Feinmess Dresden catalogue - Armstrong Optical Ltd

precision 

motion-systems 

characteristics

Welcome to where precision is.

Born from special tradition of 

the place and company history, 

Feinmess Dresden GmbH today 

produces high precision positio- 

ning systems of top quality. This 

catalogue provides you with a 

survey on our broad product line 

in the field of positioning systems. 

We are pleased to present our 

detailed product information and 

to consult your application face 

to face. 

For special solutions we are expe- 

rienced to make customized pro- 

ducts; in close co-operation with 

you we develop, design and ma- 

nufacture complex motion systems. 

We offer precision measuring sta- 

ges for various industries such as: 

Semiconductor industry 

Optical industry 

Biotechnical industry 

Manufactures of measuring 

instruments 

Precision mechanics 

Aircraft industry 

Research & development 

and various applications such as: 

Semiconductor inspection 

systems 

Microtopographic metrology 

Precision metrology equipment 

Pick-and-place-systems 

Automation systems 

Precision handling systems 

Medical analytical equipment 

Precision machining equipment 

Inspection systems 

Fibre-optic equipment 

Laser systems 

High vacuum applications 

FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007 2|3

Motion systems - general view 

The linear stages of the PICO-series 

are a cost-effective, flexible alternative 

to self-made constructions. 

This total solution opens new and 

various applications on a demanding 

quality level. The PICO-linear 

axes are deliverable on a shortterm 

basis in more constructional 

sizes. 

Please ask for our 

special catalog 

Highly specialized systems require 

custom tailored solutions. We offer 

design and manufacture of assemblies 

up to complex mult-axis and 

handling systems. 

Examples for customized solutions: 

Manual positioning systems 

L T M T 

Linear Translation Stages XY-Translation Stages 

L i n e a r a x e s - P I C O s e r i e s 

L T P L T P A 

C u s t o m i z e d s o l u t i o n s 

Rotary unit 

for cleanroom applications 

with axial and radial air bearing 

3-axis-unit 

for high precision application 

(granite based) 

Concentric 2-axis rotary drive 

and stoke unit 

for vacuum application 

up to 10 -7 mbar (torr) 

with non magnetic realization 

with piezo-based drive 

FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007

P r e c i s i o n m o t i o n - s y s t e m s 

Precision motion-systems – general view . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 

Linear Stages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 

Micro Stages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 

Compact-XY-Table . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 

Open Compact-XY-Table . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 

Rotary Stages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56 

Swivel Stages / Lifting Stages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68 

Definitions 

Technical information for vacuum- and 

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72 

non magnetic preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74 


Precision motion-systems - general view 

PMT 160-DC 

pages 8 - 11 

PMT 160-SM 

pages 12 - 13 

PMT 160-LM 

pages 14 - 15 

PMT 160-EDLM 

pages 16 - 17 

P M T M T / M P K T 

Linear Stages (encapsulated) 

PMT 160 PMT 200 

PMT 200-DC 

pages 18 - 19 

PMT 200-SM 

pages 18 - 19 

C o n t r o l l e r s 

pages 20 - 23 

Micro Stages 

MT /MP 63-DC 

MT /MP 130-DC 

MT 84-LM 

MT 105-LM 

MT 196-LM 

pages 24 - 29 

MT 53-PM 

MT 84-PM 

pages 30 - 33 

Our controllers combine the knowledge of control engineering 

perfectly with advanced positioning systems. If simple solutions 

or highly complex multi-axis applications, the appropriate technique 

in the desired configuration can be determined by a selected hardware 

range. For compact applications the controller can be integrated 

into the stage. 

KT 205-DC 

KT 310-DC 

pages 34 - 37 

KT 180-SM 

pages 38 - 39 

Compact-XY-Table 


Open Compact-XY-Table Rotary Stages 

KDT 180-DC 

KDT 310-DC 

KDT 380-DC 

pages 40 - 45 

KDT 450-SM 

pages 46 - 47 

KDT 105-LM 

KDT 180-LM 

KDT 255-LM 

pages 48 - 53 

KDT 105-PM 

KDT 255-PM 

pages 52 - 55 

K D T D T 

DT 58-DC 

DT 170-DC 

pages 56 - 59 

DT 180-SM 

DT 200-SM 

pages 60 - 63 

DT 65-LM 

DT 105-LM 

pages 64 - 67 

E n c o d e r 

S T / H T 

Swivel Stages / Lifting Stages 

ST 114-DC 

ST 129-DC 

pages 68 - 69 

HT 16-LM 

pages 70 - 71 

Specials 

Rotary encoders deliver a specific number of signals per shaft rotation. The measurement of the cycle duration 

or counting the pulses per a specific time interval indicates the speed of motion. If the pulses are added 

according to a reference point, the count represents a measure for the marked angle or the distance covered. 

Linear encoder (incremental angular encoder for rotary stages) works on the principal of counting pulses as a series 

of graduations move past a detector. In a linear encoder these graduations are deposited on a low temperature 

coefficient glass substrate (quartz glass) or steel scale tape. The graduations are counted using photodetectors. 

DC-motor 

FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007 6|7 

Stepper 

motor 

Piezoceramicmotor 

PiezoLeg 

Ironless 

synchron 

linear motor 

Rotary encoder 

Linear encoder 

(incremental 

angular encoder)

Linear Stages 

PMT 160-DC 

T e c h n i c a l D a t a P M T 1 6 0 - D C - R 

PMT160 

–050–DC-R –100–DC-R –150–DC-R –200–DC-R –300–DC-R 

Travel [mm] 50 100 150 200 300 

Accuracy [µm] 10 10 10 10 20 

Repeatability [µm] ± 0.5 ± 0.5 ± 0.5 ± 0.5 ± 0.5 

Hysteresis [µm] < 3 µm < 3 µm < 3 µm < 3 µm < 3 µm 

Deviation from 

straightness / flatness 

- over 10 mm [µm] ± 0.2 ± 0.4 ± 1 ± 1 ± 1 

- over total length [µm] ± 0.5 ± 1 ± 1.5 ± 2 ± 4 

Max. speed (1 mm pitch) [mm/s] 50 50 50 50 50 

Max. acceleration [m/s 2 ] 0.5 0.5 0.5 0.5 0.5 

Permissible loads Fx [N] 30 30 30 30 30 

Fy [N] 100 100 100 100 100 

Fz [N] 200 200 200 200 200 

Weight [kg] 3.7 4.2 4.8 5.2 6.5 

Brushed type DC motor 

Nominal voltage 24 V 

S p e c i f i c a t i o n P M T 1 6 0 - D C - R 

Recirculating precision ball screw 

Screw diameter 8 mm (optional 12 mm) 

Screw pitch 1 mm (optional 2 or 4 mm) 

Rotary encoder - R 

Pulses per rotation 500 

Lift limitation 2 limit stops and 2 non contact 

limit switches 

Bearings backlash-free preloaded 

cross roller bearings 

Casing warp-proof, anodized black 

aluminum alloy 

Please note options on page 10. 

Please see 

parameter 

definitions on 

pages 72, 73. 


