Zhihong Li - Joint Research Institute in Science and Engineering by ...

Zhihong LiPERSONAL INFORMATIONName: Zhihong LiTitle: Professor, Institute of Microelectronics, Peking UniversityCitizenship: People’s Republic of ChinaMailing Address: Institute of Microelectronics, Peking University, Beijing, 100871,P. R. ChinaPhone: +86-10-6275-2536 ext 14 (O), +86-13717512257Fax: +86-10-6275-1789E-mail: zhhli@pku.edu.cnRESEARCH AND PROFESSIONAL EXPERIENCE2004.7-Present Professor, MEMS Research Center, Institute ofMicroelectronics, Peking University• Polymer-base (Parylene, PDMS, PMMA)micro/nanofabricationtechnology• μTAS (Micro Total Analysis System) for biomedicalapplications• Integration technology of IC, MEMS and microfluidics• RF (Radio Frequency) MEMS, including microswitches andinductors• Nanofabrication base on micromachining techniques2001.8-2004.7 Visiting Scholar, EECS, University of California, Davis• Silicon-based microfabrication technology• Optical MEMS for biomedical applications, includingmicromirrors and OCT• RF (Radio Frequency) MEMS, including microswitches andtunable capacitors2000.8-2001.8 Visiting Scholar, EECS, Cornell University• Silicon-based microfabrication technology• RF (Radio Frequency) MEMS, including microswitches andinductors1997.7-2002.7 Associate Professor, MEMS Research Center, Institute ofMicroelectronics, Peking University• Silicon-based microfabrication technology, including surfacemicromachining and surface micromachining• Integration technology of IC and MEMS• Simulation and modeling of microsystem, especially on RFMEMS and inertial MEMS

ACADEMIC EXPERIENCE1992.9-1997.7 Ph.D. Candidate, Institute of Microelectronics, Peking University,Majoring in Microelectronics.Thesis Reliability of Interconnects in VLSI: Electromigration andStress-induced MigrationMain course Analysis and design of Digital VLSI, Semiconductor DevicePhysics, Microelectromechanical System, NanometerSemiconductor Devices, Advanced Semiconductor DeviceTechnology, New Technology of VLSI, MEMS Devices andDesign, Organization and Design of Microprocessor1988.9-1992.7 Bachelor of Science, Computer Science and Technology, PekingUniversity, Majoring in MicroelectronicsOTHER ACADEMIC ACTIVITIESCo-Chair of Technical Program Committee, IEEE NEMS’09.Member of Technical Program Committee, the IEEE Sensors ConferenceMember of Technical Program Committee, the IEEE MEMS Conference 2010Member of Technical Program Committee, Transducer 2011Member of IEEE (Institute of Electrical and Electronic Engineers)Senior Member of CSMNT (Chinese Society of Micro/Nanotechnology)Vice President, MEMS and NEMS Division, China Instrument and Control SocietyValued Reviewer, Sensors and Actuators AReviewer, IEEE/ASME Journal of Microelectromechanical System, Journal ofMicromechanics and Microengineering, Sci China Ser E & FPUBLICATIONSJournal Papers:1. Huang Huang, Zewen Wei, Yuanyu Huang, Deyao Zhao, Lianghong Zheng, Tianjing Cai1,Mengxi Wu, Wei Wang, Xianfeng Ding, Zhuan Zhou, Quan Du*, Zhihong Li*, Zicai Liang*, Anefficient and high-throughput siRNA delivery system, Lab on a Chip, DOI:10.1039/C0LC00195C2. Yinhua Lei, Yaoping Liu, Wei Wang*, Wengang Wu, and Zhihong Li, Studies on ParyleneC-caulked PDMS (pcPDMS) for low permeability required microfluidics applications, Lab on aChip, DOI:10.1039/C0LC00486C.3. Fei Xie, Yunshan Wang, Wei Wang*, Zhihong Li, Gilad Yossifon, and Hsueh-Chia Chang,Preparation of rhombus-shaped micro/nanofluidic channels with dimensions ranging fromhundred nanometers to several micrometers, Journal of Nanoscience and Nanotechnology, 2010,10(11):7277-7281.

