J. Alexander Liddle - National Institute of Standards and Technology
J. Alexander Liddle - National Institute of Standards and Technology
J. Alexander Liddle - National Institute of Standards and Technology
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High-Throughput Optical Near-Field Imaging• Far-field optical microscopy suffersfrom diffraction-limited resolution• Nearfield scanning optical microscopy(NSOM) greatly improves resolution but istoo slow for practical applications• Improve throughput <strong>of</strong> near-fieldmicroscopy with extendedreference structure instead <strong>of</strong> singlepoint probe• Reconstruct image from raw data usingcomputational techniques• Initial targets: defect metrology needs <strong>of</strong>semiconductor <strong>and</strong> hard disk drive industriesConventional NSOM approachLight sourceLight sourceDetectorTapered fiberNanoscale apertureSampleReference structure enableswide-area near-field imagingDetectorWide-area referencestructureSample12
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