Enabling 60GHz MMIC Design
Enabling 60GHz MMIC Design
Enabling 60GHz MMIC Design
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Taiyo Yuden <strong>MMIC</strong><br />
Transmitter/Receiver <strong>Design</strong><br />
Review and Measurement<br />
Results<br />
Authors: T.Ogino, T.Ogino,<br />
A. Kanai, K. Nakajima, K. Ohta: Ohta:<br />
Taiyo Yuden<br />
Aki Nakatani: Nakatani:<br />
Ansoft<br />
Alain Michael:Ansoft<br />
Michael: Ansoft France<br />
Moriaki Ueno: Ueno:<br />
Ansoft Japan<br />
Presenter: Philip Smith: Ansoft<br />
Page-1
Contents<br />
1. Millimeter-Wave<br />
Millimeter Wave <strong>MMIC</strong>s<br />
• <strong>Design</strong> Environment<br />
• Measurement/Evaluation Technologies<br />
2. <strong>Design</strong> and Evaluation<br />
• Millimeter-Wave<br />
Millimeter Wave <strong>MMIC</strong>s<br />
Summary<br />
3. Summary<br />
Page-2
<strong>Design</strong> Environment<br />
Millimeter-Wave<br />
Millimeter Wave <strong>MMIC</strong>s<br />
Measurement/Evaluation<br />
Technologies<br />
Page-3
<strong>60GHz</strong><br />
Millimeter Wave applications<br />
• Video Transmission Systems<br />
• Wireless link for BS/CS satellite broadcasts<br />
• Communication among Buildings<br />
• 7GHz band available without license.<br />
• Japan: 59-66GHz USA: 57-64GHz<br />
• Less interference with other wireless systems<br />
77GHz Automotive Radar<br />
94GHz Image Sensor, High Resolution Radar<br />
Page-4
Characteristics of Millimeter-Wave<br />
Millimeter Wave<br />
Circuits<br />
Frequency > 30GHz<br />
Short Wavelength<br />
Parasitic Components<br />
On the order of pH/fF<br />
Cannot be ignored<br />
Accuracy of<br />
Elements/Circuits/Connections<br />
Process/Mounting/Measurement…<br />
Superior Measurement/Evaluation technolog echnologies ies<br />
are necessary at Millimeter-Wave<br />
Millimeter Wave frequencies.<br />
frequencies<br />
Page-5
<strong>Design</strong> Features of<br />
Millimeter-Wave<br />
Millimeter Wave <strong>MMIC</strong>s<br />
Characterization of all <strong>MMIC</strong><br />
circuit blocks is critical.<br />
Systems, Tr characteristics, VCO, Mixer, LNA, PA, Filters, Antennas…<br />
Development; Cost; Faster<br />
time to market…<br />
Millimeter-Wave circuit design requires<br />
robust development environment<br />
Page-6
<strong>Design</strong> Development<br />
Environments for<br />
Millimeter-Wave<br />
Millimeter Wave <strong>MMIC</strong>s<br />
Page-7
Establishment of<br />
Millimeter-Wave Millimeter Millimeter-Wave Wave <strong>MMIC</strong> <strong>Design</strong><br />
Environments<br />
UMS<br />
Information Supplement<br />
TAIYO YUDEN<br />
Requests, Proposals<br />
Ansoft<br />
Development of DK for AD<br />
UMS PH15 design kit<br />
Ansoft <strong>Design</strong>er / Nexxim ver.3<br />
Page-8
Millimeter-Wave Millimeter Wave <strong>MMIC</strong> <strong>Design</strong> Environments<br />
<strong>MMIC</strong> Foundry<br />
United Monolithic Semiconductors (UMS)<br />
GaAs Foundry Service at UMS<br />
� Excellent track record in manufacturing<br />
Millimeter-Wave <strong>MMIC</strong>s<br />
� Proprietary technologies and expertise<br />
- 0.25um and 0.15um<br />
pHEMT<br />
- 2um HBT<br />
- Schottky diode<br />
Supporting processes including:<br />
- Air bridges<br />
