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Scanning Electron Microscopy - Gbhenterprises.com

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Test M604: <strong>Scanning</strong> electron microscopy<br />

Abbildungen des Versuchs M604<br />

Abb. 3<br />

Primärelektronenstrahl<br />

primary electron beam<br />

1 mm Auger Elektronen Auger electrons, 1 mm<br />

Rückstreuelektronen<br />

back scattered electrons<br />

Charakterische Röntgenstrahlung<br />

characteristic X-radiation<br />

Röntgenstrahlung: Kontinuum<br />

X-radiation: continuum<br />

Sekundäre Fluoreszenz (Kontinuum und<br />

charakteristische Röntgenstrahlung)<br />

Secondary fluorescence (continuum and<br />

characteristic X-radiation)<br />

RE-Auflösung<br />

BSE resolution<br />

Röntgenstrahlung, Auflösung<br />

X-radiation, resolution<br />

Abb. 4<br />

Wandung<br />

wall<br />

zum Detektor<br />

towards detector<br />

Probenoberfläche<br />

specimen surface<br />

Austrittstiefe<br />

escape level<br />

Reichweite<br />

range<br />

Elektronendiffusionswolke<br />

electron diffusion cloud<br />

Abb. 5<br />

Ordnungszahl<br />

atomic number<br />

Abb. 7<br />

Elektronenstrahl<br />

electron beam<br />

Kondensorlinsen<br />

condenser lenses<br />

Ablenkspulen<br />

beam deflection coils<br />

Objektivlinse<br />

objective lens<br />

Probe<br />

specimen<br />

Verstärker<br />

amplifier<br />

Rastereinheit<br />

scanning unit<br />

Signaldetektor<br />

signal detector<br />

Sichtbildschirm<br />

screen<br />

Abb. 8<br />

Kathode<br />

cathode<br />

Wehneltzylinder<br />

Wehnelt cylinder<br />

Anode<br />

anode<br />

Sprayblende<br />

dispersion aperture<br />

Kondensorlinse<br />

condenser lens<br />

Stigmator<br />

stigmator<br />

Objektiv<br />

objective<br />

Bildfeinverschiebung<br />

fine-adjustment of micrograph<br />

Aperturblende<br />

aperture diaphragm<br />

Probe<br />

specimen<br />

Abb. 9<br />

Elektronenkanone<br />

electron gun<br />

Hochspannungskabel<br />

high-voltage cable<br />

Keramikisolator<br />

ceramic insulator<br />

Wolframdrahtfaden<br />

tungsten filament<br />

16

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