Micronic FPS5300

equipped with an Automatic Loading System (ALS) that
allows running up to 10 jobs without operator intervention.
Stability
The FPS5300 is based upon Micronic’s field-proven
display and semiconductor systems, ensuring a stable and
reliable platform. The high-power laser has a long lifetime
that is consistent with achieving high system uptime.
The Log Database constantly monitors system performance
and facilitates troubleshooting by Micronic’s
service engineers. The Log Database is updated in real
time with system status, including detailed job statistics as
well as temperature and pressure logs.
Mura Quality
The FPS5300 is based on the same platform as Micronic’s
display writers known for their outstanding position in
LCD mask shops. Micronic’s superior mura know-how
makes the FPS5300 the ideal system for display industry
entrants who need to write masks for mura-sensitive
applications such as color filters or OLEDs.
Key specifications
Level A+ Level A Level B Level C
Minimum Lines and Spaces (pitch/2) 0.75 µm 1 µm 3 µm 6 µm
Writing speed, mm 2 /min 260 700 4 000 12 000
Address grid 10 nm 25 nm 50 nm 100 nm
Linewidth Uniformity (3s) 60 nm 70 nm 120 nm 250 nm
Overlay (3s) 200 nm 250 nm 400 nm 500 nm
Options
Optics levels (A+, A, B, C)
Automatic Loading System (ALS)
Matrix spacers (for multiple masks)
Extended Size (1100 mm x 1100 mm)
Mura Control Kit