MEMS Deformable Mirrors for Adaptive Optics - Laboratory for ...
MEMS Deformable Mirrors for Adaptive Optics - Laboratory for ...
MEMS Deformable Mirrors for Adaptive Optics - Laboratory for ...
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<strong>MEMS</strong> <strong>De<strong>for</strong>mable</strong> <strong>Mirrors</strong><strong>for</strong> <strong>Adaptive</strong> <strong>Optics</strong>Nathan DobleIris AO, IncCfAO TMT <strong>MEMS</strong> DM Workshop - August 19, 2004August 19th, 2004 CfAO <strong>MEMS</strong> workshop 1
Bimorph Flexures• Engineered stresses createbeam shape• Stroke determined by design,not processAugust 19th, 2004 CfAO <strong>MEMS</strong> workshop 3
DM Electrostatic Actuators• Actuators wired toperiphery• Electrostatic <strong>for</strong>cespull actuators down• No hysteresis• 4.2 mm apertureAugust 19th, 2004 CfAO <strong>MEMS</strong> workshop 4
DM Stroke: Position versus Voltage• High positioningrepeatability• Design flexibility totrade off stroke, voltageand frequency• Stroke of up to 20 um• Low voltage actuationAugust 19th, 2004 CfAO <strong>MEMS</strong> workshop 5
Assembled SOI <strong>Mirrors</strong>: Benefits• Single crystal mirror hasexcellent flatness• Thickness gives rigidity Mirror is still flat afteroptical coating Stays flat overvarying operatingconditions• Temperature• Actuation• High fill factor <strong>Mirrors</strong> coverbimorph flexures Etch holes notnecessaryAugust 19th, 2004 CfAO <strong>MEMS</strong> workshop 6
Assembled-Mirror FlatnessAu optically coated mirror segment10 -8m• Low rms surface errors • < 8 nm rms on averageAugust 19th, 2004 CfAO <strong>MEMS</strong> workshop 7
Experimental Deflection (400Hz)August 19th, 2004 CfAO <strong>MEMS</strong> workshop 8
Scalable ArchitectureHearstBancroftClaremontAugust 19th, 2004 CfAO <strong>MEMS</strong> workshop 9
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