4. Renxin Wang, Xianju Huang, Guangfeng Liu, Wei Wang, Fangtian Dong and Zhihong Li*,Fabrication and Characterization of a Parylene-based 3D Microelectrode Array for Use in NeuralProsthesis, Journal Of Microelectromechanical Systems, Vol. 19, NO. 2, 2010, p367-374.5. Yinhua Lei, Wei Wang*, Wengang Wu, and Zhihong Li, Suspended nanoparticle crystal(S-NPC): A nanofluidics-based, Lab on a Chip, 2010, 10, 2338-2340,DOI: 10.1039/C004758A6. Yin Zhang, Yisong Wang, Zhihong Li*, Analytical method of predicating the instabilities of amicro arch-shaped beam under electrostatic loading, Microsyst Technol (2010) 16:909–9187. ZhaoXin GENG, Qing LI, Wei WANG, Zhihong LI*, PDMS prism-glass optical coupling forsurface plasmon resonance sensors based on MEMS technology, SCIENCE CHINA InformationSciences , Vol. 53, No. 10, 2144-2158, DOI: 10.1007/s11432-010-4072-z8. Yinhua Lei, Wei Wang*, Wengang Wu, and Zhihong Li, Nanofluidic diode in a suspendednanoparticle crystal, Applied Physics Letters, 2010, 96, 2631029. Bin-Bin Xu, Hong Xia, Li-Gang Niu, Yong-Lai Zhang, Kai Sun, Qi-Dai Chen, Ying Xu,Zhi-Qiu Lv, Zhi-Hong Li, Hiroaki Misawa, and Hong-Bo Sun*, Flexibly metal nanowiring onnonplanar substrates by femtosecond laser induced electroless plating, , Small, Vol. 6, Iss. 16,pp1762–1766, August 16 201010. Xu Ji, Huaiqiang Yu, Xianju Huang, Yinghua Lei, Zhihong Li*, Parylene film for sidewallpassivation in SCREAM process, Sci China Ser E-Tech Sci, Feb. 2009, vol. 52, no. 2, 357-36211. Zhen Chen, Yu Zhao, Wei Wang*, and Zhihong Li, Microfluidic patterning of nanoparticlemonolayers, Microfluidics and Nanofluidics, 2009, 7:585-591.12. Zhen Chen, Yunshan Wang, Wei Wang*, and Zhihong Li, Nanofluidic electrokinetics innanoparticle crystal, Applied Physics Letters, 2009, 95:10210513. Yinhua Lei, Wei Wang*, Huaiqiang Yu, Yingcun Luo, Ting Li, Yufeng Jin, Haixia Zhang andZhihong Li, A parylene-filled-trench technique for thermal isolation in silicon-basedmicrodevices, J. Micromechanics and Microengineering, 2009, 19: 035013.14. Xi Ji, Lu Wang, Jianzhong Xi, Zhihong Li,* A piezoresistive cantilever for lateral forcedetection fabricated by a monolithic post-CMOS process, J. Micromech. Microeng. 18 (2008)115001 (11pp)15. Siwei Zhao, Wei Wang, Zhihong Li*, Linearity and dissociative antigen noise analyses ofcompetitive microfluidic heterogeneous immunoadsorption, Biomed Microdevices (2008) 10:519–52916. Wei Wang, Yu Zhao, Yinhua Lei, Zhihong Li*, Nanoparticle-based lift-off technique ultra-thinnanoporous film preparation, Science in China Series F: Information Sciences, Jun. 2008, vol. 51,no. 6, 819-82417. Wei Wang, Zhihong Li*, Simplified Scaling Transformation for the Numerical Simulation ofMEMS Devices With Thin Film Structures, Chinese Journal Of Mechanical Engineering, Vol. 21,No. 5, 200818. Haixia Zhang, Hui Guo, Zhe Chen, Guobing Zhang, and Zhihong Li*, Application of PECVD

