Feinmess Dresden catalogue - Armstrong Optical Ltd
Feinmess Dresden catalogue - Armstrong Optical Ltd
Feinmess Dresden catalogue - Armstrong Optical Ltd
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
Micro Stages<br />
MT 196<br />
-100-2LM -200-2LM<br />
Travel [mm] 100 200<br />
Accuracy [µm] 2 2<br />
Repeatability [counts] ± 2 ± 2<br />
Deviation from<br />
straightness / flatness<br />
- over 10 mm [µm] ± 0.4 ± 1<br />
- over total length [µm] ± 5 ± 10<br />
Max. speed [mm/s] 250 250<br />
Max. acceleration [m/s 2 ] 2 2<br />
Permissible loads Fx [N] 30 30<br />
Fy [N] 100 100<br />
Fz [N] 200 200<br />
Weight [kg] 4.1 4.7<br />
Please see parameter definitions on pages 72, 73.<br />
Piezo linear motor 2 x HR-8<br />
MT 196-LM<br />
Incremental linear encoder<br />
Resolution 0.1 µm (other on request)<br />
T e c h n i c a l D a t a<br />
S p e c i f i c a t i o n<br />
Lift limitation 2 fixed stops<br />
Bearings backlash-free preloaded<br />
cross roller bearings<br />
Casing warp-proof, anodized black<br />
aluminum alloy<br />
FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007
Change language