Bayard-Alpert Pirani Gauge

BPG400Bayard-Alpert Pirani GaugeTWO VACUUM MEASUREMENT TECHNOLOGIESIN ONE GAUGE

Conserve Space and Reduce CostWith BPG400 Technology0 ... 10 VDCTwo Gauges in OneCombining Bayard-Alpert and Piranitechnologies in one gauge, the INFICONBPG400 spans 13 decades.Ease of UseThe BPG400 is easy to install, easy to use,easy to adjust. It requires no external interlocksystem.High vacuum adjustment of the Pirani isperformed automatically, and full scaleadjustment requires only the push of a button.PiraniPirany technology uses theprinciple of thermal conductivity.The improved temperaturecompensation by the incorporatedtwin Pirani provides fast, stablevacuum measurement from10 -3 mbar up to atmosphere.Increased ProductivityFast and smooth transition fromPirani to Bayard-Alpert systemsaves time and increases systemproductivity by up to 10 percent.10 +310 +210 +110 +010 –110 –210 –310 –410 –5PiraniSignalDisplayProfibus DPDeviceNetInterfaceElectronicsBayardAlpertSignalFlexibilityThe very small footprint and compact designof the BPG400 offers more flexibility forsystem builders, allows system designs to besimplified, and provides a major reduction intotal system costs.Footprint BPG400mm (inches)Reduced ComplexityCost-effectiveness, convenience and flexibilityare built into the BPG400:You need only- one vacuum connection- one sensor cable- one A/D converterSystem requirements and equipment costsinvolved are significantly reduced.Long Filament Life67 (2.64)58 (2.29)The Pirani is used for controlling the Bayard-Alpert system and thus preventing burnoutof the yttrium oxide coated iridium filament,which has proven to withstand at least 10,000air inrushes. This means a dramatic increasein system uptime.PressureAtmosphereBayard-AlpertBayard-Alpert technology is basedon gas ionization. It measuresfrom 5x10 -10 to 10 -2 mbar with highaccuracy and repeatability.Its implemented degas functioncleans the measurement systemwhenever necessary.10 –610 –710 –810 –9Hot Ion offHot Ion onAir In rushNumber of air In rushes >10,00010 –10

StandardDisplayBPG400, BPG400Extremely wide measurement range from 5x10 -10 mbar to atmosphere. Fast andeasy transmission of pressure readings and statuses via analog 0 - 10 VDC orRS232C interface.Measurement range5 x 10 -10 … 1000 mbar, 3.8 x 10 -10 … 750 TorrAccuracy±15% of reading (10 -8 … 10 -2 mbar)Repeatability±5% of reading (10 -8 … 10 -2 mbar)Degas 1) p

paraINFICON -The GaugemakerApplicationsLoadlockGaugesCVDprocess orientedEtchingPVDcustomer orientedIndustrial andcoatingdependableInterfacesUltra high vacuumHigh vacuumMedium vacuumLow vacuumAnalog InterfacesAll transmitter gauges have a standardized0 – 10 VDC output signal ensuring easyintegration into your control system.Measurement signal [V]INFICON measurement signalwith transmitterwithout transmitterPressure [mbar]Digital InterfacesINFICON gauges are available with digitalinterfaces such as Profibus, DeviceNet TM orRS232C. This permits easy, cost-effectivenetworking and system integration andoffers extensive diagnostic functions.ControllersINFICON controllers are fully compatible withall our standard gauges and can becombined with up to three sensors to coveran extremely wide measurement range.The large displays allows for easy and quickreading of the measurement value.INFICON controllers can be remotecontrolled or operated as stand-alone units.

A Worldwide Leader in IntelligentInstrumentationINFICON is a leading developer, manufacturerand supplier of vacuum instrumentation.Manufacturers use our instrumentation foranalysis, monitoring, measurement and control.We sell our products worldwide, with a particularfocus on semiconductor and related markets.Global Presence and ComprehensiveCustomer SupportWe have key direct sales, application support,and service centers in 12 countries around theworld. Our global reach is a critical success factorfor our increasingly multinational customer base.Market-Driven Technology and ProductInnovationOur customers operate in an environment ofconstant technological change. Our strong marketposition is largely due to our investment intechnology and product innovation that keep pacewith these changes. We translate our advancedtechnology into innovative products that improveour customers’ process yield, quality, costs andprofitability.State-Of-The-Art Enabling TechnologiesOur factories have the most advancedtechnologies aimed at providing us with the bestavailable manufacturing efficiency, quality andinformation management. We employ a demandbasedmanufacturing system that enables us tomanufacture products rapidly and efficiently tomeet specific customer demands as well highquality standards.ISO 9001 and ISO 14001 REGISTEREDAsk for theINFICON catalogGLOBAL HEADQUARTERS:Two Technology Place, East Syracuse, NY 13057 USATel: +1.315.434.1100 Fax: +1.315.437.3803 E-mail: reachus@inficon.comUNITED STATES FRANCE GERMANY LIECHTENSTEIN SWITZERLAND UNITED KINGDOM CHINA JAPAN KOREA SINGAPORE TAIWANVisit our website for contact information and other sales offices worldwide. www.inficon.comDue to our continuing program of product improvements, specifications are subject to change without notice.tiba03e1-a ©2001 INFICON Inc.