The Extractor Ion Source IQE 11/35 - Specs

Surface AnalysisTechnologyVacuumComponentsSurface AnalysisSystem SoftwareComputerTechnologyThe Extractor Ion Source IQE 11/35Product InformationThe extractor type ion source IQE 11/35 generates a typical ion current of 10-15 µA (Argon)with a Gaussian type beam profile depending on acceleration voltage. The special Y-oxidecoated Ir-cathode is suitable for operation with all noble gases, N 2 , and reactive gases like O 2 ,H 2 and CH 4 . This cathode is of the non-line-of-sight type which eliminates samplecontamination. The special arrangement of the accelerating electrode and anode ensures longterm stable operation of the ion source. The ion current can be varied over a wide range byadjusting the gas pressure. The energy range of the ions is continuously variable between 0.2and 5 keV. The source is bakeable up to 200°C and can be degassed internally. The standardinsertion depth of 62.5 mm can be adjusted to the customer’s specification.DimensionsFigure1: Schematic Drawing of the Ion Source IQE 11/35Direct (IQE 11/35) versus Indirect Gas InletThe ion source IQE 11/35 has a direct gas inlet flange for direct gas transfer to the ionizationcylinder cap and is differentially pumped via the aperture opening. This leads to a low operationpressure of 10 -6 to 10 -5 mbar within the main chamber, clean sputter conditions and reducedpumping times after sputtering.The ion source can also be operated by backfilling of the UHV chamber with the sputter gas. Thetypical chamber pressure for operation of the ion source IQE 11/35 with indirect gas inlet viabackfilling is in the range of 10 -4 to 10 -3 mbar.C o m p e t e n c e i n S u r f a c e A n a l y s i sIQE 11/35 1/3home\sales\aktuell\prospekte\iqe\iqe11-info.ppt

→→Performance (IQE 11/35)Figure 2: Dependence ofMaximum Sample Currentand Beam Diameter on IonEnergyParameters:§Source-Sample Distance:§50 mm§Emission Current: 10 mAPlease not that the pressure isoptimized at each point formaximum sample current.Max. Sample Current [uA]50403020100Sample Current [uA]FWHM [mm]→0,5 1 2 3 4 5Ion Energy [keV]1086420FWHM [mm]Figure 3: Dependence of SampleCurrent and Beam Diameter onSource-Sample DistanceParameters:§Acceleration Potential: 5 kV§Emission Current: 10 mASample Current [uA]2015105Current [uA]FWHM [mm]→2015105FWHM [mm]0030 50 80 125Source-Sample Distance [mm]Figure 4: Dependence of BeamDiameter on Ion EnergyParameters:§Source-Sample Distance:§125 mm§Emission Current: 10 mAFWHM [mm]30252015FWHM [mm]100 1 2 3 4 5Ion Energy [keV]C o m p e t e n c e i n S u r f a c e A n a l y s i sIQE 11/35 2/3home\sales\aktuell\prospekte\iqe\iqe11-info.ppt

Typical Ion Current - Dependence on Pressure (IQE 11/35)1 keV5 keV4 keV3 keV2 keV0,5 keVFigure 3:Dependence of Sample Current on Operation Pressure andIon EnergyParameterSource-Sample Distance: 80 mmEmission Current: 10 mAPlease Note that the actual achieved Sample Current at a certain pressure depends on thechamber geometry and pumping speed.Furthermore the pressure to achieve a certain ion current will increase with the length of theion source.SPECS GmbH –Surface Analysisand Computer TechnologyVoltastraße 5, 13355 BerlinGermanyPhone: +49 (0)30 46 78 24 - 0Fax: +49 (0)30 4 64 20 83E-mail: support@specs.dehttp://www.specs.deC o m p e t e n c e i n S u r f a c e A n a l y s i sIQE 11/35 3/3home\sales\aktuell\prospekte\iqe\iqe11-info.ppt