C h a r a c t e r i s t i c s P M T 1 6 0 - D C - R 

Example flatness PMT 160-100-DC-R over total length Example flatness PMT 160-100-DC-R over 10 mm 

T e c h n i c a l D a t a P M T 1 6 0 - D C - L 

Brushed type DC motor 


S p e c i f i c a t i o n P M T 1 6 0 - D C - L 


Screw diameter 8 mm (optional 12 mm) 

Screw pitch 1 mm (optional 2 or 4 mm) 

Incremental linear encoder - L 

Resolution 0.1 µm (50 nm) 

PMT160 

–050–DC-L –100–DC-L –150–DC-L –200–DC-L –270–DC-L 

Travel [mm] 50 100 150 200 270 

Accuracy [µm] 1.5 2 2 2 3 


Centrically lying encoder x x - - - 



- over 10 mm [µm] ± 0.2 ± 0.4 ± 1 ± 1 ± 1 


Max. speed (1 mm pitch) [mm/s] 50 50 50 50 50 



Fy [N] 100 100 100 100 100 

Fz [N] 200 200 200 200 200 

Weight [kg] 3.8 4.3 4.9 5.3 6.6 

Lift limitation 2 limit stops and 2 non contact 

limit switches 





Please note options on page 10. 

Please see 

parameter 


pages 72, 73. 

FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007 

8|9

Linear Stages 

O p t i o n s P M T 1 6 0 - D C - . . . 

XY-assembly without adapter plate 

Different motors/ gearboxes for low speed or higher resolution 

Different screw pitches for higher speed and higher loads 

Preloaded precision ball screws for extra high stiffness 

Lead screws for extra smooth, slow and constant movement 

Different hole patterns possible 

Different connectors possible (type, size, pin-assignment) 

Additional index sensor for easy referencing 

M4; depth 7 (18x) 

160 

70 

120 

M6; depth 8 (6 x) 

MM: stage integrated controller system 

PMT 160-DC 

131 

108 

90 

20 

40 

50 

140 

Electromagnetic brake for vertical axis 

Other resolution of incremental linear encoder - L 

Additional encoder outputs for triggering external operations 

Vacuum preparation on request (other technical data) 

Cleanroom preparation on request 

Upon request we manufacture custom tailored systems. 

Please ask for suitable option combinations! 

D i m e n s i o n s P M T 1 6 0 - D C - M M 

travel X/2 travel X/2 

L1 

50 

90 

108 

111 


L2 

40 

ø4H7; depth 6 (2x) 

PMT 160 –050–DC-MM –100–DC-MM –150–DC-MM –200–DC-MM –300–DC-MM 

Travel X [mm] 50 100 150 200 300 

Size L1 [mm] 322.5 362.5 432.5 507.5 632.5 

Size L2 [mm] 127.5 147.5 182.5 220 282.5 

N 3 3 5 7 7 

ø10H11

M4; depth 7 (18x) 

160 

70 

M6; depth 8 (6x) 

plug in 

120 


70 

Km6 DIN74 


50 

D i m e n s i o n s P M T 1 6 0 - D C - . . . 

131 

108 

90 

20 

50 

140 


50 

N x 50 

PMT 160-DC-R and PMT 160-DC -L have the same dimensions. 

L1 

40 

L2 

L2 

90 

40 

40 

50 


108 

111 

ø10H11 

motor and limit switch connected with 

15-pin SUB-D connector 

length measuring system connected with 


Connections for PMT 160-DC-L 

PMT 160 –050–DC-... –100–DC-... –150–DC-... –200–DC-... –300–DC-R –270–DC-L 

Travel X [mm] 50 100 150 200 300 270 

Size L1 [mm] 275 315 385 460 585 585 

Size L2 [mm] 127.5 147.5 182.5 220 282.5 282.5 

N 3 3 5 7 7 7 

FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007 10 | 11

Linear Stages 

Standard 2-phase stepper motor 

Resolution 2.5 µm 

PMT 160-SM 


Screw diameter 8 mm 

Screw pitch 1 mm (optional 2 mm) 

T e c h n i c a l D a t a 

PMT 160 

–050–SM –100–SM –150–SM –200–SM –300–SM 

Travel [mm] 50 100 150 200 300 

Accuracy [µm] 10 10 10 10 20 


Hysteresis [µm] < 3 µm < 3 µm < 3 µm < 3 µm < 3 µm 



- over 10 mm [µm] ± 0.2 ± 0.4 ± 1 ± 1 ± 1 


Max. speed [mm/s] 10 10 10 10 10 



Fy [N] 100 100 100 100 100 

Fz [N] 200 200 200 200 200 

Weight [kg] 3.7 4.2 4.8 5.2 6.5 

Please see parameter definitions on pages 72, 73. 

S p e c i f i c a t i o n 

Lift limitation 2 limit stops and 

2 non contact limit switches 






M4; depth 7 (18x) 

172 

70 

57.2 

ø25 50 

12.7 

70 

counterbore DIN 74-Km6 

O p t i o n s 

XY-Assembly without adapter plate 


Preloaded ball screws for extra high stiffness 








20 

31 



D i m e n s i o n s 

326 

275 

131 

108 

90 

20 

40 

50 

75 

140 

50 

150 

127.5 

127.5 

ø10H11 

C h a r a c t e r i s t i c s 

Example flatness PMT 160 over total length 

90 

108 

111 




40 

40 

50 

160 

PMT 160-...-SM 

–050– –100– –150– –200– –300– 

Travel X [mm] 50 100 150 200 300 

Size L [mm] 326 366 436 511 636 

Size L1 [mm] 275 315 385 460 585 

Size L2 [mm] 127.5 147.5 182.5 220 282.5 

N 3 3 5 7 7

Linear Stages 

Piezo linear motor HR-8 

Incremental linear encoder 


PMT 160-LM 


PMT 160 

–050–LM –100–LM –150–LM –170–LM –200–LM –230–LM –250–LM 

Travel [mm] 50 100 150 170 200 230 250 

Accuracy [µm] 1.5 2 2 2 2 3 3 

Repeatability [µm] ± 0.3 ± 0.3 ± 0.3 ± 0.3 ± 0.3 ± 0.3 ± 0.3 



- over 10 mm [µm] ± 0.2 ± 0.4 ± 1 ± 1 ± 1 ± 1 ± 1 

- over total length [µm] ± 0.5 ± 1 ± 1.5 ± 2 ± 2 ± 4 ± 4 

Max. speed [mm/s] 250 250 250 250 250 250 250 

Max. acceleration [m/s 2 ] 2 2 2 2 2 2 2 

Permissible loads Fx [N] 30 30 30 30 30 30 30 

Fy [N] 100 100 100 100 100 100 100 

Fz [N] 200 200 200 100 200 200 200 

Weight [kg] 3.6 4.1 4.7 5.0 5.1 6.3 6.4 



Lift limitation 2 non contact limit switches 






188 

160 

O p t i o n s 


High resolution linear encoder, resolutions up to 0.005 µm possible 

Glassscale for higher accuracies 

Cascade motors for higher forces 







M4; depth 7 (18x) 


70 

120 

50 


70 

Km6 DIN74 


50 

Typical performance 

of piezo linear motor 

Example flatness 

PMT 160 over total 

length on page 13 


131 

108 

90 

40 

20 

44 

140 


L1 

N x 50 

L2 

L2 



40 

40 

50 

C h a r a c t e r i s t i c s 

90 

108 

111 

Velocity [mm/s] 

300 3 

250 2 

200 2 

150 

100 

50 


for length measuring system 

cable connection fixed to motor 

cable length 3m 

Typical 

Performance 

05 10 15 20 25 30 35 40 45 50 

Force [N] 

PMT160 Travel X Size L1 Size L2 N 

[mm] [mm] [mm] 

-050-LM 50 275 127.5 3 

-100-LM 100 315 147.5 3 

-150-LM 150 385 182.5 5 

-170-LM 170 460 220.0 7 

-200-LM 200 460 220.0 7 

-230-LM 230 585 282.5 7 

-250-LM 250 585 282.5 7

Linear Stages 

3-phase synchronous ironless linear motor 

Peak / Continous force 30 N / 6 N 

Peak / Continous current 5 A / 1 A 

Motor constant 4.3 N/√W 



Parameters depend on controller/electronics. 