- MIM capacitors<br />
- TaN and TiWSi resistors<br />
- 100um thinning<br />
- Via-holes<br />
� <strong>Design</strong> manuals and <strong>Design</strong> Kit<br />
80GHz Support<br />
PH15 Process<br />
� Quality Control System for Wafers by PCM:<br />
– Test production<br />
– ASIC<br />
� Additional Service Available:<br />
– 100% on-wafer testing (DC, RF and Power)<br />
– Dicing and Sorting<br />
– Visual Inspection<br />
Page-9
Millimeter-Wave Millimeter Wave <strong>MMIC</strong> <strong>Design</strong> Environments<br />
Ansoft <strong>Design</strong>er /Nexxim Nexxim ver. 3<br />
NEXXIM Circuit<br />
Simulator<br />
High speed<br />
Nonlinear Analysis<br />
Layout changes are<br />
reflected in real time.<br />
••Speed Speed up up design process<br />
••High-Speed High-Speed Nonlinear Analysis<br />
••Seamless Seamless integration<br />
••Circuit Circuit analysis<br />
••Layout Layout<br />
••Electromagnetic Electromagnetic Field Simulation<br />
DESIGNER<br />
Integrated Environment<br />
• Schematic Editor<br />
• Layout Editor<br />
• System / 2.5D Planar EM<br />
Co-simulation<br />
with Planar EM and<br />
HFSS<br />
Page-10
UMS PH15 DK for AD/Nexxim ver. 3<br />
Passive Element Example<br />
GaAs Resistance: Part name=PH15RES<br />
Unit: 1um<br />
FixR=yes<br />
W/L changed to meet resistance value<br />
FixR=no<br />
Resistance value changed to meet size<br />
ph15res_T is changed<br />
R is changed according to temperature.<br />
Min Size of W/L: 10um<br />
These changes are reflected to the<br />
Layout in real time.<br />
Page-11
UMS PH15 DK for AD/Nexxim ver.3<br />
Nonlinear Element Elemen Example<br />
PH15 HOTFET: Part name=PH15HFET<br />
Schematic<br />
&<br />
Layout<br />
Page-12
UMS PH15 DK for AD/Nexxim ver.3<br />
Microstrip Elements<br />
Page-13
Millimeter-Wave Band<br />
Measurement/Evaluation<br />
Technologies<br />
Page-14
Millimeter-Wave Millimeter Wave Band<br />
Measurement/Evaluation Technology<br />
Technology for High Resolution Measurement<br />
Open<br />
SOLT<br />
Calibration<br />
Load<br />
Short Through<br />
Electrical Length 1 degree = 5um @ <strong>60GHz</strong><br />
(Thickness of GaAs Substrate 100um)<br />
Contact position must be accurately controlled<br />
Page-15
Reference<br />
Plane<br />
Measurement/Evaluation Technology of<br />
Millimeter-Wave Millimeter Wave Band<br />
Technology for Accurate Compensation<br />
DUT<br />
Reference<br />
Plane<br />
Measurement Data<br />
DUT<br />
Pad Data DUT Data<br />
Page-16
Electrical Length<br />
Electrical Length<br />
and Magnitude<br />
De-embedding<br />
Compensation Method<br />
Phase Loss<br />
Impedance<br />
Mismatch<br />
Equivalent Circuit for Pad De-embedding<br />
De embedding<br />
Page-17
Thru<br />
Pad<br />
Extraction of pad data<br />
Open Short<br />
Equivalent circuit<br />
Excess<br />
Inductance<br />
De-embedding<br />
Easier?<br />
more accurate?<br />
Page-18
Problem Definition<br />
Zu1<br />
Zu<br />
2<br />
Measurement References<br />
Z<br />
Unknown Circuit<br />
tanh<br />
2<br />
λ γ<br />
tanh<br />
2<br />
λ γ<br />
Zu 3<br />
C<br />
C<br />
Zu<br />
3<br />
2ZCcosechγλ Symmetric Plane<br />
Z<br />
2ZCcosechγλ Transmission Line: Characteristic Impedance and<br />
Transmission coefficients are known<br />
