MicroTorr - SAES Pure Gas

Proprietary Ambient Temperature TechnologySAES Pure Gas, the pioneer of heated getter technologies for gas purification, developed theMicroTorr product line as a “low cost of ownership” solution to improve process gas reliabilityand consistency.Our ambient temperature purification technology combines state-of-the-art inorganic materialswith optimized designs. This allows for long-lasting purification performances and an extensiverange of flow rate capabilities with lower pressure drops.Ongoing R&D efforts continually produce improved capabilities in existing materials and leadto new patented materials for various gas applications.MEDIA PERFORMANCEMedia Gases Purified Impurities RemovedOutletPerformancePurifierRegenerability202 Ar, CDA, H 2, He, Kr, N 2, Ne, O 2, Xe H 2O < 1 ppb YES203 Ar, CDA, H 2, He, Kr, N 2, Ne, O 2, XeH 2O, CO 2,Acids, Bases, Organics, RefractoryCompounds*< 100 ppt< 10 ppt206 CO H 2O < 1 ppb YES302B 2H 6, BCl 3, BF 3, CClH 3, Cl 2, CO 2, GeCl 4,GeH 4, H 2S, H 2Se, HBr, HCl, N 2O, NF 3, NO,H 2O < 1 ppb NOSiCl 4, SiF 4, SiH 2Cl 2, SiHCl 3, SO 2403 CDAAcids, Bases, Organics, RefractoryCompounds*YES< 1 ppb NO404 CO 2, C 2H 2(Acetylene) NMHC < 1 ppb YES502 AsH 3, PH 3H 2O, O 2< 1 ppb NO702 DMHz, NH 3H 2O, O 2, CO 2< 1 ppb YES902 Ar, He, Kr, N 2, Ne, Xe H 2O, O 2, CO, CO 2, H 2NMHC < 1 ppb YESPART NUMBERING SYSTEM EXAMPLEModel Media Filter Valve Part NumberMC1 903 F V MC1-903FVMC190 202 F MC190-202F903 Ar, He, Kr, N 2, Ne, XeH 2O, O 2, CO, CO 2, H 2, Acids, Bases,Organics, Refractory Compounds*< 100 ppt< 10 pptYES904 H 2H 2O, O 2, CO, CO 2, NMHC < 1 ppb YES905C 2F 6, C 2H 6, C 3F 8, C 3H 8, C 2F 4H 2, C 4F 8, C 4H 10,CCl 4, CF 4, CH 4, CHF 3, SF 6H 2O, O 2, CO, CO 2, H 2NMHC < 1 ppb YES906 CDA, O 2H 2O, CO, CO 2, NMHC < 1 ppb YES*Organic/NMHC compounds (C5-C30...) measured as TolueneAcid compounds (SO 2, NOx, H 2S..) measured as SO 2Base compounds (NH3, amines..) measured as NH 3Silicon/Refractory compounds (HMDSA, HMDSO, TMS) measured as HMDSO