Feinmess Dresden catalogue - Armstrong Optical Ltd

Technical information
for vacuum- and non-magnetic preparation
All Products used in vacuum conditions
and non-magnetic applications
are seen as customized
Solutions (FMD). That means, the
customer is directly involved in the
realisation of the project with regard
to concrete operating conditions
and purpose. The resulting
parameters are customer specific
and may differ from our standard
products.
Definitions and Measures
Low vacuum: 1 - 10 -3 Torr
High vacuum: 10 -4 -10 -7 Torr
Ultra high vacuum: >10 -8 Torr
1 Torr = 1.33322 * 10 2 Pa (Pascal)
1 T (Tesla) = 1 Vs/m 2 = 10 4 Gauß
Vacuum compatibility:
Upon request all positioning
systems are applicable to vacuum
up to 10 -1 Torr without special
preparation. The materials, lubricants,
and auxiliaries as well as
actuators are chosen
according to customers’ wishes;
they are optimized to a minimum
regarding gassing,
dielectric- and thermal stability.
Non - magnetic applications:
In general, it can be assumed that
positioning systems generate own
magnetic fields and are magnetized
by external fields; this can
influence their function. In order
to avoid this influence, two different
solutions are possible. Upon
request non-magnetic positioning
systems are manufactured.
The materials, lubricants, and
auxiliaries as well as actuators are
chosen according to customers’
wishes; the systems are optimized
to a minimum regarding self-
and external generation of magnetic
fields.
The design and manufacture of
these special components is effected
by captive standards. Meaning
that the systems are cleaned and
post-treated (baked) for the use in
high-vacuum. If required the
final assembly takes place in the
cleanroom (according DIN ISO).
For non-magnetic applications,
suitable materials for bearings and
drives are used. The main components
have a specific permeability
of 1.001. Therewith, systems can
be created having a self-magnetism
of less than 1 milli Gauss.
In close cooperation with scientific
research institutes, universities,
and companies various solutions
for positioning systems in vacuum
or as non-magnetic system have
been developed.
Examples:
Standard-Linear Stage
PMT160-100-LM-HV
This stage, derived from the standard
option for normal environments
(PMT160-...LM), is designed
for electron beam lithographyequipment.
The linear stage is
designated for an environment of
10 -8 Torr (app. 10 -6 Pa). In order to
minimize permanent and electromagnetic
influences on the ion
beam, suitable non magnetic
materials are in use.
Microstage MTS105-30-NM
Non-magnetic, compact construction
with two motors and titanium
bearings.
Standard-Linear-Aperture Stage
KDT105-50-LM-HV
This under normal conditions
approved x-y aperture stage,
KDT 105-50-LM, is mostly used in
the electron beam lithography.
Preparation for ultra-high vacuum
is possible.
FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007
Imprint
This catalogue is subjet to alteration
without notice.
The technical specifications do not
represent a warranty.
Relevant are the technical parameters
at the time of order.
In the course of technical progress the
parameters are subject to alterations.
Please ask for parameters before ordering.
Editorship: Nadine Strudel
©Feinmess Dresden GmbH, January 2007