The Micronic Mydata LDI 5s Series

The Micronic Mydata LDI 5s Series
Providing a competitive edge to IC substrate makers

Laser direct imaging with the
highest precision and productivity
in the industry
The Micronic Mydata LDI 5s Series builds on the
company’s core competencies including large area
patterning, gray scale SLM technology, UV lasers,
high-speed data handling and precision mechanics.
These are combined with an innovative scanning
system and twin tables, resulting in a system that
delivers high resolution and pattern placement
accuracy without compromising productivity
Sub-10μm resolution
The optical system projects sharp sub-10μm images
in dry film resist, yielding vertical profiles for
accurate copper plating. A proprietary linear gray
scale spatial light modulator (SLM) generates a fine
writing grid for precise positioning of pattern features.
L/S=7/7µm (Pitch 14µm),
7µm lines 19µm and spaces thick dry in 19μm film resist dry film (DFR) resist (DFR)
Unmatched productivity and precision
The revolutionary optical projection system provides
smooth and efficient rotor-based scanning.
Four writing arms scan the panel in turn, minimizing
overhead time. The Micronic Mydata LDI 5s Series
can be integrated into packaging production lines
using industry standard mechanical and electrical
interfaces. It features a high-speed material handler
that supports unmatched productivity and precision.

Autofocus system
Actively follows the substrate topography
for optimal focus performance
Sub-10μm alignment
Accurate alignment and pattern overlay are achieved
by mapping the pattern data to match any distortions
and irregularities of the individual panels. This
is done in real time for each panel by measuring the
alignment mark positions with the three widefield
alignment cameras. A high-speed graphics processor-based
datapath adapts the pattern to each panel
without sacrificing productivity.
Load panel
Measure
alignment
Procedure to test alignment overlay
Load panel
Expose layer 1 Expose layer 2
Unload panel
Measure
alignment
Unload panel
Develop panel
Measure
panel
High throughput
A high-power, 355nm diode-pumped solid state
laser allows for the use of conventional dry film
resists, on panel sizes of up to 510 x 515mm 2 .
The high productivity provided by the Micronic
Mydata LDI 5s Series is largely enabled by an
innovative twin-stage design. As a panel is being
printed on one of the stages, the next panel is
loaded onto the other stage where alignment and
focus mapping are performed. Thus writing and
alignment are done in parallel so that throughput is
not sacrificed. The stages then swap positions and
continue to alternate without interruption, meaning
that the tool effectively writes continuously.
Twin table stage system
Allows concurrent writing and
substrate align/load/unload
Alignment overlay data
distribution showing 4
performance of 2.5µm
Deviation from first layer:
Mean = 1.1µm, 4σ = 2.5µm, Max = 3.6µm
Alignment overlay test grid
Scale = 10µm per grid point
(465 x 465 mm array)
Position deviation from first layer
scale=10µm/grid, area 465*465 mm
X-deviation Y-deviation from first layer layer [µm][μm]
10 µm
5 µm
Y-deviation X-deviation from first layer [µm] [μm]

Pushing the limits
Micronic Mydata worldwide
HEADQUARTERS
Micronic Mydata AB
PO Box 3141
SE-183 03 Täby
Sweden
Tel: +46 8 638 52 00
Fax: +46 8 638 52 90
Visit: Nytorpsvägen 9, Täby
info@micronic-mydata.com
CHINA
Micronic Mydata (Shanghai) Co., Ltd.
Unit 101, K Block
Lane 168, Da Duhe Road.
Putuo District, 200062
Shanghai P.R. China
Tel: +86 21 3252 3785/86
Fax: +86 21 3252 3780
JAPAN
Micronic Mydata Japan K.K.
Mitsugi-Kotobukicho Bldg.
1-1-3 Kotobuki-cho
Fuchu-shi
Tokyo 183-0056
Tel: +81 42-354-1320
Fax:+81 42-354-1321
SOUTH KOREA
Micronic Laser Systems Korea Co Ltd
3rd Floor Jung-San
Bldg. 1026-8
Sanbon-Dong, Gunpo-Si
Gyeonggi-Do, 435-040
Tel: +82-31-387-5111
Fax: +82-31-388-0087
TAIWAN
Micronic Laser Systems/ Hermes-Epitek Corp
Second Floor
#18 Pu-Ding Road
Der-An building
Hsin-Chu, 300
Tel: +886-3-564-6656
Fax: +886-3-564-6664
USA
Micronic Laser Systems Inc.
1922 Zanker Road
San Jose
CA 95112
Tel: +1 (408) 392 2260
Fax:+1 (408) 392 2261
Micronic Mydata patents:
US 7 710 634, US 7 715 641, US 7 787 174, US 7 800 815, US 7 842 926, US 2010/0225974 A1, US 2010/0208329 A1, US 2010/0142838 A1, US 2010/0229146 A1, US 2010/0225943, A1, US 2010/0225236 A1, US 2010/0141966 A1,
US 2010/0142757 A1, US 2010/0225992 A1, US 2010/0225979 A1, WO 2010/100270 A1, WO 2010/100273 A2, WO 2010/063830, A1, WO 2010/063826 A1, WO 2010/063827 A1, WO 2010/100272 A1, WO 2010/100268 A2,
WO 2010/092188 A1, WO 2010/092189 A1, WO 2010/100269 A1, WO 2010/092128 A1, other patents pending.
Micronic Mydata AB (publ.), Nytorpsvägen 9, Box 3141, 183 03 Täby, Sweden. Tel +46 8 638 52 00. Fax +46 8 638 52 90 www.micronic-mydata.com
AB16791 Oct 2011