SiC in Glass Micromachining, Journal of Micromechanics and Microengineering, (2007)17775-78019. Haixia Zhang, Hui Guo, Yu Wang, Guobing Zhang, and Zhihong Li*, Study on PECVD SiCcoated Pressure Sensor, Journal of Micromechanics and Microengineering, (2007)17 426-43120. Yu Jie Tang, Jing Chen, Yubo Huang, Dachao Li, Sha Sha Wang, Zhihong Li, Wendong Zhang,Ultra-sensitive highly reproducible film stress characterization using flexible suspended thinsilicon plates and local curvature measurements, Journal of Micromechanics andMicroengineering, v17, n10, p1923-1930, 200721. Wendian Shi, Norman C. Tien, and Zhihong Li*, A Highly Reliable Lateral MEMS SwitchUtilizing Undoped Polysilicon as Isolation Material, Journal Of Microelectromechanical Systems,VOL. 16, NO. 5, 2007, PP 1173-118422. Yin Zhang, Yisong Wang, Zhihong Li*, Yubo Huang, and Dachao Li, Snap-Through andPull-In Instabilities of an Arch-Shaped Beam Under an Electrostatic Loading, Journal OfMicroelectromechanical Systems, VOL. 16, NO. 3, 2007, PP684-69323. Xiang Han, Wengang Wu, Yi Li, Zhihong Li, Yilong Hao, Guizhen Yan, “Electroless copperplating applicable for bulk-silicon micromachined radio frequency inductor”, Thin Solid Films515 (2006) 2607–2611. (SCI)24. Yiyong Tan, Rongchun Zhou, Haixia Zhang*, Guizhang Lu, Zhihong Li, “Modeling andSimulation of LAG Effect in Deep Reactive Ion Etching Process”, Journal of Micromechanicsand Microengineering, 16 (2006) 2570-257525. Wendian Shi, Haixia Zhang*, Guobing Zhang and Zhihong Li , “Modifying residual stress andstress gradient in LPCVD Si3N4 film with ion implantation”, Sensors and Actuators A: Physical ,130–131 (2006) 352–357 (SCI)26. Wengang Wu*, Li Yi, Fengyi Huang, Xiang Han, Shaoyong Zhang, Zhihong Li and YilongHao, MEMS Inductor Consisting of Suspended Thick Crystalline Silicon Spiral with CopperSurface Coating, Chinese Journal of Semiconductors, vol.27 No.4,2006, pp66227. Wengang Wu*, Fengyi Huang, Yi Li, Shaoyong Zhang, Xiang Han, Zhihong Li, Yilong Hao,and Yangyuan Wang, RF Inductors with Suspended and Copper Coated Thick Crystalline SiliconSpirals for Monolithic MEMS LC Circuits, IEEE Microwave and Wireless Components Letters15, No.12, pp.853-855, Dec. 2005.28. Yong Zhu, Guizhen Yan*, Jie Fan, Jian Zhou, Xuesong Liu, Zhihong Li and Yangyuan Wang,“ultra deep and high aspect ratio electrical isolation trench” Journal of Micromechanics andMicroengineering, 2005, V. 15, No 3, pp 636-642 (SCI)29. Ye Wang, Zhihong. Li, Daniel McCormick1 and Norman Tien*, A low-voltage lateral MEMSswitch with high RF performance, J. Microelectromechanical Systems. 2004, Vol. 13, No. 6,P902-91130. Ye Wang, Zhihong Li, Daniel T. McCormick and Norman C. Tien*, A micromachined RFmicrorelay with electrothermal actuation, Sensors and Actuators A: Physical, Volume 103, Issues

1-2, 15 2003, Pages 231-23631. Zhihong Li*, Yilong Hao, Dacheng Zhang, Ting Li, Guoying Wu, An SOI-MEMS technologyusing substrate layer and bonded glass as wafer-level package Sensors and Actuators A-Physical96 (1): 34-42, 200232. Zhihong Li*, Guobing Zhang, Wei Wang, Yilong Hao, Ting Li, Guoying Wu, Study on theapplication of silicide in surface micromachining, Journal of Micromechanics andMicroengineering 12 (2): 162-167, 200233. Zhenchuan Yang, Zhihong Li, Zhiyong Xiao, Yilong Hao, Guoying Wu, Numerical simulationof a bulk micromachined relay with lateral contact International