Feinmess Dresden catalogue - Armstrong Optical Ltd

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Lifting Stages Please see parameter definitions on pages 72, 73. HT 16-LM T e c h n i c a l D a t a Piezo linear motor HR-4 (2x) no magnetic fields, no heat Incremental linear encoder Resolution 0.1 µm HT 16-LM Travel [mm] 16 Accuracy [µm] 2 Resolution [nm] 33 Vertical force/displacement ratio 1 :3 Deviation from straightness / flatness - over total length [µm] ± 2 Max. speed [mm/s] 20 Max. acceleration [mm/s 2 ] 200 Permissible loads Fz [N] 50 Weight [kg] 5.5 S p e c i f i c a t i o n Casing warp-proof, anodized black aluminum alloy FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007 picture: high vacuum stage HT 16-LM-HV
M6 (4x) M5 (4x) O p t i o n s Vacuum preparation on request Cleanroom preparation on request L1 100 50 D i m e n s i o n s 58+16 155 L2 HT 16 Size L1 Size L2 [mm] [mm] -LM 160 245 -LM-HV (High Vacuum) 154 220 FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007 70 | 71
Page 1 and 2:
precision motion-systems characteri
Page 3 and 4:
Born from special tradition of the
Page 5 and 6:
P r e c i s i o n m o t i o n - s y
Page 7 and 8:
Open Compact-XY-Table Rotary Stages
Page 9 and 10:
C h a r a c t e r i s t i c s P M T
Page 11 and 12:
M4; depth 7 (18x) 160 70 M6; depth
Page 13 and 14:
M4; depth 7 (18x) 172 70 57.2 ø25
Page 15 and 16:
188 160 O p t i o n s XY-Assembly w
Page 17 and 18:
M4; depth 7 (18x) 213 70 ø4H7; dep
Page 19 and 20: Motor type and motor size on custom
Page 21 and 22: 63 53 MT 63-25-DC 63 3-axis-system
Page 23 and 24: MT 130-50-DC 43 13 3-axis-system MP
Page 25 and 26: 30 27 L2 L3 15 MT 84-LM O p t i o n
Page 27 and 28: 25 O p t i o n s XY-Assembly withou
Page 29 and 30: O p t i o n s XY-Assembly without a
Page 31 and 32: cable option 1 O p t i o n s Option
Page 33 and 34: 30 27 17 12 O p t i o n s High vacu
Page 35 and 36: 126 86 205 20 30 25 O p t i o n s S
Page 37 and 38: O p t i o n s Stepper motor possibl
Page 39 and 40: Rotary encoder DC-motor drive 180 2
Page 41 and 42: 90 Counterbore DIN 74-Km4 (4x) 70 5
Page 43 and 44: Different hole patterns possible 10
Page 45 and 46: 380 150 O p t i o n s Resolution: u
Page 47 and 48: Clean room class available Other en
Page 49 and 50: 105 Top view (identically to bottom
Page 51 and 52: counterbore DIN 74-Km5 (4x) M6 (4x)
Page 53 and 54: Top view 61.5 Bottom view 47 D i m
Page 55 and 56: 9-pin SUB-D connector (male) (2x) O
Page 57 and 58: 41.5 41 ` 193 O p t i o n s D i m e
Page 59 and 60: O p t i o n s Can be assembled with
Page 61 and 62: M5; depth 8 (6x) O p t i o n s Mech
Page 63 and 64: 25 mm aperture on request Pattern h
Page 65 and 66: 54 ø 51.5 O p t i o n s Available
Page 67 and 68: 90 49 O p t i o n s Assembly with M
Page 69: 41.9 133 148 ST 114-DC 114 ST 129-D
Page 73 and 74: Load: As regards linear measuring t
Page 75 and 76: Fax to (+49 351) 8 85 85-25 Custome
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Feinmess Dresden catalogue - Armstrong Optical Ltd

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