Gimbal-Less Two-Axis Scanning MEMS Micromirrors Device ...
Gimbal-Less Two-Axis Scanning MEMS Micromirrors Device ...
Gimbal-Less Two-Axis Scanning MEMS Micromirrors Device ...
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<strong>Gimbal</strong>-<strong>Less</strong> <strong>Two</strong>-<strong>Axis</strong> <strong>Scanning</strong> <strong>MEMS</strong> <strong>Micromirrors</strong><strong>Device</strong> DatasheetsS1459www.MirrorcleTech.com© 2011 Mirrorcle Technologies, Inc. All rights reserved.
<strong>Device</strong> Parameters Summary<strong>Device</strong> ID : S1459DBActuator Type : A1I8.1Mirror Type and Size : Integrated mirror of 800um diameterMirror Coating : Al-coatedMaximum Angle - X <strong>Axis</strong> [degrees] : 5.6214Maximum Angle - Y <strong>Axis</strong> [degrees] : 5.6677Maximum Voltage - X <strong>Axis</strong> [V] : 125Maximum Voltage - Y <strong>Axis</strong> [V] : 125Maximum Angle - Coupled Axes [degrees] : 7.1374Resonant Frequency - X <strong>Axis</strong> [Hz] : 3745Resonant Frequency - Y <strong>Axis</strong> [Hz] : 3735Quality Factor- X <strong>Axis</strong> : 40Quality Factor - Y <strong>Axis</strong> : 40Recommended LPF Cutoff Frequency (6th Order Bessel) : 1000Created 6:35 pm 13 October 20111
Static ResponseVoltage vs. Angle - Individual AxesVoltage vs. Angle - Coupled Axes2
Frequency ResponseSmall Signal Frequency Response - MagnitudeSmall Signal Frequency Response - Phase3
Step ResponseX-<strong>Axis</strong> Step ResponseY-<strong>Axis</strong> Step Response4
2D Lookup TablesVoltage vs. X Angle - Lookup TableVoltage vs. Y Angle - Lookup Table5
2D Lookup TablesY Angle vs. X Angle - Addressable Angles6
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