PMT 160-EDLM 


PMT 160 

–050–EDLM –100–EDLM –150–EDLM –200–EDLM –260–EDLM 

Travel [mm] 50 100 150 200 260 

Accuracy [µm] 1.5 2 2 2 3 




- over 10 mm [µm] ± 0.2 ± 0.4 ± 1 ± 1 ± 1 


Max. speed [mm/s] 500 500 500 500 500 

Max. acceleration [m/s 2 ] 10 10 10 10 10 


Fy [N] 100 100 100 100 100 

Fz [N] 200 200 200 200 200 

Weight [kg] 6.1 6.9 7.9 8.5 10.5 



Lift limitation 2 non contact limit switches 






M4; depth 7 (18x) 

213 

70 


70 

50 

DIN74-Km6 [(N+1)x] 


O p t i o n s 


Mechanical and electrical modifications on customers’ request 

Different encoder resolutions and accuracies possible 


L1 

140 

131 

108 

90 

20 

40 

50 

50 

N x 50 

L2 

L2 




90 

108 

111 

ø10H11 

40 

120 

40 

slide in middle position 

50 

PMT 160 Travel X Size L1 Size L2 N 


-50-EDLM 50 275 127.5 3 

-100-EDLM 100 315 147.5 3 

-150-EDLM 150 385 182.5 5 

-260-EDLM 260 585 282.5 7

Linear Stages 

PMT 200-DC, PMT 200-SM 


Recirculating ball screw 


Screw pitch 5 mm (other on request) 

Rotary encoder - R 500 pulses per rotation 

Incremental linear encoder - L 0.1 µm resolution (50 nm) 

PMT 200 

-320-... -420-... -515-... -650-... 

Travel [mm] 320 420 515 650 

Accuracy [µm] 10 10 10 10 

Repeatability [µm] ± 1 ± 1 ± 1 ± 1 

Hysteresis [µm] < 2.5 < 2.5 < 2.5 < 2.5 



Linear compensation 

per 100 mm travel [µm] ± 3 ± 3 ± 3 ± 3 

Max. speed [mm/s] depending depending depending depending 

and acceleration [m/s 2 ] on motor on motor on motor on motor 

Permissible loads Fx [N] 300 300 300 300 

Fy [N] 300 300 300 300 

Fz [N] 500 500 500 500 

Weight (without motor) [kg] 13.5 15.0 18.0 20.0 


Please see 

parameter 


pages 72, 73. 

Lift limitation 2 limit switches 






Motor type and motor size on customers’ request 

DC-motor, AC-motor, stepper motor possible 


Flange mounting for customer motor types 


DIN933-M6x14 

DIN125-6,4 

50 

L1 

ø 4H7; 6 depth (2x) 

90 

154 

M6; 12 depth (6x) 

97.5 

200 

200 

210 

47.14 

140 

O p t i o n s 


6 

15-pin SUB-D 

connector (male): 

on customer request 

8.5 

7 

50 

M8; 14 depth (4x) 

N x 100 

100 






60 

motor: 

on customer request 


L2 

PMT200 Travel X Size L1 Size L2 N 


-320 320 631.5 310 5 

-420 420 731.5 360 6 

-515 515 881.5 435 7 

-650 650 1021.5 507 6

Micro Stages 

DC motor 


Gear 11.8 :1 

Precision lead screw 

Screw pitch 0.5 mm 



MT 63-DC, MP 63-DC 


MT 63-25-DC 

Travel [mm] 25 

Accuracy [µm] 5 

Repeatability [µm] ± 1 

Hysteresis [µm] 5 



- over total length [µm] ± 3 (± 1 on request) 

Max. speed [mm/s] 2.5 

Max. acceleration [m/s 2 ] 0.05 

Resolution [µm] 0.0207 

Permissible loads Fx [N] 20 

Fy [N] 20 

Fz [N] 20 

Weight [kg] 0.5 


Please see 

parameter 


pages 72, 73. 

Lift limitation 2 non contact switches per axis 


miniature slides 




63 

53 

MT 63-25-DC 

63 

3-axis-system 

MP 63-25-DC 

O p t i o n s 

3-axis compact unit for XYZ-applications: MP 63-25-DC 

Different screw pitches for higher speed 

Different encoder resolutions 


Improved bearings 

Different plug positions 

M4; depth 4 (4x) DIN 74 - Km4 (4x) 

5 

63 

111.5 

53 

63 


25.5 


64 

15-pin connectors 

5 

53 

15-pin connector 

travel 25 mm; slide in middle position 

53 

5

Micro Stages 

DC motor 


Precision lead screw 

Screw pitch 2 mm (1 mm) 



MT 130-DC, MP 130-DC 


MT 130-50-DC 




Hysteresis [µm] 3 



- over total length [µm] ± 1 

Max. speed [mm/s] 50 


Resolution [µm] 0.5 


Fy [N] 30 

Fz [N] 30 

Weight [kg] 9 


Please see 

parameter 


pages 72, 73. 


Bearings backlash-free cross-roller bearings 




MT 130-50-DC 

43 

13 

3-axis-system 

MP 130-50-DC 

O p t i o n s 

3-axis compact unit for XYZ-applications: MP 130-DC 


Different hole patterns 

35 

69 

130 

110 

90 


54 

50 

travel 50 mm; slide in middle position 



counterbore DIN 74-Km6 (4x) 


17 

130 

110 

90 

50 

15-pin SUB-D-HD connector 

54 




M6; depth 10 (4x) 

15-pin SUB-D-HD connector

Micro Stages 

MT 84-LM 

MT 84 

–25–LM –50–LM –100–LM 

Travel [mm] 25 50 100 

Accuracy [µm] 3 (1 on request) 3 (1 on request) 3 (1 on request) 

Repeatability [counts] ± 6 ± 6 ± 6 



- over total length [µm] ± 1 ± 2 ± 4 

Max. speed [mm/s] 250 250 250 

Max. acceleration [m/s 2 ] > 10 > 10 > 10 

Max. pushing force 

(HR-4 motor) [N] 15 15 15 

Weight [kg] 0.6 0.75 1.0 



Static Holding Force 5 N 

no magnetic fields, no heat 


Resolution upto 20 nm 



Lift limitation 2 fixed stops 






30 

27 

L2 

L3 

15 

MT 84-LM 

O p t i o n s 

High vacuum preparation on request (other technical data) 


Non-magnetic preparation on request (other technical data) 

50 

N x 15 = L4 

L1 

M5; depth 4.8 (4x) M5; depth 4.8 (2x) 

70 

7 

84 

M4; depth 6 

encoder-cable 

ground 


motor-cable 

4.5 

27.5 

17 50 

DIN74 - Hm5 (4x) 

Bottom view; slide in middle position 


84 

MT 84 Travel X Size L1 Size L2 Size L3 Size L4 Size L5 N 

70 

50 

17 

[mm] [mm] [mm] [mm] [mm] [mm] [mm] 

