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Ambient Temperature <strong>Gas</strong> Purifiers<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong>, Inc.we s u p p o r t y o u r i n n o v a t i o n
Offering a full rangeof purificationsolutions<strong>MicroTorr</strong> ® Product Features<strong>MicroTorr</strong> series purifiers are the most complete and reliable solution for Point-of-Use (POU) gas purification.<strong>MicroTorr</strong> purifiers are designed with total application flexibility in mind and are available in a wide range of sizes tomeet the most demanding flow and purity requirements. Optional valves and 0.003 µm particle filters are availableas well as complete, custom subsystem configurations.Combining model size with a selection of gas-specific purification media, <strong>MicroTorr</strong> purifiers can be tailored to manydifferent customer applications, while maintaining impurity removal to Parts-Per-Billion (PPB)levels or better.<strong>MicroTorr</strong> series purifiers are manufactured with the same superior quality our customers have grown to expectfrom all <strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> products. Detailed analytical testing is performed at the factory, utilizing state-of-the-arttechnologies to certify maximum performance and absolute reliability.Applications<strong>Gas</strong>es PurifiedVapor Deposition Processes(MOCVD, PVD, CVD, Epitaxy)PhotolithographyEtchingDiffusion and Oxidation processesAnnealingMetrologyFiber OpticsCarbon Nanotubes (CNT)AnalyticalWeld gas purification<strong>Gas</strong> cabinetBeverage IndustryDirect replacement of existing in-line particle filterN 2, Ar, He, Xe, Ne, Kr, H 2, CDANH 3, DMHzSF 6, CH 4, C 2H 6, C 3H 8, C 4H 10, CF 4, C 2F 6,CHF 3, C 3F 8, C 4F 8, C 2F 4H 2, CCl 4, C 2H 4, C 2H 2AsH 3, PH 3O 2, NO, N 2O, CO 2, SO 2BCl 3, Cl 2, SiH 2Cl 2(DCS), SiHCl 3(TCS), HBr,HCl, SiCl 4, H 2Se, H 2S, SiF 4, B 2H 6, BF 3,GeCl 4, CClH 3, SiH 4Other gases available upon request
Proprietary Ambient Temperature Technology<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong>, the pioneer of heated getter technologies for gas purification, developed the<strong>MicroTorr</strong> product line as a “low cost of ownership” solution to improve process gas reliabilityand consistency.Our ambient temperature purification technology combines state-of-the-art inorganic materialswith optimized designs. This allows for long-lasting purification performances and an extensiverange of flow rate capabilities with lower pressure drops.Ongoing R&D efforts continually produce improved capabilities in existing materials and leadto new patented materials for various gas applications.MEDIA PERFORMANCEMedia <strong>Gas</strong>es Purified Impurities RemovedOutletPerformancePurifierRegenerability202 Ar, CDA, H 2, He, Kr, N 2, Ne, O 2, Xe H 2O < 1 ppb YES203 Ar, CDA, H 2, He, Kr, N 2, Ne, O 2, XeH 2O, CO 2,Acids, Bases, Organics, RefractoryCompounds*< 100 ppt< 10 ppt206 CO H 2O < 1 ppb YES302B 2H 6, BCl 3, BF 3, CClH 3, Cl 2, CO 2, GeCl 4,GeH 4, H 2S, H 2Se, HBr, HCl, N 2O, NF 3, NO,H 2O < 1 ppb NOSiCl 4, SiF 4, SiH 2Cl 2, SiHCl 3, SO 2403 CDAAcids, Bases, Organics, RefractoryCompounds*YES< 1 ppb NO404 CO 2, C 2H 2(Acetylene) NMHC < 1 ppb YES502 AsH 3, PH 3H 2O, O 2< 1 ppb NO702 DMHz, NH 3H 2O, O 2, CO 2< 1 ppb YES902 Ar, He, Kr, N 2, Ne, Xe H 2O, O 2, CO, CO 2, H 2NMHC < 1 ppb YESPART NUMBERING SYSTEM EXAMPLEModel Media Filter Valve Part NumberMC1 903 F V MC1-903FVMC190 202 F MC190-202F903 Ar, He, Kr, N 2, Ne, XeH 2O, O 2, CO, CO 2, H 2, Acids, Bases,Organics, Refractory Compounds*< 100 ppt< 10 pptYES904 H 2H 2O, O 2, CO, CO 2, NMHC < 1 ppb YES905C 2F 6, C 2H 6, C 3F 8, C 3H 8, C 2F 4H 2, C 4F 8, C 4H 10,CCl 4, CF 4, CH 4, CHF 3, SF 6H 2O, O 2, CO, CO 2, H 2NMHC < 1 ppb YES906 CDA, O 2H 2O, CO, CO 2, NMHC < 1 ppb YES*Organic/NMHC compounds (C5-C30...) measured as TolueneAcid compounds (SO 2, NOx, H 2S..) measured as SO 2Base compounds (NH3, amines..) measured as NH 3Silicon/Refractory compounds (HMDSA, HMDSO, TMS) measured as HMDSO
