The Extractor Ion Source IQE 11/35 - Specs
The Extractor Ion Source IQE 11/35 - Specs
The Extractor Ion Source IQE 11/35 - Specs
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→→Performance (<strong>IQE</strong> <strong>11</strong>/<strong>35</strong>)Figure 2: Dependence ofMaximum Sample Currentand Beam Diameter on <strong>Ion</strong>EnergyParameters:§<strong>Source</strong>-Sample Distance:§50 mm§Emission Current: 10 mAPlease not that the pressure isoptimized at each point formaximum sample current.Max. Sample Current [uA]50403020100Sample Current [uA]FWHM [mm]→0,5 1 2 3 4 5<strong>Ion</strong> Energy [keV]1086420FWHM [mm]Figure 3: Dependence of SampleCurrent and Beam Diameter on<strong>Source</strong>-Sample DistanceParameters:§Acceleration Potential: 5 kV§Emission Current: 10 mASample Current [uA]2015105Current [uA]FWHM [mm]→2015105FWHM [mm]0030 50 80 125<strong>Source</strong>-Sample Distance [mm]Figure 4: Dependence of BeamDiameter on <strong>Ion</strong> EnergyParameters:§<strong>Source</strong>-Sample Distance:§125 mm§Emission Current: 10 mAFWHM [mm]30252015FWHM [mm]100 1 2 3 4 5<strong>Ion</strong> Energy [keV]C o m p e t e n c e i n S u r f a c e A n a l y s i s<strong>IQE</strong> <strong>11</strong>/<strong>35</strong> 2/3home\sales\aktuell\prospekte\iqe\iqe<strong>11</strong>-info.ppt
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