-25-LM 25 84 17 12 60 7 4 

-50-LM 50 110 30 10 90 20 6 

-100-LM 100 160 55 20 120 45 8 

L5

Micro Stages 

MT 105-LM 

MT 105 

-50-LM -30-2LM 

Travel [mm] 50 30 

Number of motors [pcs] 1 2 

Accuracy [µm] 1 1 

Repeatability [counts] ± 2 ± 2 


straightness /flatness 

- over total length [µm] ± 1 ± 1 

Max. speed [mm/s] 250 250 

Max. acceleration [m/s 2 ] 10 10 

Permissible loads Fx [N] 10 20 

Fy [N] 30 30 

Fz [N] 50 50 

Weight [kg] 1.0 1.1 



Static holding force 16 N 







300 

250 

200 

150 

100 

50 

Typical 

Performance 

02 04 06 08 10 12 14 16 18 20 

Force [N] 

In case of use in Z-direction the motor 

characteristics speed/force must be taken 

into consideration 





aluminum alloy

25 

O p t i o n s 


Z-assembly with mounting bracket 


(e.g. hole pattern) 

Ultra high vacuum and non-magnetic preparation on request 

(other technical data) 


90 

including in the standard: 

assembly of Balluff-sensors 

BES516-300-S202 

119.9 


4 

90 

105 

cable output optionally right or left 

measuring system 

optional: 

with 1 motor: MT 105-50-LM (travel ±25mm) 

with 2 motors: MT 105-30-2LM (travel ±15mm) 


4 

94.6 

151.5 

M5; depth 6 (4x)

Micro Stages 

MT 196 

-100-2LM -200-2LM 

Travel [mm] 100 200 

Accuracy [µm] 2 2 

Repeatability [counts] ± 2 ± 2 



- over 10 mm [µm] ± 0.4 ± 1 

- over total length [µm] ± 5 ± 10 




Fy [N] 100 100 

Fz [N] 200 200 



Piezo linear motor 2 x HR-8 

MT 196-LM 


Resolution 0.1 µm (other on request) 









O p t i o n s 


2 non contact limit switches 

High resolution linear encoder, resolutions up to 0.005 µm possible 

Glassscale for higher accuracies 

Cascade motors for higher forces 




Vacuum and non-magnetic preparation on request 




DIN 74 - Km6 (4x) 

110 43 


110 

35 

45 

M5; depth 5 (12x) 

61 61 61 


196 

84 

84 

6 

6.5 

180

Micro Stages 

MT 53-PM 


* depending on encoder; Please see parameter definitions on pages 72, 73. 

PiezoLeg - linear motor 

Holding force 5 N 



MT 53-10-PM 



Repeatability [counts] ± 2 * 



- over total length [µm] ± 0.5 


Permissible loads Fz [N] 5 

Weight [g] ca. 100 








cable option 1 

O p t i o n s 

Options for cable output 

2 or 3-axis systems possible 

Open loop without encoder possible 




cable option 2 

DIN 74 - K m 2.5 (4x) from inside 

53 

46 20 

46 


53 

M2.5 depth 6 (4x) 

M3 depth 3.5 (4x) 

M2 depth 3.5 (4x) 

Ø2 H7 depth 4.5 (2x) 


46 

30 

20 

20 

30 

46

Micro Stages 

MT 84-PM 


* depending on encoder; Please see parameter definitions on pages 72, 73. 





MT 84-25-PM 


Accuracy [µm] 3 (1 on request) 

Repeatability [counts] ± 2 * 



- over total length [µm] ± 0.5 



Weight [g] 600 


Lift limitation 2 adjustable switches 






30 

27 

17 

12 

O p t i o n s 




15 

50 

4 x 15 = 60 

84 

70 

7 


M5; depth 4.8 (4x) M5; depth 4.8 (2x) 

84 

M4; depth 7.5 (10x) 

4.5 

27.5 

Bottom view; slide in middle position 


17 50 

84 

DIN74 - Hm5 (4x) 

70 

7 

50 

17


KT 205-DC 

DC motor 


Precision recirculating ball screw 






KT 205-100-DC 








Max. acceleration [mm/s 2 ] 100 


Fy [N] 30 

Fz [N] 50 





Cabling 25-pin SUB-D connector; 

one plug for both axis 

Bearings blackflash-free preloaded 





126 

86 

205 

20 

30 

25 

O p t i o n s 

Stepper motor possible 

Plug modification 

Travel limitation 

Different mounting hole patterns 

KT 205-DC standard version 

20 

145 DIN 74 - Km4 (4x) 60 

DIN 74 - Km4 (4x) 

205 

8 x 20 = 160 

KT 205-DC with mounting holes 



22.5 

20 

7 x 20 = 140 

84 

60 

M4 depth 8 (72x) 2 plates optional 

M5 depth 12 (4x) 


205 

145 30 

20 

35 

126 

86 

90 

205 

90 

57.5


KT 310-DC 


DC motor 







Incremental linear encoder - L 



KT 310-200-DC 

Travel [mm] 200 x 200 

Accuracy [µm] 5 (other on request) 








Fy [N] 100 

Fz [N] 200 

Weight [kg] 11 




different connectors for encoder 

and motors (Terminal) 






O p t i o n s 

Stepper motor possible 

Plug modification to opposite side 


Different mounting plate 

80 

115 

137 


M6 (4x) 

ø6 H7 (2x) 

310 

190 

50 

40 40 

52 

125 


M6 (4x) 

ø5H7 (2x) 

counterbore for DIN912-M5 

240 

310


KT 180-SM 

KT 180-50-SM 

Travel [mm] 50 x50 





- over 10 mm [µm] ± 0.5 





Fy [N] 30 

Fz [N] 50 



Stepper motor 

Resolution 1.894 µm /full step 

Gear 22:1 



Screw pitch 1 mm 

backlash-free 




(Hall switches /5 ... 24 V) 


one plug for both axis 







DC-motor drive 

180 

20 

20 

O p t i o n s 

180 

7 x 20 = 140 


15 

20 

6 x 20 = 120 

M4 depth 8.5 and 4.5 (56x) 

32 

M4 depth 8.5 and 4.5 (4x) 


80 

90 

90 

45

Open Compact-XY-Table 

KDT 180-DC 

KDT 180-60-DC 




Hysteresis [µm] 1.5 



- over 10 mm [µm] ± 0.5 





Fy [N] 30 

Fz [N] 50 

Clear aperture [mm] 90 


DC motor 


Gear 11.8 :1 



Screw pitch 1 mm 





Please see 

parameter 


pages 72, 73. 

