Sigma7700 製品パンフレット（日本語） - Micronic Mydata

Micronic Mydata Sigma7700DUV

Pushing the limitsSigma7700Sigma770042290nm22nmSigma7700高 度 な 特 長Sigma77003SLMCCDSigma7700Mirror EqualizerAlt-PSMPSM比 類 のない 性 能Sigma7700248nm KrF SLMOPCCDSigma7700Process EqualizerCDCD万 全 のサポートSigma7700Sigma7700Pattern Generation248 nm KrF excimer laser, 2 kHz0.82 NA projection opticsThird generation SLM chip, SLM-On-line Corner EnhancementMirrorEqualizer , calibration refinementFPGA data channel (supports 2.0 Gpixel/sec)OperationIndustry standard mask data preparationHigh resolution CCD camera for calibration andalignmentFEP-171 resist processProcessEqualizer , on-line process corrections 12nd layer alignment system for PSM 1SMIF material handling, 6”x6”x0.25”The Sigma7700 product is protected by, among others, the patents US 6 285 488, US 6 373 619, US 6 504 644 ,US 6 399 261, US 6 687 041, US 6 428 940, US 6 624 878,US 6 717 097, US 6 700 095, US 6 624 880, US 6 618 185, US 6 747 783, US 6 885 493, US 6 891 655, US 6 883 158, US 6 833 854, US 6 816 302, US 6 813 062, US 6813 058, US 6 819 490, CN 99803476, CN 99803477, US 6 903 859, US 6 950 194, US 6 956 692, US 6 965 119 and other intellectual property rights by Micronic Mydata.Writing Performance 4-pass 2-passWrite time (6” typical) 3 hrs 1 hr45 minMinimum main feature 220 nm 220 nmMinimum assist bar 130 nm 150 nmAddress grid1.25 nm 1.25 nmCD uniformity (global, 3σ) 5 nm 7 nmRegistration (global, 3σ) 10 nm 12 nm2nd layer alignment forPSM 1 (mean+3σ)20 nm 30 nm1オプション 機 能スウェーデン 本 社Micronic Mydata ABPO Box 3141SE-183 03 Täby, SwedenTel: +46 8 638 52 00, Fax: +46 8 638 52 90Visit: Nytorpsvägen 9, Täbyinfo@micronic-mydata.com日 本183-00561-1-3Tel: 042-354-1320, Fax: 042-354-1321台 湾Micronic Laser Systems/ Hermes-Epitek CorpSecond Floor#18 Pu-Ding RoadDer-An building, Hsin-Chu, 300Tel: +886-3-564-6656, Fax: +886-3-564-6664中 国Micronic Mydata (Shanghai) Co., Ltd.Unit 101, K BlockLane 168, Da Duhe Road.Putuo District, 200062, Shanghai P.R. ChinaTel: +86 21 3252 3785/86, Fax: +86 21 3252 3780韓 国Micronic Laser Systems Korea Co Ltd3rd Floor Jung-SanBldg. 1026-8Sanbon-Dong, Gunpo-Si, Gyeonggi-Do, 435-040Tel: +82-31-387-5111, Fax: +82-31-388-0087アメリカMicronic Laser Systems Inc.1922 Zanker RoadSan Jose, CA 95112Tel: +1 (408) 392 2260, Fax:+1 (408) 392 2261AB05547 June 2011