Journal Of Nonlinear SciencesAnd Numerical Simulation 3 (3-4): 357-360, 200234. Hongrui Jiang, Keytea Yoo, J. Yeh, Zhihong Li, Norman C. Tien*, Fabrication of thick silicondioxide sacrificial and isolation blocks in a silicon substrate, Journal Of Micromechanics AndMicroengineering 12 (1): 87-95, 200235. Dacheng Zhang, Zhihong Li*, Ting Li, and Guoying Wu, A Novel Isolation Technology inBulk Micromachining Using DRIE and Polysilicon Refill, Journal of Micromechanics andMicroengineering, 11, 2001, P13-1936. Gang Li, Zhihong Li, Congshun Wangg, Yilong Hao, Ting Li, Dacheng Zhang and GuoyingWu, Design and fabrication of a highly symmetrical capacitive triaxial accelerometer, Journal ofMicromechanics and Microengineering, 48–54, Vol.11, No.1, 2001.37. Zhihong Li*, Zhixiong Xiao, Yilong Hao, Guoying Wu, and Yangyuan Wang,A BulkMicromachined Vibratory Lateral Gyroscope Fabricated with Wafer Bonding and Deep TrenchEtching, Sensors and Actuators, A83, 2000, 24-2938. Zhihong Li*, Dacheng Zhang, Ting Li, Wei Wang, and Guoying Wu, Bulk MicromachinedRelay with Lateral Contact, Journal of Micromechanics and Microengineering , Vol. 8, No. 3,200039. Zhihong Li,* Guoying Wu, Yangyuan Wang, Zhiguo Li, and Yinghua Sun, NumericalCalculation of Electromigration under Pulse Current with Joule Heating, IEEE Tran. ElectronicDevices, Vol.46, No. 1, 199940. Zhihong Li*, Guoying Wu, Yangyuan Wang, Zhiguo Li, and Yinghua Sun, Dependence ofElectromigration Caused by Different Mechanisms on Current Densities in VLSI Interconnects, J.Materials Science: Materials in Electronics, Vol. 10, 1999,p 653-65941. Zhixiong Xiao, Guoying Wu, Guobing Zhang, Zhihong Li, Yilong Hao, Wenru Chen, andYangyuan Wang, Low Temperature Silicon Wafer-to Wafer Bonding with Nickel Silicide, J.Electrochem. Soc. Vol.145, No. 4,199842. Zhixiong Xiao, Min Chen, Guoying Wu, Changde Zhao, Dacheng Zhang, Yilong Hao, GuobingZhang and Zhihong Li, Silicon micro-accelerometer with mg resolution, high linearity and largefrequency bandwidth fabricated with two mask bulk process, Sensors and Actuators A: Physical,Volume 77, Issue 2, 12 October 1999, Pages 113-119

43. Zhixiong Xiao, Guoying Wu, Dacheng Zhang, Guobing Zhang, Zhihong Li, Yilong Hao,Yangyuan Wang, Silicon/Glass Wafer-to-Wafer Bonding with Ti/Ni Intermediate Bonding,Sensors and Actuators A 71(1998) 12344. Zhixiong Xiao, Guoying Wu, Yilong Hao, Guobing Zhang, Zhihong Li, Wenru Chen,Shimei Liu, Ting Liu, Tiesong Wang, Yangyuan Wang, A New Process for ReleasingMicromechanical Structures in Surface Micromechining with Polysilicon support and LPCVDSi 3 N 4 Mask”, Sensors and Actuators A 72(1998) 18945. Zhihong Li*, Guoying Wu, and Yangyuan Wang, “Evaluation of Yield Strength in AlInterconnects in VLSI”, Chinese J. Electronics, Vol.6, 1997, P1946. Zhihong Li, Ye Gu, Guoying Wu, Wen-Ru Chen,Yang-Yuan Wang, “Measuring and ModelingStresses in Al Metallization”, J. Vac. Technol. A 14(5), 1996, P2693Conference Papers:1. Xuanye Wang, Zhaoxin Geng, Wei Wang and Zhihong Li*, PDMS nanostructures fabricated bytwo-step molding process used for tunable sers integrated with microfluidics, the 14thInternational