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Feinmess Dresden catalogue - Armstrong Optical Ltd

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Open Compact-XY-Table<br />

KDT 105-PM<br />

PiezoLeg - linear motor<br />

Holding force 5 N<br />

Incremental linear encoder<br />

Resolution upto 5 nm<br />

T e c h n i c a l D a t a<br />

KDT 105-50-PM<br />

Travel [mm] 50<br />

Repeatability [counts] ± 2<br />

Deviation from<br />

straightness / flatness<br />

- over total length [µm] ± 1<br />

Max. speed [mm/s] 5<br />

Permissible loads Fx [N] 5<br />

Fy [N] 5<br />

Fz [N] 50<br />

Weight [kg] 1.6<br />

Please see parameter definitions on pages 72, 73.<br />

S p e c i f i c a t i o n<br />

Lift limitation adjustable limit switches<br />

Bearings backlash-free preloaded<br />

cross roller bearings<br />

Casing warp-proof, anodized black<br />

aluminum alloy<br />

FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007

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