Lift limitation 2 limit switches (other on request) 

Cabling 15-pin SUB-D connector 






90 

Counterbore 

DIN 74-Km4 (4x) 

70 

50 

O p t i o n s 

Plug modification to opposite side 


M5 (4x) 

M4 (8x) 

30 


(75) 

90 

120 

199 

180 

15 15 

Top view 

(identically with 

bottom view) 

height 32 mm 


150 

180 

199


KDT 310-DC 

DC motor 










KDT 310-100-DC 

-R -L 


Accuracy [µm] 10 3 (error 

compensation) 

Repeatability [µm] ± 1 ± 0.3 

Hysteresis [µm] < 3 0.2 

Deviation from straightness / 

flatness - over total length [µm] ± 10 

Max. speed [mm/s] 100 * 

Max. acceleration [mm/s 2 ] 500 * 





* depending on motorization 


Lift limitation limit switches and index switch 

integrated (Hall switches) 

Cabling 15-pin SUB-D connectors, 

cable outlets at one spot 

Bearings profile rail linear bearings, 

backlash-free 





100 

80 

O p t i o n s 

155 

R25 

310 

170 

150 


150 

155 

310 

ø6 H7; depth 8 (2x) 


ø6 H7; depth 8 (2x) 


80 


155 

155 

170 

80 

100


KDT 380-DC 

DC motor 






Pulses per rotation 500 (2000) 




KDT 380-155-DC 

-R -L -Lx 

Travel [mm] 155 155 100 

Accuracy [µm] 10 1 (error 1 (error 

compensation) compensation) 

Repeatability [µm] ± 0.5 ± 0.3 ± 0.05 

Hysteresis [µm] < 3 0.2 0.2 


flatness - over total length [µm] ± 2 

Max. speed * [mm/s] 50 (100) 50 (100) 10 (50) 

Max. acceleration * [mm/s 2 ] 0.5 0.5 0.1 





* depending on motorization 

Please see parameter definitions 

on pages 72, 73. 

Lift limitation adjustable limit switches 

(Hall switches) 

Cabling 15-pin SUB-D connectors, cable 

outlets at one spot (selectable) 






380 

150 

O p t i o n s 

Resolution: upto 5nm possible 

Scale in Abbe plane in version -Lx 

(resolution 0.1µm...5nm - programmable) 

Available as single axis 

R6 

170 

184 

380 

170 

133 



100 

ø6H7; depth 22 


150 

184 

counterbore for 

M6 DIN 912


KDT 450-SM 

KDT 450-205-SM-L 

Travel [mm] 205 x 245 

Accuracy [µm] ± 5 

Repeatability [µm] ± 0.5 


flatness - over 25 mm [µm] ± 4.0 




Fy [N] 30 

Fz [N] 30 

Weight [kg] 9 


Stepper motor 

Resolution 10 µm /full step 



Screw pitch 2 mm (1, 4, 5 mm) 






(Hall switches /5 ... 24 V) 

Cabling 15-pin SUB-D connector 

Bearings 7 mm profile rail linear bearings, 

backlash-free 




Clean room class available 

Other encoder resolutions 

Designed for Axiotron 2 microscope 

ø84 

O p t i o n s 

ø 230 

130 

100 

450 

Vacuum connection 

Internal cabling 



ø215 

55 

55 

50 

36.55 

24.35 

65.3 100 

counterbore DIN74-Km5 (4x) 

M4 (6x) 

330 

414.5


KDT 105-LM 

KDT 105-50-LM 


Repeatability [counts] ± 2 





Max. acceleration [m/s 2 ] 10 


Fy [N] 10 

Fz [N] 50 











Lift limitation fixed stops 







300 

250 

200 

150 

100 

50 

Typical 

Performance 

02 04 06 08 10 12 14 16 18 20 

Force [N]

105 

Top view (identically to bottom view) 

M4; depth 5.5 (4x) 

52,5 

O p t i o n s 


(e.g. travel, hole pattern) 


Vacuum and non magnetic preparation on request 



90 

50 

40 

M5; depth 5.5 (4x) 

counterbore 

DIN 74-Km5 (4x) 

52,5 

height 40 mm; aperture 40 x 40 mm (in zero-position) 


108 

90 

50 

40 

150 

counterbore for DIN 912 M5 (4x) 

(inside) 

cable connection fixed to motor; 

cable length app. 3 m 


for length measuring system 

(2 pieces) 


150


KDT 180-LM 

KDT 180-100-LM 







Max. acceleration [m/s 2 ] 10 


Fy [N] 10 

Fz [N] 50 











Lift limitation fixed stops 







300 

250 

200 

150 

100 

50 

Typical 

Performance 

02 04 06 08 10 12 14 16 18 20 

Force [N]


M6 (4x) 

M5 (4x) 

9-pin SUB-D 

connector (2x) 

O p t i o n s 

Number of piezo linear motors: 1per axis, optional 2per axis 






230 

180 

155 

115 


50 

Top view 

(identically to 

bottom view) 

80 

105 

height 40 mm 

115 

230


KDT 255-LM, KDT 255-PM 

KDT 255-130-LM KDT 255-130-PM 

Travel [mm] 130 x70 




- over total length [µm] on request 




Fy [N] 15 5 

Fz [N] 30 30 




Piezo linear motor (-LM) HR-4 - for high-speed scanning 

applications 

PiezoLeg Motor (-PM) for low speed for smooth 

operation 






profile rail linear bearings 

Casing anodized black aluminum alloy 


Top view 

61.5 

Bottom view 

47 


170 

116.5 

324.5 

160 

102 

aperture middle plate 

50 

84 

207 

ø102 


95 

M4 (4x) 

116 

60 

58 

89 

89 

253 

26 

178


KDT 105-PM 






KDT 105-50-PM 








Fy [N] 5 

Fz [N] 50 










9-pin SUB-D 

connector (male) 

(2x) 

O p t i o n s 






150 

105 

90 

50 

40 

M4; 6.5 depth (4x) 

M5; 5.8 depth (4x) 


40 

40 

50 

90 

108 

150

Rotary Stages 

DT 58-DC 

Rotary angle [deg] no limit 

Accuracy [deg] 0.05 

Repeatability [deg] 0.003 

Backlash /hysteresis [deg] 0.02 

Surface run out [µm] 20 

Max. speed [deg/s] 80 

Max. acceleration [deg/s 2 ] 360 

Max. torque [Nm] 5 




DT 58-DC 



Output signal rectangular signal RS422 

Resolution 0.001 deg 

Incremental angular encoder - W 

Number of graduation marks 

on the screen displate 3 600 

Resolution 0.0005 deg 



DC motor 3557 


Nominal current 1.2 A 

Gearing worm gearing system180 :1, 

preloaded 

Reference switch contactless Hall-sensor 

Bearing preloaded four-point bearing 

Casing low distortion aluminum alloy, 

black anodized 


41.5 

41 

` 

193 

O p t i o n s 


ø35 

50 

66 

ø 58 

Wiring corresponding 

customer specification: 

9-pin SUB-D (male) 


Counterbore for cylindrical screw 

DIN 7984-M6x35 (2x) 


(3 x 120°) 


33 

50 

34.5 

60 

36.5 

108 

DT 58-DC 

-R -W -R-MM -W-MM 

Rotary encoder x - x - 

Incremental angular encoder - x - x 

Integrated control system minimot - - x x 

Available with centrical hole ø 22 mm (only for DC-R versions)

Rotary Stages 

DT 170-DC 

Rotary encoder Angular measurement 

system 

DT 170-DC-R DT 170-DC-W 

Rotary angle [deg] no limit no limit 

Accuracy [deg] 0.05 0.005 

Repeatability [deg] 0.01 0.001 

Backlash /hysteresis [deg] 0.1 0.001 

Surface run out [µm] < 10 < 10 

Max. speed [deg/s] 360 80 

Max. acceleration [deg/s 2 ] 1800 1800 

Max. torque [Nm] 3.5 3.5 

Permissible loads Fz [N] 100 100 





Output signal rectangular signal RS422 

Resolution 0.001deg 


Incremental angular encoder - W 

Number of lines 18 000 

Resolution 3 600 000 counts/360 deg 


DC motor 


Gearing drive belt 






O p t i o n s 

Can be assembled with PMT stages without adapter plate 


240 

ø 170 

ø 90 

ø 66 

90 


45 

95 

13 

55.5 99.5 

199 

111 


counterbore by a stopper 

DIN 74 - Km4 (4x) 




40

Rotary Stages 

DT 180-SM 


DT 180-SM 


Accuracy [deg] 0.1 * 

Repeatability [deg] 0.05 * 

Backlash /hysteresis [deg] 0.2 

Surface run out [mm] < 0.02 

Excentric run out [mm] < 0.02 * 



Max. torque [Nm] 1 ... 10 ** 

Permissible centric loads Fz [N] 300 



* depends on lifting torque 

** depending on used motor 

Please see parameter definitions 

on pages 72, 73. 

