The Extractor Ion Source IQE 11/35 - Specs

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→→Performance (IQE 11/35)Figure 2: Dependence ofMaximum Sample Currentand Beam Diameter on IonEnergyParameters:§Source-Sample Distance:§50 mm§Emission Current: 10 mAPlease not that the pressure isoptimized at each point formaximum sample current.Max. Sample Current [uA]50403020100Sample Current [uA]FWHM [mm]→0,5 1 2 3 4 5Ion Energy [keV]1086420FWHM [mm]Figure 3: Dependence of SampleCurrent and Beam Diameter onSource-Sample DistanceParameters:§Acceleration Potential: 5 kV§Emission Current: 10 mASample Current [uA]2015105Current [uA]FWHM [mm]→2015105FWHM [mm]0030 50 80 125Source-Sample Distance [mm]Figure 4: Dependence of BeamDiameter on Ion EnergyParameters:§Source-Sample Distance:§125 mm§Emission Current: 10 mAFWHM [mm]30252015FWHM [mm]100 1 2 3 4 5Ion Energy [keV]C o m p e t e n c e i n S u r f a c e A n a l y s i sIQE 11/35 2/3home\sales\aktuell\prospekte\iqe\iqe11-info.ppt
Typical Ion Current - Dependence on Pressure (IQE 11/35)1 keV5 keV4 keV3 keV2 keV0,5 keVFigure 3:Dependence of Sample Current on Operation Pressure andIon EnergyParameterSource-Sample Distance: 80 mmEmission Current: 10 mAPlease Note that the actual achieved Sample Current at a certain pressure depends on thechamber geometry and pumping speed.Furthermore the pressure to achieve a certain ion current will increase with the length of theion source.SPECS GmbH –Surface Analysisand Computer TechnologyVoltastraße 5, 13355 BerlinGermanyPhone: +49 (0)30 46 78 24 - 0Fax: +49 (0)30 4 64 20 83E-mail: support@specs.dehttp://www.specs.deC o m p e t e n c e i n S u r f a c e A n a l y s i sIQE 11/35 3/3home\sales\aktuell\prospekte\iqe\iqe11-info.ppt
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