For maximumperformanceand absolutereliabilityCompetitive Advantages and BenefitsReliability. Delivery of Ultra-High-Purity (UHP) gas foruncompromised process consistency and yieldimprovement. Inorganic active purification media meansprotection from hydrocarbon release.Environmentally Friendly. Most <strong>MicroTorr</strong> media arefactory regenerable, minimizing potentially hazardouswaste generation.Quality. Hardware assembly made of 316L stainlesssteel. All units are Helium leak checked and pressuretested.Certified. CE certification according to PressureEquipment Directive (PED)Support. Lifetime estimation and regeneration serviceavailable through the <strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> Global SupportNetwork.Product HighlightsTotal flexibility in size andconfigurationFlow rates up to 1,000 slpmPressure ratings up to 3,000 psigLow Pressure DropRegenerable models availableLong lifetimesCan be configured to includevalves and/or 0.003 µm particle filterCustom-tailored integration forcomplete subsystem solutionsMinimal cost of ownershipNeed More Information?Log on to our website to downloadtechnical information and obtain onlineselection assistance using our PurifierProduct SelecTorr or call our one of ourmany sales offices or distributors.Parts PerTrillion800Typical Outlet PurityContact information for all locations canbe found at:www.saespuregas.com700600ArH+500400300H2O+200100CO+O 2CO 2 +0
Regenerable,environmentallyfriendly solutionPURIFIER MODEL SPECIFICATIONAll models electropolished and helium leak tested. Maximum temperature rating for all models: 40°C (104°F). All models manufactured using 316L stainless steel. All modelsavailable with 0.003 µm particle filter.Model MC1-*F MC50-*F MC190-*F MC200-* MC400-* FT400-902 MC450-* MC500-*Maximum Flow 5 slpm 10 slpm 50 slpm 50 slpm 60 slpm 75 slpm 75 slpm 100 slpmNominal Flow 0.5 slpm 1.5 slpm 5 slpm 5 slpm 9 slpm 10 slpm 10 slpm 12 slpmFilterMax OperatingPressure.003 μm outletmetal1000 psig (69barg) @ 40°C.003 μm outletmetal1000 psig (69barg) @ 40°C*Replace with media type**With 1/4” valve option add 5.6” to face to face lengthWith 1/2” valve option add 10.6” to face to face length***1,000 psig available.003 μm outletmetal250 psig (17.3 barg)@ 40°C***2.0 micron outletmetal250 psig (17.3barg) @ 40°C2.0 micron outletmetal250 psig (17.3barg) @ 40°C***2.0 micron outletmetal500 psig (34.5barg) @ 40°C2.0 micron outletmetal250 psig (17.3barg) @ 40°C2.0 micron outletmetal250 psig (17.3barg) @ 40°CInlet/Outlet 1/4" MVCR 1/4" MVCR 1/4" MVCR 1/4" MVCR 1/4" MVCR 1/4" MVCR 1/4" MVCR 1/4" MVCRLength(Face to Face)**3.31"±.03[84.1mm±0.8]5.00"±.03[127.0mm±0.8]8.20"±.03[208.3mm±0.8]6.30"±.03[160mm±0.8]8.20"±.03[208.3mm±0.8]7.94"±.03[201.7mm±0.8]7.94"±.03[201.7mm±0.8]12.50"±.03[317.5mm±0.8]Outside Diameter 1.50" [38.1mm] 1.50" [38.1mm] 2.00" [50.8mm] 2.00" [50.8mm] 3.00" [76.2mm] 3.00" [76.2mm] 3.00" [76.2mm] 2.00" [50.8mm]Weight 0.7 lbs (0.3 kg) 0.9 lbs (0.4 kg) 1.6 lbs (0.7 kg) 1.8 lbs (0.8 kg) 4.9 lbs (2.2 kg) 4.1 lbs (1.8 kg) 4.1 lb (1.8 kg) 3.3 lbs (1.5 kg)Optional Valves 1/4” Manual 1/4” Manual 1/4” Manual 1/4” Manual 1/4” Manual 1/4” Manual 1/4” Manual 1/4” ManualModel