Conference on Miniaturized Systems for Chemistry and Life Sciences (Micro TotalAnalysis Systems, uTAS’10), 3 - 7 October 2010, 1925-1927,Groningen, Netherlands,pp1925-19272. Yushi Zhang, XuJi, Can Li, Wengang Wu and Zhihong Li*, a novel fabrication method ofhollow nanoneedles applicable for single cell operation,the 14th International Conference onMiniaturized Systems for Chemistry and Life Sciences (Micro Total Analysis Systems, uTAS’10),3 - 7 October 2010, Groningen, NETHERLANDS, 1895-18973. Zewen Wei, Huang Huang, Mengxi Wu, Zicai Liang, Wei Wang and Zhihong Li*, a highperformance continuous electroporation chip,the 14th International Conference on MiniaturizedSystems for Chemistry and Life Sciences (Micro Total Analysis Systems, uTAS’10), 3 - 7October 2010, Groningen, NETHERLANDS, pp 1622-16244. Zhaoxin Geng, Jing Du, Lingqian Zhang, Chun Yang, Wei Wang and Zhihong Li*, separationand enrichment of mesenchymal stem cells on a chip,the 14th International Conference onMiniaturized Systems for Chemistry and Life Sciences (Micro Total Analysis Systems, uTAS’10),3 - 7 October 2010, 241-243, Groningen, NETHERLANDS, pp241-2435. Yinhua Lei, Wei Wang*, Wengang Wu, and ZhihongLi,, Suspended Nanoparticle Crystal forSurface Charge Sensing, IEEE SENSORS 2010 Conference November 1 - 4, 2010, Waikoloa,Hawaii, USA6. Xunjun He, Zhiqiu Lv, Bo Liu and Zhihong Li*, Laterally Driven Capacitive RF MEMS SwitchUsing Parylene as Dielectric Layer, EEE SENSORS 2010 Conference November 1 - 4, 2010,Waikoloa, Hawaii, USA7. Zewen Wei, Huang Huang, Zicai Liang, Zhihong Li*, A High Performance Electroporation ChipIntegrating Multi-Well Plate and Annular Interdigital Microelectrodes, IEEE MEMS 2010, HongKong, pp951-9548. Bo Liu, Zhiqiu Lv,Xunjun He, and Zhihong Li, Microspring Contact for Enhancement of Power

Handling and Reliability in RF MEMS Switch, The 5th Asia-Pacific Conference on Transducersand Micro-Nano Technology (APCOT2010), Australia, 20109. Bo Liu, Zhihong Li*, Zhiqiu Lv, Xunjun He, and YilongHao, A Surface Micromachining ProcessUtilizing Dual Metal Sacrificial Layer for Fabrication of RF MEMS Switch, ,Proceeding of IEEENEMS, 201010. Zhaoxin Geng, Zhaoqi Xu, Wei Wang, Wenhua Su and Zhihong Li*, Separation of Blood on aChip Utilizing SpiralMicorchannel with Fence and Cofferdam as Filtration Structures,ICSICT2010, 1474-1476, Nov. 2010, shanghai11. Xinyi Zhang, Pei-Yu Chiou, Zhihong Li*, A conceptual prototype of the light, switchablemicroelectrode array (LSMA) for retinal prosthesis, Nano/Micro Engineered and MolecularSystems (NEMS), 2010 5th IEEE International Conference on, pp.1079 – 108212. Xianju Huang, Renxin Wang, Wei Wang, and Zhihong Li*, Fabrication of flexible 3DMicroelectrode Array with parylene-based pattern transfer technique, Transducers’09, pp236-23913. Xu Ji, Lin Yang, Zewen Wei1, Lu Wang, Jianzhong Xi and Zhihong Li*, A MonolithicallyIntegrated Platform For High Throughput Cell Characterization and Drug Screening,Transducers’09, 1786-178914. Qiang Liu, Bo Liu and Zhihong Li*, Improvement of Au cantilever fabrication process with Cuas a sacrificial layer, IEEE NEMS’09, 872-87615. Xianju Huang, Yu