Zu<br />
2<br />
Zu1<br />
Page-19
Uses two<br />
different length<br />
lines with pads<br />
Easy-to Easy to-use use approach<br />
using Ansoft <strong>Design</strong>er<br />
Length1 Length2<br />
Pad<br />
S-parameter<br />
Known<br />
Transmission Lines<br />
de-embedding<br />
Page-20
Principle of this method<br />
Virtual Open and Short Conditions<br />
Page-21
Easy-to Easy to-use use approach<br />
using Ansoft <strong>Design</strong>er<br />
Ideal Data (two different length lines)<br />
100um<br />
from HFSS<br />
150um<br />
Measured Data (two different length lines with pads)<br />
Algorithm integration in AD project<br />
Case A 200um<br />
Case B 300um<br />
Page-22
Verifying Ver ing the Connector Extraction with<br />
Measured Results<br />
Reference Line<br />
Page-23
<strong>Design</strong> and Evaluation of<br />
Millimeter-Wave<br />
Millimeter Wave <strong>MMIC</strong>s<br />
Page-24
PHCAPN<br />
Port1 1 2<br />
2<br />
1 Port2<br />
ref<br />
C=0.198pF<br />
W=24um<br />
L=25um<br />
ref<br />
Measurement<br />
Capacitors<br />
Port1 1 2<br />
2<br />
1 Port2<br />
ref<br />
ref<br />
Pad Equivalent<br />
Circuit<br />
PHCAPN<br />
Port1 Port2<br />
C=0.198pF<br />
W=24um<br />
L=25um<br />
Capacitor<br />
Page-25
Capacitor Photograph<br />
Port1 Port2<br />
Port3<br />
1 2 Port1 Port2 2<br />
1<br />
Port4<br />
ref<br />
PHCAPN<br />
C=0.198pF<br />
W=24um<br />
L=25um<br />
Measurement Data<br />
de-embedding Pad Data<br />
ref<br />
Capacitors<br />
S11<br />
S21<br />
Measurement<br />
Simulation<br />
Measurement<br />
Simulation<br />
Measurement and<br />
Simulation agree well.<br />
Page-26
Port1<br />
Vg<br />
L23<br />
100nH<br />
L24<br />
100nH<br />
0 0<br />
100pF<br />
S<br />
PH15HFET<br />
N=6<br />
Wu=40um<br />
Measurement Data<br />
Port3 1 2<br />
1 2<br />
2<br />
1 Port4<br />
ref<br />
ref<br />
0 0<br />
0<br />
0<br />
Vd<br />
100pF<br />
de-embedding Pad Data<br />
A<br />
ref<br />
Port2<br />
FET<br />
FET Photograph<br />
Page-27
FET<br />
S11 S12<br />
S21<br />
Measurement<br />
Simulation<br />
Simulation<br />
Measurement<br />
S22<br />
Simulation<br />
Measurement<br />
Simulation<br />
Measurement<br />
Page-28
Port1<br />
EM model<br />
Layout<br />
Port2<br />
Open Stub<br />
Open Stub Photograph<br />
Simulation<br />
Measurement<br />
Measurement corresponds with Simulation.<br />
Page-29
IF<br />
Evaluation of<br />
<strong>MMIC</strong> components<br />
・Filter<br />
・LNA<br />
・PA<br />
・Mixer<br />
Tx Rx<br />
Mixer<br />
Lo<br />
AMP<br />
~<br />
BPF<br />
PA<br />
RF<br />
RF<br />
~<br />
BPF LNA<br />
Mixer IF<br />
Lo<br />
Page-30
RF<br />
~<br />
BPF<br />
LNA<br />
Lo<br />
Mixer<br />
Measurement<br />
IF<br />
Filter<br />
Simulation<br />
Simulation Measurement<br />
Simulation : -2.7dB@<strong>60GHz</strong><br />
Measurement : -2.0dB@<strong>60GHz</strong><br />
Page-31
Rx<br />
RF<br />
~<br />
BPF<br />
LNA<br />
Lo<br />
Mixer<br />
IF<br />
LNA<br />
Four Stage LNA<br />
Size 2.2mm×2.8mm<br />
Vd = 2.5V Id = 130mA<br />
LNA Photograph<br />
Page-32
Rx<br />
RF<br />
~<br />
BPF<br />
LNA<br />
Gain [dB ] / N oise Figure [dB ]<br />
Lo<br />
30<br />
25<br />
20<br />
15<br />
10<br />
5<br />
Mixer<br />
IF<br />
LNA<br />
Gain<br />