MC1500-* MC3000-* MC4500-* MC9000-* PG1-*FV SP70 -*F SP300 -*F SP600 -*FMaximum Flow 250 slpm 500 slpm 1000 slpm 1,000 slpm 15 slpm 40 slpm 200 slpm 400 slpmNominal Flow 40 slpm 80 slpm 200 slpm 300 slpm 10 slpm 1.5 slpm 10 slpm 15 slpmFilterMax OperatingPressure2.0 micron outletmetal250 psig (17.3barg) @ 40°C2.0 micron outletmetal250 psig (17.3barg) @ 40°C2.0 micron outletmetal250 psig (17.3barg) @ 40°C2.0 micron outletmetal250 psig (17.3barg) @ 40°CInlet/Outlet 1/2" MVCR 1/2" MVCR 1/2" MVCR 1/2" MVCRLength(Face to Face)**18.20"±.03[462.3mm±0.8]20.00"±.03[508.0mm±0.8]27.64"" [702.6mm]39.34" [99.97cm]Outside Diameter 3.00" [76.2mm] 4.00" [101.6mm] 6.0" [152.4mm] 6.0" [152.4mm].003 μm outletmetal250 psig (17.3barg) @ 40°C1/4” FVCR /1/4"MVCR15.49"±.03[393.4mm±0.8]2.00"±.03[50.8mm±.08](Purifier Only).003 μm outletmetal3000 psig (206.8barg) @ 40°C.003 μm outletmetal3000 psig (206.8barg) @ 40°C.003 μm outletmetal3000 psig (206.8barg) @ 40°C1/4" MVCR 1/4” MVCR 1/4” MVCR5.00"±.05[127.0mm±1.3]15.00”±.05[381.0mm±1.3]25.00”±.05[635mm±1.3]2.00" [50.8mm] 2.00” [50.8mm] 2.00” [50.8mm]Weight 12.1 lbs (5.5 kg) 12.8 lbs (5.8 kg) 43.1 lbs (19.5 kg) 60.4 lbs (27.4 kg) 5.1 Ibs (2.3 kg) 5.1 Ibs (2.3 kg) 6.6 lbs (3.0 kg) 11.0 lbs (5.0 kg)Optional Valves 1/2” Manual 1/2” Manual 1/2” Manual 1/2” Manual Standard NOT AVAILABLE NOT AVAILABLE NOT AVAILABLETypicalPressurePressureDropDrop-(MC400)(MC400)MC Series PurifierShown with optional valves8.030 psig 60 psig 90 psig7.06.0Pressure Drop (psid)5.04.03.0PG1 Series Purifier8.20 [208.3]1.50 [38.1]2.01.00.00.0 10.0 20.0 30.0 40.0 50.0 60.0Flow (slpm)15.49 [393.4]4.312±.115 [109.5±2.9]
<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> Products and Services:Microcontamination Inspection ServiceThe Microcontamination Inspection Service from <strong>SAES</strong><strong>Pure</strong> <strong>Gas</strong> is an economical way to determine MolecularContamination in Nitrogen, CDA or Cleanroom Air.The CollectTorr sampling manifold isshipped to the customer’s site wheresamples are collected and, after a fixedtime, the unit is returned to the <strong>SAES</strong> <strong>Pure</strong><strong>Gas</strong> factory for immediate analysis.MonoTorr Point-of-Use Purifiers<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> MonoTorr heated getterpurifiers are ideal solutions for pointof-usepurification where CH 4and N 2removal is required.<strong>Gas</strong>es purified include:Argon, Helium, Nitrogen,Hydrogen.Flow rates up to 150 slpm.MegaTorr Area and House <strong>Gas</strong> PurificationB.SPG.85.0<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> offers an entire line of bulk gas purifiers designed for complete facility-level purification.<strong>Gas</strong>es purified include:Nitrogen, Argon, Helium, Oxygen, CDA, Hydrogen, AmmoniaFlow rates up to 20,000 Nm 3 /hr depending on the gas.Media<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong>, Inc.4175 Santa Fe RoadSan Luis Obispo, CA, 93401, USAPhone: +1 805-541-9299Fax: +1 805-541-9399E-mail: spg@saes-group.comwww.saespuregas.com<strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> manufacturing company is ISO9001 certifiedISO 9001:2008© 2010 <strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong>. Printed in USA. All rights reserved. MICROTORR®, MEGATORR®, and MONOTORR®are registered trademarks of <strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong>, Inc. <strong>SAES</strong> <strong>Pure</strong> <strong>Gas</strong> reserves the right to change or modify productspecifications at any time without notice.
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