ZMI Differential Plane Mirror Interferometer ... - Zygo Corporation

ZMI Differential Plane MirrorInterferometer (DPMI)P/NDESCRIPTION6191-0188-02 Differential plane mirror interferometerPHYSICAL CHARACTERISTICSDimensionsSee FigureWeight528 grams (18.6 oz)MaterialsHousing- magnetic stainless steelOptics- BK7, crystalline quartz, ZerodurAdhesives- vacuum grade, low volailityCOMPONENTSIncludedPolarization Beamsplitter, Retroreflector,Quartz Waveplate, Half Waveplate, BeamTranslator, Polarization Shear PlateReference Plane Mirror, Target Plane Mirror,Not IncludedFiber Optic PickupNote: this interferometer does not perform optical differencing.OPTICALLinear displacementresolution (nominal)Angular displacementresolution (nominal)Out-of-parallelism oftransmitted beam to inputbeamMaximum error due totolerances in polarizingoptical elementsThermal drift coefficient(typical) (change ofindicated distance perdegree C temperaturechange)0.31 nm (ZMI 2000)0.15 nm (ZMI 4000)0.014 arc sec (ZMI 2000)0.007 arc sec (ZMI 4000)≤11 arc min± 2 nm (0.08 µin)< 0.01 micrometer/degree C(< 0.4 microinch/degree C)Signal Efficiency >52% with plane mirror having 99%reflectance at 633 nm at normalincidence25.4 mm(1.00 in.)246.0 mm(1.81 in.)#4-40 Screws119.5 mm(0.38 in.)38.1 mm(1.50 in.)SQ32.0 mm(1.26 in.)TYP117.9 mm(0.31 in.)227.9 mm(1.10 in.)26.4 mm (0.25 in.)12.7 mm (0.50 in.)To Holes in BeamTranslator11#6-32 UNC Threads, 0.3 in. Deep,Thru-clearance for #4 or 2.5 mm screws(8 places - 4 top/bottom)22.1 mm(0.87 in.)60.2 mm(2.37 in.)22To BeamCenterlines19.0 mm (0.75 in.)128.3 mm(1.12 in.)DIA138.1 mm(1.50 in.)1126.9 mm(5.0 in.)6Zygo CorporationLaurel Brook RoadMiddlefield, CT 06455Phone: 860-347-8506Email: inquire@zygo.comWebsite: www.zygo.comSS-0051 07/09© 2009 Zygo Corporation

DPMIMeasuring Linear DisplacementBeamTranslatorPolarizationShear PlateQuarterWaveplate12.7 mm(0.50 in.)Beam SpacingHalf WaveplateRetroreflectorPolarizationBeamsplitterLinearReferenceMirrorPlane Mirror(or Target Mirror)Measuring Angular DisplacementAngularReferenceMirrorPlane Mirror(or Target Mirror)DPMI MIRRORSP/NDESCRIPTION6191-0437-01 Linear reference mirror6191-0437-02 Angular reference mirror6191-0437-03 Target mirror6191-0437-04 Reverse linear reference mirror6191-0437-05 Reverse target mirrorPHYSICAL CHARACTERISTICSDimensionsSee FigureWeight≈42 grams (1.5 oz)MaterialsHousing- magnetic stainless steelOptics- ZerodurAdhesives- vacuum grade, low volailityOPTICALSignal Efficiency(typical)>99%33.3 mm (1.31 in.)Dia Bolt Circle22.2 mm(0.88 in.)DIA11ReflectiveSurface37.6 mm(1.48 in.)119.4 mm(0.76 in.)28.3 mm(1.12 in.)123.0 mm(0.12 in.)Slots12.5 mm(0.10 in.)2-A-Mirror in-line withSurface -A- within0.25 mm (0.010 in.)9 mm9 mmLinear Reference MirrorAngular Reference MirrorTarget MirrorZygo CorporationLaurel Brook RoadMiddlefield, CT 06455Phone: 860-347-8506Email: inquire@zygo.comWebsite: www.zygo.comSS-0051 07/09© 2009 Zygo Corporation