MEMS Deformable Mirrors for Adaptive Optics - Laboratory for ...
MEMS Deformable Mirrors for Adaptive Optics - Laboratory for ...
MEMS Deformable Mirrors for Adaptive Optics - Laboratory for ...
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Bimorph Flexures• Engineered stresses createbeam shape• Stroke determined by design,not processAugust 19th, 2004 CfAO <strong>MEMS</strong> workshop 3