Stepper motor Nema23 flange Gearing 4:1 







O p t i o n s 


Motor on customers’ request 

Integrated controller 

ø100 G7 

ø114 

ø179 

ø310 

45° 

ø5H7; depth 10 

R60 


with plate / 

without plate 

68 / 63 

80 

52 

plugs optional 

counterbore for DIN 912-M6 (4x; inside) 

137 115 

ø6H7; depth 10 / 15 (2x) 


85 

146 

310

Rotary Stages 

DT 200-SM 

DT 200-SM 



Repeatability [deg] 0.01 

Axial run out [mm] 0.05 



Permissible centric loads Fz [N] 100 




Stepper motor 3 syncronised 2phase motors 

Integrated motion controller TRINAMIC 

Resolution 0.075 deg /quarter step 


Reference switch index switch 

Cabling RS232 interface 

(optional RS485, ICC or CAN) 

Bearing preloaded precision bearing 

Casing adjustable 3-point base, 

low distortion aluminum alloy, 



25 mm aperture on request 

Pattern holes on request 

ø205 

O p t i o n s 

24 

M6 

ø10; dephth 6.4 

(3 x 120°) 


95.3 95.3 

30 210 


ø220 

110 

55 

105 117.4

Rotary Stages 

DT 65-LM 



Repeatability [deg] ≤ 0.003 

Surface run out [µm] 20 


Max. acceleration [deg/s 2 ] > 10000 

Max. torque [Nm] 0.25 






DT 65-LM 

Incremental angular encoder 


Resolution 409 600 counts/360 deg 



Bearings four-point ball bearings 




54 

ø 51.5 

O p t i o n s 

Available with centrical hole max. 10 mm 


Z-assembly possible 


(e.g. hole pattern) 

High vacuum preparation on request 

Clean room preparation on request 

25 

ø 33 


ø 65 

65 

105.5 

M2; depth 5; 6x60º 4xKm4; DIN74 

M3; depth 3.5; 3x120º 

measuring system 

wired on 9-pin 

SUB-D connector 


motor 

cable connection 

fixed to motor, 

cable length 3m

Rotary Stages 

DT 105 

–1LM –2LM –3LM –4LM 

Rotary angle [deg] no limit no limit no limit no limit 

Number of motors [pcs] 1 2 3 4 

Accuracy [deg] 0.005 0.005 0.005 0.005 

Repeatability [deg] 0.0005 0.0005 0.0005 0.0005 

Surface run out [µm] < 15 < 15 < 15 < 15 

Max. speed [deg/s] 180 180 180 180 

Max. acceleration [deg/s 2 ] >10000 >10000 >10000 >10000 

Max. torque [Nm] 0.4 0.8 1.20 1.60 

Permissible loads Fz [N] 100 100 100 100 

Weight [kg] 0.9 1.0 1.2 1.3 




DT 105-LM 


Incremental angular encoder 


Resolution 3 600 000 counts /360 deg 


Bearings Precision angular-contact ball bearings 

Casing warp-proof, anodized black aluminum alloy 


90 

49 

O p t i o n s 

Assembly with MT 105 without adapter plate, 

Z-assembly with mounting bracket 


Low speed 



39 


90 

ø 100 

ø 70 

ø 35 

147.5 

M4 (3x120º) 

8 depth DIN74-Km5 (4x) 

15-pin SUB-D (female): 

1 to 4 motors 

9-pin SUB-D (male): 

encoder-output 


105 

33

Swivel Stages 

ST 114-DC, ST 129-DC 

ST 114-DC ST 129-DC 

Travel [deg] ± 10 ± 10 

Table size [mm xmm] 62 x 75 79 x 97 

Rotation center [mm] 53 114 

Rotation center devitation [mm/deg] 0.005 0.005 

Max. speed [deg/s] 25 14 



DC motor 






Resolution ST 114-DC 0.00024 deg/count 


Linear encoder - L 




41.9 

133 

148 

ST 114-DC 

114 

ST 129-DC 

129 

52 

75 

97 

rotation center 

rotation center 

79 

183 


62 

156 

33 

94 

50.9 

Combination example for ST 114-DC, ST 129-DC 


Lifting Stages 


HT 16-LM 


Piezo linear motor HR-4 (2x) 




HT 16-LM 



Resolution [nm] 33 

Vertical force/displacement ratio 1 :3 












picture: high vacuum stage HT 16-LM-HV

M6 (4x) 

M5 (4x) 

O p t i o n s 

Vacuum preparation on request 


L1 

100 

50 


58+16 

155 

L2 

HT 16 Size L1 Size L2 

[mm] [mm] 

-LM 160 245 

-LM-HV 

(High Vacuum) 

154 220 

FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007 70 | 71

Definitions 

Absolute accuracy: 

The absolute accuracy is defined by 

the deviation of the actual position 

from the rated one (real designation: 

Inaccuracy). If a system is to 

move by 100 mm but the system 

really does move by 99.99 mm only 

(measured through an ideal scale), 

then the inaccuracy amounts to 

0.01 mm. The permanent positioning 

error along an axis is designated 

as accuracy, after all the other 

linear deviations have been eliminated. 

Linear (or systematic) deviations 

are, for example, cosine deviation, 

screw pitch error, angular 

error at the measuring point, and 

deviation due to thermal expansion. 

In graphic representation, these 

deviations are shown in a protocol 

of position and deviation by the 

slope of a compensating straight line. 

Referring to the slope of this 

straight line the absolute accuracy 

can be approximated by calculation 

in the following way: 

Absolute accuracy = 

Accuracy along the axis of 

movement + slope x traverse 

In positioning units equipped with, 

for example, glass scales, the slope 

is close to zero, and the absolute 

accuracy equals the accuracy along 

the axis of movement. The stated 

values apply only under the condition 

of a clamping area according 

to DIN 576 /00 and a torque of 

the mounting screw of 0.15 Nm 

(at PMT 160 two center screws). 

Acceleration: 

Speed variation per unit time. 

Acceleration = Speed /time (a = v/t) 

Accuracy: 

Accuracy describes the expected 

deviation of the actual position 

from the rated one. Positioning 

accuracy depends, among others, 

on the measuring method applied 

for detecting the actual position. 

The given value is half peak to 

peak value. 

Backlash: 

Backlash means that positioning 

error occurring with change of direction. 

Backlash can be caused by 

insufficiently pre-loaded thrust or 

pic. 1: Guiding accuracy 

inaccurate meshing of drive components, 

for example, gear teeth. In 

most cases, backlash occurs uniformly 

and can be compensated for 

through installing suitable electronic 

equipment. Steinmeyer-made 

ballscrews and ballscrew assemblies 

are characterised by an extremely 

small backlash. 