Measurement : 22.1dB@<strong>60GHz</strong><br />
Simulation : 21.8dB@<strong>60GHz</strong><br />
NF<br />
Measurement : 3.9dB@<strong>60GHz</strong><br />
Simulation : 3.2dB@<strong>60GHz</strong><br />
0<br />
55 57 59 61 63 65<br />
Frequency [G H z]<br />
Measurement comparatively corresponds with Simulation.<br />
Page-33
IF<br />
UMS Ph15 V20<br />
Port1<br />
Mixer<br />
Lo<br />
Pad1<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
3<br />
2 1<br />
AMP<br />
S<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
Pad1<br />
1 2<br />
3<br />
~<br />
BPF<br />
1 2 3<br />
4<br />
Pad1<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
S<br />
PA<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
Pad1<br />
3<br />
2 1<br />
RF<br />
3<br />
2 1<br />
Pad1<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
S<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
1 2<br />
3<br />
Pad1<br />
3<br />
2 1<br />
PA<br />
Port2<br />
Three Stage PA<br />
Size 2.2mm×2.8mm<br />
Vd = 2.5V Id = 85mA<br />
PA Photograph<br />
Page-34
IF<br />
Mixer<br />
Lo<br />
AMP<br />
~<br />
~<br />
BPF PA RF<br />
Simulation<br />
Measurement<br />
PA<br />
Measurement<br />
Simulation<br />
Simulation : 15.5dB@<strong>60GHz</strong><br />
Measurement : 15.0dB@<strong>60GHz</strong><br />
Measurement comparatively corresponds with Simulation.<br />
Page-35
IF<br />
Mixe<br />
r<br />
Lo<br />
AMP<br />
~<br />
~<br />
BPF PA RF<br />
Gain<br />
PA<br />
Simulation<br />
Pout<br />
Simulation<br />
Simulation P1dB 16.3dBm @Pin=1dBm<br />
Page-36
IF<br />
Mixer<br />
Lo<br />
AMP<br />
~<br />
Size 2.2mm×2.8mm<br />
RF:<strong>60GHz</strong><br />
Lo:29.5GHz<br />
BPF PA RF<br />
Measurement<br />
Simulation<br />
Mixer<br />
Mixer Photograph<br />
IF:1.0GHz<br />
Simulation<br />
Measurement<br />
Simulation<br />
Measurement<br />
Measurement corresponds relatively well with Simulation.<br />
Page-37
IF<br />
Pad<br />
Lo<br />
RF<br />
Circuit <strong>Design</strong> of<br />
Transmitter and Receiver<br />
High speed calculation is necessary to<br />
analyze large scale integrated circuits!<br />
A<br />
A<br />
Transmitter<br />
A<br />
V<br />
A<br />
V<br />
V<br />
A<br />
A<br />
V<br />
A<br />
A<br />
Tx Photograph<br />
Page-38
Conditions:<br />
Simulated Transmitter Results<br />
RF Frequency : <strong>60GHz</strong><br />
Lo Frequency : 29.5GHz<br />
IF Frequency : 1GHz<br />
Power Sweep : -20dBm~0dBm<br />
Harmonics : 5<br />
Nexxim is able to analyze large scale integrated circuits.<br />
Page-39
� Taiyo Yuden<br />
• Material/Lamination Technologies<br />
• Various products using these technologies<br />
� Taiyo Yuden provides<br />
• High Frequency Products, Technology and Services<br />
� Millimeter-Wave <strong>MMIC</strong><br />
• UMS PH15 <strong>Design</strong> kit<br />
Summary<br />
• Ansoft <strong>Design</strong>er / Nexxim ver.3<br />
• measurement corresponds well with simulation<br />
Page-40
Contact Us<br />
� About This Presentation and Taiyo Yuden Products:<br />
� Taiyo Yuden Web Site:<br />
– http://www.yuden.co.jp/products/index.html<br />
� About Ansoft Products and Technologies:<br />
– Contact: Mark Viglione Ansoft Austin, Texas<br />
– mviglione@ansoft.com<br />
Page-41
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