Feinmess Dresden catalogue - Armstrong Optical Ltd

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Micro Stages MT 196 -100-2LM -200-2LM Travel [mm] 100 200 Accuracy [µm] 2 2 Repeatability [counts] ± 2 ± 2 Deviation from straightness / flatness - over 10 mm [µm] ± 0.4 ± 1 - over total length [µm] ± 5 ± 10 Max. speed [mm/s] 250 250 Max. acceleration [m/s 2 ] 2 2 Permissible loads Fx [N] 30 30 Fy [N] 100 100 Fz [N] 200 200 Weight [kg] 4.1 4.7 Please see parameter definitions on pages 72, 73. Piezo linear motor 2 x HR-8 MT 196-LM Incremental linear encoder Resolution 0.1 µm (other on request) T e c h n i c a l D a t a S p e c i f i c a t i o n Lift limitation 2 fixed stops Bearings backlash-free preloaded cross roller bearings Casing warp-proof, anodized black aluminum alloy FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007
O p t i o n s XY-Assembly without adapter plate 2 non contact limit switches High resolution linear encoder, resolutions up to 0.005 µm possible Glassscale for higher accuracies Cascade motors for higher forces Different hole patterns possible Different connectors possible (type, size, pin-assignment) Additional index sensor for easy referencing Vacuum and non-magnetic preparation on request (other technical data) Cleanroom preparation on request Upon request we manufacture custom tailored systems. DIN 74 - Km6 (4x) 110 43 D i m e n s i o n s 110 35 45 M5; depth 5 (12x) 61 61 61 FEINMESS DRESDEN GmbH (+49 351) 8 85 85-0 www.feinmess.de 01 |2007 28|29 196 84 84 6 6.5 180
Page 1 and 2: precision motion-systems characteri
Page 3 and 4: Born from special tradition of the
Page 5 and 6: P r e c i s i o n m o t i o n - s y
Page 7 and 8: Open Compact-XY-Table Rotary Stages
Page 9 and 10: C h a r a c t e r i s t i c s P M T
Page 11 and 12: M4; depth 7 (18x) 160 70 M6; depth
Page 13 and 14: M4; depth 7 (18x) 172 70 57.2 ø25
Page 15 and 16: 188 160 O p t i o n s XY-Assembly w
Page 17 and 18: M4; depth 7 (18x) 213 70 ø4H7; dep
Page 19 and 20: Motor type and motor size on custom
Page 21 and 22: 63 53 MT 63-25-DC 63 3-axis-system
Page 23 and 24: MT 130-50-DC 43 13 3-axis-system MP
Page 25 and 26: 30 27 L2 L3 15 MT 84-LM O p t i o n
Page 27: 25 O p t i o n s XY-Assembly withou
Page 31 and 32: cable option 1 O p t i o n s Option
Page 33 and 34: 30 27 17 12 O p t i o n s High vacu
Page 35 and 36: 126 86 205 20 30 25 O p t i o n s S
Page 37 and 38: O p t i o n s Stepper motor possibl
Page 39 and 40: Rotary encoder DC-motor drive 180 2
Page 41 and 42: 90 Counterbore DIN 74-Km4 (4x) 70 5
Page 43 and 44: Different hole patterns possible 10
Page 45 and 46: 380 150 O p t i o n s Resolution: u
Page 47 and 48: Clean room class available Other en
Page 49 and 50: 105 Top view (identically to bottom
Page 51 and 52: counterbore DIN 74-Km5 (4x) M6 (4x)
Page 53 and 54: Top view 61.5 Bottom view 47 D i m
Page 55 and 56: 9-pin SUB-D connector (male) (2x) O
Page 57 and 58: 41.5 41 ` 193 O p t i o n s D i m e
Page 59 and 60: O p t i o n s Can be assembled with
Page 61 and 62: M5; depth 8 (6x) O p t i o n s Mech
Page 63 and 64: 25 mm aperture on request Pattern h
Page 65 and 66: 54 ø 51.5 O p t i o n s Available
Page 67 and 68: 90 49 O p t i o n s Assembly with M
Page 69 and 70: 41.9 133 148 ST 114-DC 114 ST 129-D
Page 71 and 72: M6 (4x) M5 (4x) O p t i o n s Vacuu
Page 73 and 74: Load: As regards linear measuring t
Page 75 and 76: Fax to (+49 351) 8 85 85-25 Custome

Feinmess Dresden catalogue - Armstrong Optical Ltd

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