MEMS Deformable Mirrors for Adaptive Optics - Laboratory for ...

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DM Stroke: Position versus Voltage• High positioningrepeatability• Design flexibility totrade off stroke, voltageand frequency• Stroke of up to 20 um• Low voltage actuationAugust 19th, 2004 CfAO MEMS workshop 5

PSF reconstruction for Keck AO - Laboratory for Adaptive Optics

DM Electrostatic Actuators• Actuators wired toperiphery• Electrostatic forcespull actuators down• No hysteresis• 4.2 mm apertureAugust 19th, 2004 CfAO MEMS workshop 4

Page 1: MEMS Deformable Mirrorsfor Adaptive
Page 6 and 7: Assembled SOI Mirrors: Benefits•
Page 8 and 9: Experimental Deflection (400Hz)Augu

MEMS Deformable Mirrors for Adaptive Optics - Laboratory for ...

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