Gimbal-Less Two-Axis Scanning MEMS Micromirrors Device ...

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Gimbal-Less Two-Axis Scanning MEMS Micromirrors Device ...

Gimbal-Less Two-Axis Scanning MEMS Micromirrors Device ...

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2D Lookup TablesY Angle vs. X Angle - Addressable Angles6

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Gimbal-Less Two-Axis Scanning MEMS Micromirrors Device ...

Gimbal-Less Two-Axis Scanning MEMS Micromirrors Device ...

Gimbal-less Micromirror Datasheet Device Parameters Summary

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2D Lookup TablesVoltage vs. X Angle - Lookup TableVoltage vs. Y Angle - Lookup Table5

2D Lookup TablesY Angle vs. X Angle - Addressable Angles6

Page 1 and 2: Gimbal-Less Two-Axis Scanning MEMS
Page 3 and 4: Static ResponseVoltage vs. Angle -
Page 5: Step ResponseX-Axis Step ResponseY-