Tang, Quan Qiang, Wei Wang, and Zhihong Li*, A Novel 3D FlexibleParylene-Metal Structure Fabrication Technique, IEEE NEMS’09, 907-91016. Chenying Yang, Wei Wang*, and Zhihong Li, Optimization of corona-triggered PDMS-PDMSbonding method, Proceeding of IEEE NEMS, 2009, 319-32217. Zhen Chen, Yu Zhao, Wei Wang*, and Zhihong Li, Microfluidic Patterning of NanoparticleMonolayer: Mechanism analysis and noncontinuously patterning approach Proceeding of IEEENEMS, 2009, 818-82218. Fei Xie, Yunshan Wang, Wei Wang*, Zhihong Li, Gilad Yossifon and Hsueh-Chia Chang,Preparation of Rhombus-shaped Micro/Nanofluidic Channels with Dimensions Ranging fromHundred Nanometers to Several Micrometers, Proceeding of ChinaNano2009, 2009, 50-203219. Zhihong Li, Flexible Three-Dimentional Microelectrode Array For Retinal Prosthesis, IEEENANOMED’09 (Invited)20. Zhihong Li, Integration of SOC and LOC, IEEE NEMS’09 (Invited)21. LV Zhiqiu,YANG Bo, LIU Bo, LI Zhihong, Research on Electroless Plating for Improvement ofMetal Contact of Lateral RF MEMS Switch, 11 届 中 国 微 米 纳 米 技 术 年 会 ,200922. Xu Ji, Lu Wang, Jianzhong Xi, Zhihong Li*, Monolithic Integration of Force Sensor,Signal-Processing Circuitry and Self-Assembled Cells for Characterization ff Muscles’Mechanics, uTAS 200823. Zhihong Li*, Xu Ji, Lu Wang, Jianzhong Xi, Merging SoC and LOC Together, InternationalConference on Solid-State and Integrated-Circuit Technology ICSICT’2008 ,October 20-23,

2008, Beijing, China (Invited)24. Zhaoxin Geng , Xu Ji , Xia Lou, Qing Li , Wei Wang , Zhihong Li* ,A surface plasmonresonance(SPR)sensor chip integrating prism array based on polymer microfabrication, 9thInternational Conference on Solid-State and Integrated-Circuit Technology ICSICT’2008 ,October 20-23, 2008, Beijing, China.25. Zhaoxin Geng , Xu Ji , Wei Wang , Zhihong Li*, Near-infrared surface plasmon resonance(SPR) chip with silicon micro-prism and multi-micro-channel based on MEMS technology, 1stInternational Conference of the Chinese Society of Micro/Nano Technology,November 20-22,2008, Beijing, China.26. Xianju Huang Weihong Yu, Wei Wang, Chan Zhao, Chengchen Gao, Xuqian Wang,ZhikunYang,Zhihong Li* and Fangtian Dong, Flexible Microelectrode Array on Parylene for SubretinalStimulation and Its Biocompatibility Test, 1st International Conference of the Chinese Society ofMicro/Nano Technology, p482-483, 200827. Yinhua Lei, Wei Wang*, Huaiqiang Yu, Ting Li, Yufeng Jin and Haixia Zhang, Zhihong Li,Deep Trench Refilling With Parylene C For High-Quality Isolation In Bulk MicromachinedDevices, Proceedings of 2nd Integrated Commercialization of Micro & NanosystemsInternational Conference &Exhibition, June 3-5, 2008, Clear Water Bay, Kowloon, HongKongPaper Number: Micro/Nano 2008-70112,28. Yu Zhao, Yinhua Lei, Wei Wang*, Zhihong Li, Microfluidic Patterning of Close-packedNanoparticle Monolayer, Proceedings of the 3rd IEEE Int. Conf. on Nano/Micro Engineered andMolecular Systems January 6-9, 2008, Sanya, China29. Xu Ji, Wei Wang, Xia Lou, Jianhong Peng, and Zhihong Li*, A Centrifugation-EnhancedHigh-Efficiency Micro-Filter With Spiral Channel, The 14th International Conference on