Hitachi Spherical Aberration Corrected STEM
Hitachi Spherical Aberration Corrected STEM
Hitachi Spherical Aberration Corrected STEM
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High spatial resolution EDX* analysis benefited from Cs-correctionIn addition to the high EDX sensitivity, adding a Cs corrector allows a large probe current generatedinto a finer electron probe. High spatial resolution X-ray analysis is therefore guaranteed.With benefit of Cs-corrector, a large probe current in a fine probe enables high speed / high spatialresolution / high sensitive EDX analysis.5 nmBF-<strong>STEM</strong> Co-K Mn-K Fe-K0.4 nmDF-<strong>STEM</strong> Ru-L Cu-KBF and DF images of a GMR multiplayer specimen and corresponding EDX maps showing various elemental distribution.A 0.4 nm thick Ru layer is clearly seen.Accelerating voltage: 200 kV. Total acquisition time: 20 minutesw/ Cs-corrector, Schottky gun, Std. lensNi-KDF-<strong>STEM</strong> N-K O-K100 nm< 2at. %Si-K Co-K As-KDF <strong>STEM</strong> image of a Si-device specimen and corresponding EDX* maps showingvarious elemental distribution. The As distribution of
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