Concentricity runout and error 

of drunkenness: 

Considering a rotary table, concentricity 

(eccentricity) defines the 

runout of the centre of rotation 

from its middle position detected 

over a single turn. In a perfectly 

centred rotary measuring table 

there would be no eccentricity 

while rotating. Drunkenness of a 

rotary measuring table is the angular 

runout of the axis of rotation 

detected over a single turn. 

Control sensitivity: 

This parameter stands for the minimum 

control quantity, which initiates 

movement, also described 

as the ratio of resulting movement 

and causing drive. 

Deviation from straightness/ 

flatness: 

Straightness/flatnes is defined as 

a sum of the maximum upward 

and maximum downward deviation 

from the baseline. The stated values 

apply only under the condition 

of a clamping area according to 

DIN 576 /00 and a torque of the 

mounting screw of 0.15 Nm 

(at PMT 160 two center screws). 

Friction: 

Friction has been defined as resistance 

between contacting surfaces 

while a movement is running. 

Friction may be constant or depend 

on speed. Various factors have an 

impact on the total friction of a system, 

for example, sliding friction 

or wear, and lubricant viscosity. 

Guiding error: 

The guiding error is the linear portion 

of a deviation from the axis 

of movement, and composed of 

two orthogonal components: 

straightness (deviation inside of 

the plane of the slide) and flatness 

(deviation outside of the plane of 

the slide). 

Guiding accuracy: (pic.1) 

Due to inaccuracies in the guideways 

(for example, tolerances of 

the rolling elements) the clamping 

surface of the measuring table 

does not move along an ideal 

straight line. Typical deviations are 

the yaw error Gz and tilting error 

Gy. These errors are also defined as 

absolute and relative deviations. 

The relative deviation is the deviation 

related to the medium straight 

line (compensating straight line). 

Error of straightness Gz (yawing). 

Error of flatness Gy (tilting) . 

Hysteresis: 

Hysteresis characterises different 

movements released by same input 

signals, which occur with various 

directions. Hysteresis is caused by 

elastic forces in various compo- 

Test certificate indicating the straightness measured on 

a standard table PMT 160-50-DC-R 

nents of the drive chain (for example, 

distortion of the drive screw). 

Hysteresis is often mistaken for 

backlash, which can, however, 

precisely be determined and compensated 

for by suitable control 

electronics. The given value is half 

peak to peak value. 

Inertia and inertia moment: 

Inertia and inertia moment represent 

the measure of resistance of a 

mass against a rotational velocity 

variation. The higher the inertia or 

inertia moment the greater is the 

force (torque) required for acceleration 

or deceleration of a load. 

The inertia (inertia moment) depends 

on the mass (and shape) of 

the load. 

Life cycle: 

Depends from constructions, actual 

loads, actual speeds, continuous 

operation, environmental factors 

and drives. 

Lifting-off deviation: 

Lifting-off deviation is an enlargement 

of the linear deviation of the 

axis of movement caused by the 

arm due to tilting or drunkenness 

of the guiding axis. This deviation 

comes into effect especially when 

gauging takes place relatively far 

away from the guiding axis. The 

deviation is to be considered similar 

to a guiding variation, but in 

contrast to that variation, the lifting-off 

deviation can be diminished 

by shortening the arm. 


Load: 

As regards linear measuring tables, 

the load is the admissible force resulting 

from a load being perpendicularly 

applied onto the axis of 

movement and slide surface in the 

middle of the slide. In rotary measuring 

tables, the direction of the 

admissible force acts along the axis 

of rotation. The load of measuring 

tables depends primarily on the design 

of the guide-ways and preload. 

Axial load: 

Axial load is the maximum load 

being applied along the drive train. 

Considering Z-arrangement tables, 

the axial load in direction to the 

motor distinguishes from the one 

in the opposite direction away from 

the motor. As a rule, the axial load 

depends on the load-carrying capacity 

of motor and driving screw. 

Dynamic load: 

Dynamic load is the sum of all static 

loads and the dynamic resistance 

to movement. Dynamic features 

such as friction and inertia 

have to be considered as well. 

Lateral load: 

This term characterises the maximum 

load acting rectangularly onto 

the axis of movement along the 

slide surface. The lateral load is also 

determined by the load-carrying 

capacity of the guide-ways and in 

most cases, equals the vertical load. 

Vertical load: 

Vertical load is the maximum load 

permitted to be applied centrically 

on the moving slide. 

Positioning accuracy (dx): 

Positioning accuracy is the deviation 

of the really reached actual position 

XACTUAL from the desired 

rated one XRATED, 

Dx = XACTUAL - XRATED 

The positioning accuracy, in contrast 

to the position resolution, represents 

the really obtained accuracy 

of the system, influenced 

mainly by the following criteria: 

- Screw pitch error 

- Bearing play 

- Pitch error of the encoder 

- Loads acting on the system 

Position resolution: 

The position resolution has been 

defined as minimum translational 

or rotational increment of movement. 

Position stability: 

The position stability is the ability 

to keep a precise position constant 

over a longer period of time. The 

deviation from the stable position 

is called „Drift“. Drift occurs due to 

wear, lubricant displacement and 

temperature variation. 

Precision: 

Precision describes that position 

range which 99.7 % of the final positions 

over a number of repeated 

positioning movements are ranging 

in. Precision is also called „Repetitive 

accuracy“. 

Repetitive accuracy: 

Repetitive accuracy is considered 

as that ability of a system to repetitively 

approach to a position on a 

reliable basis, initiated by the same 

command. In many cases, the unidirectional 

repetitive accuracy is 

stated, that means, to designate 

the ability of the device to repeat a 

movement in one and the same direction. 

This parameter, however, 

does not consider those phenomena 

such as backlash and hysteresis. 

In some cases, the bi-directional 

repetitive accuracy is of greater 

importance, since this accuracy parameter 

is composed of the uni-directional 

repetitive accuracy and 

hysteresis of the system. The ability 

of repetitive accuracy is a prominent 

feature of the systems produced 

by Feinmess Dresden GmbH. 

Repeatability: 

Repeatability determines that area 

in which an actual position varies 

when a defined rated position is 

approached to under identical conditions 

as often as desired. Unidirectional 

and bi-directional reproducibility 

are distinguished. 

Resolution: 

Resolution means the minimum increment 

of movement the system is 

able detecting. Resolution is also 

called „resolution of the encoder“, 

and normally determined by the 

encoder specification. Due to variations 

in the drive assembly, such as 

hysteresis, backlash and distortion, 

the minimum step width in most 

systems is higher than the resolution. 

Rotary encoder: 

As standard, the dc-motors are 

equipped with a high-resolution electro-optical 

pulse transducer. 

Such transmitted-light, metal discplate 

orifice-based transducer generates 

two output signals phaseoffset 

by 90 deg. Each turn of the 

encoder supplies, for example, 

500 pulses. Electronic evaluation 

of both the signals delivers two 

outputs: The number of pulses is 

quadrupled to 2000 pulses per 

turn, on the one side, and the direction 

of movement is detected, 

on the other side. Given a screw 

pitch of 1 mm, each control pulse 

delivers a change of the rated position 

of 0.0005 mm, that means, a 

maximum resolution of 0.5 µm. 

Speed: 

Travel variation per unit time. 

Speed = Travel / time (v = s / t) 

The actual speed depends on the 

screw pitch, motor speed and, if 

existing, transmission gears. 