Solid-State Sensors and Actuators(Transducers’07), Lyon, Paris, PP1865-186830. Dongsheng Xu, Wei Wang, Yufeng Jin and Zhihong Li*, Continuously MicrofluidicCentrifugation In Sequentially Connected Semicircular Microchannels For Micrometer-SizedParticle Enrichment, the 11th International Conference on Miniaturized Systems for Chemistryand Life Sciences (Micro Total Analysis Systems, uTAS’07), Paris, France, 2007, PP539-541,31. Zhihong Li*, Spiral Microchannels For Continuously Microfluidic Centrifugation, Workshop onMicrofluidics and Its Applications, Hong Kong, 2007(Invited)32. Wei Wang, and Zhihong Li*, A simplified scaling transformation for the numerical simulation ofMEMS devices with thin film structures. International conference of MicroNanoChina2007,January 10-13, Sanya, China, 200733. Zhanfei, Wang, Zhihong Li, Wengao Lu, "A New Self-Oscillation Loop for MEMS VibratoryGyroscopes." IEEE ASICON 2007, pp.1046-104934. Yu Wang. Haixia Zhang, Hui Guo, Guobing Zhang, Zhihong Li, “Mechanical Properties ofPECVD silicon carbide thin films”, APCOT 2006, 25-28, June, Singapore35. Hui Guo, Yu Wang, Sheng Chen, Guobing Zhang, Haixia Zhang, Zhihong Li, “PECVD SiC as a

Chemical Resistant Material in MEMS”, 1st IEEE NEMS, 18-21, Jan, 2006, Zhuhai, China,36. Wei Wang, Dongsheng Xu, and Zhihong Li*, Microfluidic centrifugations in a spiralmicrochannel, the 10th International Conference on Miniaturized Systems for Chemistry and LifeSciences (Micro total analysis systems 2006), Tokyo, Japan, Novmber 5-9, 2006.37. Wei Wang, Zhihong Li*, Thermal isolation in continuous flow PCR chip, a numerical insight,Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, June 25-28,2006.38. Xu Ji, Jing Chen*, Ying Wang, Zhihong Li, Guizhen Yan, Yangyuan Wang, A Wafer LevelHermetic Package for Micromachined Structures on Glass, The 3rd Asia-Pacific Conference ofTransducers and Micro-Nano Technology(APCOT 2006), PAT-A049439. Shasha Wang, Jing Chen*, Dachao Li, Yubo Huang, Zhihong Li, Evaluating Interface Effect OnStresses In Thin Films By A Local Curvature Metrology With High Accuracy And Resolution,The 1st Annual IEEE International Conference on Nano/Micro Engineered and MolecularSystems (IEEE NEMS 2006), Jan. 2006, Zhuhai, China p1513-151640. Zhihong Li, MEMS: An Enabling Technology for Wireless sensor Network, 2006 (Invited)41. Wendian Shi, Haixia Zhang*, Shasha Wang, Guobing Zhang and Zhihong Li, ModifyingResidual Stress And Stress Gradient In LPCVD Si3N4 Film With Ion Implantation,Transducers’05, p824-82742. Zhihong Li, Norman C. Tien*, Low-Cost Electroplated Vertical Comb-Drive Actuator,Proceedings of the Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, 2004,220-22343. Bee Lee Chua, Zhihong Li, Daniel McCormick, W. P. Shih, Norman C. Tien*, A. S. Wexler,D. A. Niemeier and B. Holman. A Unipolar Corona Discharge Microfabricated IonizerStructure For Gases At Atmospheric Pressure And Composition. Proceedings of the 17th IEEEConference on Micro Electro Mechanical Systems, MEMS 2004, pp.261-26444. Wen Pin Shih, Zhihong Li, Daniel McCormick, Norman C. Tien* and C. Y. Hui. TunableSolenoid Microinductors Utilizing Permalloy