to the 

neutral terminal of power supply as marked on PCB, P1-2N. 

B) Attach the line (brown) wire of the EXT70H Cable (PN 119568-0002) to the 

line terminal of power supply as marked on PCB, P1-1L. 

C) Attach the chassis ground (green) wire of the EXT70H Cable 

(PN 119568-0002) to both the point marked (C) in figure 10 and to the point 

marked (C) in figure 4. 

10 __________________________ EXT70H Turbo Pump Installation Guide _______________________

__________________________________________ Step 8. Assemble and Mount 24 V DC Power Supply 

D 

E 

Figure 11. Power supply showing 24 V attachment points 

P001789 

D) Using a 90 degree bend tab Faston connector, attach the 24 V (red) lead 

from the mounting plate DB-15 connector to the terminal marked P2-2+ (D) 

in figure 11. 

E) With the same 90 degree bend Tab Faston connector, attach the return 

(black) lead from the mounting plate DB-15 connector to the terminal 

marked P2-1- (E) in figure 11. 


Step 8. Assemble and Mount 24 V DC Power Supply __________________________________________ 

F 

Figure 12. View of 24 V power supply and bracket with optional vacuum lock solenoid attached 

P001782 

F) Use the 90 degree bend Tab Faston connectors at the 24 VDC terminals. 

Mount the DB-15 connector to the power supply bracket using the provided 

screw lock kit and then mount the power supply to the bracket with the 4 

short flat head screws (fig. 12). If a vac lock is equipped, re-orient 

Swagelok connectors as shown. Attach the power supply assembly to the 

face of the RF front panel. Slide it from right to left and engage the backed 

out screws. Attach the knurled screw and then tighten all screws to secure 

the assembly. The Rubber Bumper (PN 23662-0002) is installed between the 

power supply and bracket to prevent possible vibration. 


______________________________ Step 9. Replace Diffusion Foreline Block with Turbo Foreline Block 

Step 9. Replace Diffusion Foreline Block 

with Turbo Foreline Block 

Foreline Block 

Convectron 

Gauge 

Figure 13. Turbo foreline block assembly (PN 119559-0001) 

P001781 

Remove the old foreline block and replace it with the Turbo Foreline Block 

Assembly (PN 119559-0001). Remove the older Teflon tape completely and replace 

with tape provided. Use the existing O-ring and flange clamp to reconnect as 

illustrated in figure 13. 


Step 10. Install Replacement Fan Assembly _________________________________________________ 

Step 10. Install Replacement Fan Assembly 

A 

B 

Figure 14. Inlet fan illustrating wiring harness connections 

P000051 

Attach the main wiring harness (B) to (A) Turbo Inlet Fan Assembly, 110 V 

(PN 96000-60303) or Turbo Fan Assembly, 220 V (PN 96000-60304) as shown in 

figure 14. Fold the cables and screw the assembly to the front RF panel. 


______________________________________ Step 11. Attach Turbo Controller and Adjust for Orientation 

Step 11. Attach Turbo Controller and Adjust 

for Orientation 

Fore-pump flange 

Figure 15. View of completed GCQ. 

P001759 

Attach the TCI cable to connector P3 on the underside of the TCI PCB. Attach the 

turbo pump cable to the DB-15 connector of the power supply. Also attach the 

Convectron gauge cable and inlet evac solenoid. Your unit should look like 

figure 15. 


Step 12. Turn on Power and Check for Fore pressure__________________________________________ 

Step 12. Turn on Power and Check for Fore 

pressure 

Turn on the GCQ main power breaker and check the fore pressure. Fix 

any leaks. 

Step 13. Attach Side and Top Panels 

When a good vacuum is obtained, put the side and top panels on. Press the service 

switch to Normal and place the top cover on the instrument. Reconfigure GCQ data 

system to reflect an installed turbo. This shortens the vent cycle. 

Step 14. Dispose of Old Diffusion Pump 

Components 

Properly dispose of the old diffusion pump vacuum components. Follow disposal and 

safety practices according to local requirements. Do not return parts to the factory. 

The parts are not exchangeable. 

Note: 

Pump-down times are typically longer during the first few days with a new pump. 

After a few days at full vacuum, the time to pump-down shortens. 


_________________________________________________________________________ Reader Survey 

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Document Title: EXT70H Turbo Pump Installation Manual 

Manual: 119574, Revision A 

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______________________________________________________________________________ 

______________________________________________________________________________ 

______________________________________________________________________________ 

______________________________________________________ 

Fax or mail this form to: 

ThermoQuest, Austin 

2215 Grand Avenue Parkway 

Austin, Texas 78728-3812 

USA 

Fax: 1 512 251 1597

EXT70H Turbo Pump Installation Guide

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