Speed stability: 

Speed stability is the ability to keep 

a movement running at constant 

speed; this capability depends on 

the mechanical construction of the 

measuring table, control mechanisms, 

and control algorithms, 

encoders and speed itself. 

Static friction: 

Static friction means friction due 

to static position of rest, which is 

to be overcome to move a body 

from its static position of rest. As 

the static friction is always greater 

than the sliding one, a higher force 

has to be applied to move a body 

from its static position of rest as a 

to keep it moving. Thus a body, at 

first, does not move when force is 

applied, but then starts moving 

with a non-linear „jump“ when 

forced above a non-reproducible 

threshold; this „jump“, however, 

can be compensated for by the 

today available electronics (stickslip-effect). 

Step width, minimum: 

The minimum step width stands for 

the smallest increment of movement 

a device is able to reliably 

pass. Do not confuse this parameter 

with the resolution of the actual 

indication the display unit is 

capable showing, and which may 

range considerably under the real 

step width of the system. 

Surface run out: 

For rotary tables, value of the maximum 

deviation (peak to peak) is 

determined. This value is a sum of 

deviations resulting from surface 

runout error and the coming from 

table surface irregularities. 

Systematic of the positioning 

systems: 

Each positioning table enjoys 6 degrees 

of freedom, such as: Three 

straight-line movements along the 

axes X, Y, and Z as well as the rotation 

around these two axes. The 

explained movements refer, in most 

cases, to a right-hand co-ordinate 

system in which each movement 

can be considered as composition 

of various straight-line movements 

along and/or rotation around the 

co-ordinate axis. Tables made by 

Feinmess Dresden GmbH are highlighted 

by an extra-ordinarily precise 

movement, which means that 

the positioning table is hindered 

from breaking out into another 

direction while traversing along a 

desired straight-line direction of 

the axis of movement. 

Tilting and drunkenness: 

Tilting and drunkenness are explained 

as that deviation from the axis 

of movement, which is measured in 

angular terms. Both errors are 

composed of three orthogonal 

components often designated as 

rolling, rocking and yawing. 

These errors mostly dominate the 

overall geometrical error of multiaxes 

positioning systems. 


Technical information 

for vacuum- and non-magnetic preparation 

All Products used in vacuum conditions 

and non-magnetic applications 

are seen as customized 

Solutions (FMD). That means, the 

customer is directly involved in the 

realisation of the project with regard 

to concrete operating conditions 

and purpose. The resulting 

parameters are customer specific 

and may differ from our standard 

products. 

Definitions and Measures 

Low vacuum: 1 - 10 -3 Torr 

High vacuum: 10 -4 -10 -7 Torr 

Ultra high vacuum: >10 -8 Torr 

1 Torr = 1.33322 * 10 2 Pa (Pascal) 

1 T (Tesla) = 1 Vs/m 2 = 10 4 Gauß 

Vacuum compatibility: 

Upon request all positioning 

systems are applicable to vacuum 

up to 10 -1 Torr without special 

preparation. The materials, lubricants, 

and auxiliaries as well as 

actuators are chosen 

according to customers’ wishes; 

they are optimized to a minimum 

regarding gassing, 

dielectric- and thermal stability. 

Non - magnetic applications: 

In general, it can be assumed that 

positioning systems generate own 

magnetic fields and are magnetized 

by external fields; this can 

influence their function. In order 

to avoid this influence, two different 

solutions are possible. Upon 

request non-magnetic positioning 

systems are manufactured. 

The materials, lubricants, and 

auxiliaries as well as actuators are 

chosen according to customers’ 

wishes; the systems are optimized 

to a minimum regarding self- 

and external generation of magnetic 

fields. 

The design and manufacture of 

these special components is effected 

by captive standards. Meaning 

that the systems are cleaned and 

post-treated (baked) for the use in 

high-vacuum. If required the 

final assembly takes place in the 

cleanroom (according DIN ISO). 

For non-magnetic applications, 

suitable materials for bearings and 

drives are used. The main components 

have a specific permeability 

of 1.001. Therewith, systems can 

be created having a self-magnetism 

of less than 1 milli Gauss. 

In close cooperation with scientific 

research institutes, universities, 

and companies various solutions 

for positioning systems in vacuum 

or as non-magnetic system have 

been developed. 

Examples: 

Standard-Linear Stage 

PMT160-100-LM-HV 

This stage, derived from the standard 

option for normal environments 

(PMT160-...LM), is designed 

for electron beam lithographyequipment. 

The linear stage is 

designated for an environment of 

10 -8 Torr (app. 10 -6 Pa). In order to 

minimize permanent and electromagnetic 

influences on the ion 

beam, suitable non magnetic 

materials are in use. 

Microstage MTS105-30-NM 

Non-magnetic, compact construction 

with two motors and titanium 

bearings. 

Standard-Linear-Aperture Stage 

KDT105-50-LM-HV 

This under normal conditions 

approved x-y aperture stage, 

KDT 105-50-LM, is mostly used in 

the electron beam lithography. 

Preparation for ultra-high vacuum 

is possible. 


Imprint 

This catalogue is subjet to alteration 

without notice. 

The technical specifications do not 

represent a warranty. 

Relevant are the technical parameters 

at the time of order. 

In the course of technical progress the 

parameters are subject to alterations. 

Please ask for parameters before ordering. 

Editorship: Nadine Strudel 

©Feinmess Dresden GmbH, January 2007

Fax to (+49 351) 8 85 85-25 

Customer information for selection of precision stages 

Customer: company . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

contact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

fon /fax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

Application: description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

Operating conditions: cleanroom /vacuum (class) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

temperature /fields of error /pollution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

Interfaces: available mechanics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

available electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

signal /data interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

System number of axis 

Travel travel /diameter [mm] 

Traversing rate max. rate [mm/s] 

min. rate [mm/s] 

Loading / dynamic accelerating mass [kg] 

max. acceleration [m/s 2 ] 

Operational mode max. time of application [s] 

max. time of a cycle [s] 

operation time [h/year] 

Accuracy requirements positioning accuracy 

repeatability 

relative deviation from straightness [µm] 

relative deviation from flatness [µm] 

relative deviation from screw run-out[µm] 

Drive stepper motor/dc-motor / linear motor 

Rotation / linear encoder type 

resolution 

Control point-to point-control 

continuous path control 

Optional equipment screw grade /screw breaking 

limit switch /reference marks 

integrated control /power supply 

cabling /pin assignment 

seating of the table 

others 

Design material /surface 

X Y Z R 

Remarks: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Contact: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

Date: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Name: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Our service 

We are a market-oriented company whose obligations reach beyond the 

on-schedule shipment of our products: 

Life-time availability guarantee for all our products 

Our philosophy does not allow for any downtime – repair service world-wide is 

most natural! 

Creating innovative solutions is our daily business. Ideas, your demands and 

suggestions but also your criticism make a permanent improvement of our marketoriented 

and customer-tailored offer possible. 

Therefore we are pleased receiving your call. Welcome. 

Please note 

Linear stages for automation in our catalogue PICO 

FEINMESS DRESDEN GmbH 

Fritz-Schreiter-Str. 32 

D-01259 Dresden 

Phone (+49 351) 8 85 85-0 

Fax (+49 351) 8 85 85-25 

info@feinmess.de 

www.feinmess.de

Feinmess Dresden catalogue - Armstrong Optical Ltd

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