Electro-Thermal Vibromotors. Proceedings of the17th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2004, pp.793-79645. Yi Li, Zhihong Li, Yilong Hao, Guizhen Yan, Wengang Wu* and Xiang Han, Electroless CopperPlating on Silicon Surface for MEMS, The Seventh International Conference on Solid-State andIntegrated-Circuit Technology (ICSICT-2004), Beijing (October 18~21, 2004) , pp.1900-190346. Daniel McCormick, Zhihong Li, Norman C. Tien*, Dielectric Fluid Immersed MEMS TunableCapacitors, IEEE MTT-S International Microwave Symposium, 2003, 495-49847. Daniel McCormick, Zhihong Li, Norman C. Tien*, Silicon Mems Tunable CapacitorsOperating In Dielectric Fluid, Transducers’03, 2003, 871-87448. Hongrui Jiang, Zhihong Li, and Norman C. Tien*, Reducing Silicon-Substrate Parasitics OfOn-Chip Transformers, The Fifteenth IEEE International Conference on Micro ElectroMechanical Systems (MEMS’02), Las Vegas, NV, USA, Jan. 2002, P649-653

49. Ye Wang, Zhihong Li, Daniel T. McCormick and Norman C. Tien*, Low-VoltageLateral-Contact Microrelays For RF Applications, The Fifteenth IEEE International Conferenceon Micro Electro Mechanical Systems (MEMS’02), Las Vegas, NV, USA, Jan. 2002, P645-64850. Congshun Wang, C.Y.Xiong, Weibin Zhang, Jing Fang, Zhihong Li, Testing and simulation ofnovel MEMS relays by applying digital image correlation technology, The first IEEEinternational conference on sensors,p1204-1207,Florida,USA, June 2002.51. Zhihong Li, and Norman C. Tien*, A High Tuning-Ratio Silicon-Micromachined VariableCapacitor With Low Driving Voltage, Solid-State Sensor, Actuator, and Microsystems Workshop,Hilton Head Island, SC, USA, 2002, 239-24352. Jing Fang, Weibin Zhang, Congshun Wang, Zhihong Li, D.C.Zhang, Electromechanical analysisof microelectromechanical structures and dynamic simulations of laterally vibratorymicrogyroscope, SPIE Proc. Vol.4407,p68-77,Edinburgh,UK,May 2001.53. Zhihong Li, Dacheng Zhang, Ting Li, Ying Wang, Guoying Wu, Novel Silicon Cap PackageTechnology for Monolithic Micro-inertial Measurement Unit, SPIE's 7th Annual InternationalSymposium on Smart Structures and Materials, San Diego, CA, USA, 200054. Zhihong Li, Zhixiong Xiao, Yilong Hao, Guoying Wu, and Yangyuan Wang,A BulkMicromachined Vibratory Lateral Gyroscope Fabricated with Wafer Bonding and Deep TrenchEtching , The 10th International Conference on Solid- State Sensors andActuators(Transducers’99), Sendai, Japan, 1999, P1594;55. Gang Li, Zhihong Li, Congshun Wang, Yilong Hao, Guoying Wu, Design and Simulation of AaNovel Highly Systemmetrical Pizoelectric Triaxial Accelerometer, MSM’2000, San Diego, CA,USA, 2000, P628-63156. ZhiXiong Xiao, Guoying Wu, Dacheng Zhang, Yilong Hao, Zhihong, Li, Lateral Capacity sensedAccelerometer Fabricated with the Anodic bonding and the High Aspect Ratio Etching, The 10thInternational Conference on Solid- State Sensors and Actuators (Transducers’99), Sendai, Japan,1999, P15157. Guoying Wu, Zhixiong Xiao, Zhihong Li, Hao Yilong, Design And Fabrication for Inertial MicroSensors, International Conference on Solid- State and Integrated Circuit Technology (ICSICT’98),Bejing, China, 1998, P903