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Heated Getter <strong>Gas</strong> Purifiers<br />
<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong>, Inc.<br />
we s u p p o r t y o u r i n n o v a t i o n
Heated Getter<br />
<strong>MonoTorr</strong> Heated Getter Purifiers<br />
<strong>MonoTorr</strong> Purifiers provide the highest capacity<br />
impurity removal in Rare <strong>Gas</strong>es (Argon, Helium,<br />
Xenon, Krypton, Neon), Nitrogen, and Hydrogen.<br />
<strong>MonoTorr</strong> heated getter technology is based on<br />
zirconium alloys and gaseous impurities irreversibly<br />
bind and diffuse into the purification material bulk.<br />
Unlike ambient purification technologies that rely on<br />
surface sorption only, heated getter technology utilizes<br />
the entire volume of material resulting in superior<br />
impurity capacity and longer purifier lifetime, as shown<br />
in the comparison chart as tested in Rare <strong>Gas</strong>.<br />
Applications<br />
Vapor Deposition Processes<br />
MOCVD<br />
PVD<br />
CVD<br />
Epitaxy<br />
Photolithography<br />
Metrology<br />
R&D laboratory experiments<br />
LED<br />
Crystal pulling<br />
Implant<br />
Etching<br />
Diffusion and Oxidation processes<br />
Annealing<br />
Fiber Optics<br />
Analytical<br />
Solar and Photovoltaics
PS2-GC50<br />
Maximum Flow 200 sccm<br />
Product Specifications:<br />
• 200 sccm maximum flow rate (Nitrogen, Helium, Argon)<br />
• Getter bed operating temperature 350-400°C<br />
• Inlet gas temperature 0° - 35° C<br />
• Outlet gas temperature < 50° C<br />
• Maximum inlet pressure 150 psig (10.3 barg)<br />
• Average power consumption < 50 W<br />
• 20 µm metal particle filter<br />
• 1/8” Compression inlet/outlet connections<br />
• CE Marking<br />
• Dimensions:<br />
• Height 23 cm (9 inches)<br />
• Width 10 cm (4 inches)<br />
• Weight 1.8 kg (4 lbs)<br />
Optional equipment:<br />
• 1/4” VCR fittings<br />
• 110-120 VAC or 220-240 VAC<br />
PS2-GC50 Performance<br />
Impurities<br />
Nitrogen<br />
Outlet Purity<br />
(ppb)<br />
Rare <strong>Gas</strong><br />
Outlet Purity<br />
(ppb)<br />
H 2<br />
O
PS4-MT3<br />
PS4-MT15<br />
Maximum Flow 50-75 slpm<br />
PS4-MT3, PS4-MT15 Performance<br />
<strong>Gas</strong> Impurity PS4-MT3 PS4-MT15<br />
5 slpm Average Flow 15 slpm Average Flow<br />
Rare <strong>Gas</strong>es H 2<br />
O, O 2<br />
, CO, CO 2<br />
, N 2<br />
, CH 4<br />
, H 2<br />
PS4-MT50<br />
Maximum Flow 100-150 slpm<br />
PS4-MT50 Performance<br />
<strong>Gas</strong>es Purified<br />
Impurities Removed Rare <strong>Gas</strong>es Nitrogen Hydrogen<br />
H 2<br />
O
<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> Products and Services:<br />
MicroTorr Point-of-Use Purifiers<br />
<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> MicroTorr<br />
ambient temperature purifiers are<br />
ideal solutions for point-of-use gas<br />
purification.<br />
<strong>Gas</strong>es Purified include:<br />
Nitrogen, Rare <strong>Gas</strong>es, Hydrogen,<br />
Oxygen, CDA, Ammonia,<br />
Corrosives, Silane, Arsine,<br />
Phosphine, etc.<br />
Microcontamination Inspection Service<br />
The Microcontamination Inspection Service from <strong>SAES</strong><br />
<strong>Pure</strong> <strong>Gas</strong> is an economical way to determine Molecular<br />
Contamination in Nitrogen, CDA or Cleanroom Air.<br />
The CollectTorr sampling manifold is<br />
shipped to the customer’s site where<br />
samples are collected and, after a fixed<br />
time, the unit is returned to the <strong>SAES</strong> <strong>Pure</strong><br />
<strong>Gas</strong> factory for immediate analysis.<br />
Flow rates up to 1,000 slpm.<br />
MegaTorr Area and House <strong>Gas</strong> Purification<br />
B.SPG.85.0<br />
<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> offers an entire line of bulk gas purifiers designed for complete facility-level purification.<br />
<strong>Gas</strong>es purified include:<br />
Nitrogen, Argon, Helium, Oxygen, CDA, Hydrogen, Ammonia<br />
Flow rates up to 20,000 Nm 3 /hr depending on the gas.<br />
Media<br />
<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong>, Inc.<br />
4175 Santa Fe Road<br />
San Luis Obispo, CA, 93401, USA<br />
Phone: +1 805-541-9299<br />
Fax: +1 805-541-9399<br />
E-mail: spg@saes-group.com<br />
www.saespuregas.com<br />
<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> manufacturing company is ISO9001 certified<br />
ISO 9001:2008<br />
© 2010 <strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong>. Printed in USA. All rights reserved. MICROTORR®, MEGATORR®, and MONOTORR®<br />
are registered trademarks of <strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong>, Inc. <strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> reserves the right to change or modify product<br />
specifications at any time without notice.
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