Karl Suss 6 Analytical Probe System - PTB Sales

TECHNICAL DATAWafer/Substrate sizeSizeXYTheta Wafer Stageup to 6/150 mm diameter: Wafer, single chips and fragmentsPlanarity over 6 < 10 µmResolution 5 µmRange of movementIndependent X-Y brakingLoad stroke Y axisZ height adjustment rangeZ contact/separation stroke155 x 155 mm90 mm10 mm0 – 3 mmTheta range of travel, standard 360°Theta range of travel, fine (optional) ±10°ChuckAdjustable vacuum diametersVertical rigidity 6< 15 µm/10 NPlanarity 3 µmProbeHead PlatenFixed or manual drive with contact strokeVacuum, magnetic, mechanical fixation or high frequencyRange of travelContact /separation stroke40 mm0.2 mmRepeatability 1 µmUtilitiesVacuumCompressed air (Pneumatic lift only)Dimensions and WeightWidth x Depth x HeightWeight– 0.8 bar4 bar490 x 490 x 480 mm,20 x 20 x 1960 kg/133 lbKarl Suss WorldwideNorth AmericaKARL SUSS America, Inc.228 Suss Drive · Waterbury Center, VT 05677 · USAPhone (802) 244-5181 · Fax (802) 244-5103KARL SUSS America, Inc.Western Regional Regional Sales & Service Center4710 East Elwood St. · Suite 21 · Phoenix, AZ 85040 · USAPhone (480) 557-9370 · Fax (480) 557-9371KARL SUSS America, Inc.Western Region Sales Region & Service Sales Center2694 Orchard Parkway · San Jose, CA 95134-2020 · USAPhone (408) 432-3071 · Fax (408) 432-3072GermanyKARL SUSS KG GmbH & Co.Schleissheimer Strasse 90 · D-85748 Garching b. München · GermanyPhone (+49)-[0] 89/3 20 07-0 · Fax (+49)-[0] 89/3 20 07-162KARL SUSS Dresden GmbHSüss - Strasse 1 · D-01561 Sacka b. Dresden · GermanyPhone (+49)-[0] 35240-73-0 · Fax (+49)-[0] 35240-73-700KARL SUSS Vaihingen GmbHPlanckstr. 9 · D-71665 · Vaihingen/Enz · GermanyPhone (+49)-[0] 7042 / 955-0 · Fax (+49)-[0] 7042 / 955-100FranceKARL SUSS France S.A.Avenue des Colombières · F-74490 Saint Jeoire · FrancePhone (+33) [0] 4 50 35 83 92 · Fax (+33) [0] 4 50 35 88 01Great BritainKARL SUSS Great Britain Ltd.23 Ivanhoe Road · Hogwood Lane Industrial EstateFinchampstead · Wokingham · BerkshireGB - RG40 4QQ · EnglandPhone (+44) [0] 11 89-732144 · Fax (+44) [0] 11 89-734395JapanKARL SUSS Japan K.K.GITC 1-18-2, Hakusan, Midori-ku · Yokohama, Kanagawa 226-0006Phone (+81)-45-931-5600 · Fax (+81)-45-931-5601AsiaKARL SUSS Asia Co., Ltd.212/2 Soi Ladprao 10Ladprao Road, Ladyao · Jatujak · Bangkok 10900 · ThailandPhone (+66)-2 938 44-26, -27 · Fax (+66)-2 512 5569Come visit our website!www.suss.comRepresentatives in over 30 countries. Please ask for our address list.PS.PM5.T/B.0700.1.SGM, Copyright, Karl Suss ©2000SUSS. Our Solutions Set Standards.PS.PM5.M.T./B.0700.1.SGM, Copyright, Karl Suss ©2000