SINGULUS V Metallizer - Singulus Technologies AG

SINGULUS V Metallizer
High Performance Optical Disc Sputtering
CD CD-R
DVD
DVD± R

SINGULUS V Metallizer
| CD | CD-R | DVD | DVD ± R
SINGULUS TECHNOLOGIES is one of
the few companies in the world with a
core competency in metallization
of optical discs. The company has
developed a new generation of
metallizers: The SINGULUS V.
The new metallizer serves for all major
areas of optical disc replication, such
as CD, CD-ROM, CD-R, DVD± R and all
prerecorded DVD formats.
Continuous improvements have been
made to the metallizers since their
introduction to the market and they
are now more compact and faster
than ever. The range of SINGULUS
metallizers today is able to address all
major applications. The experience
gained from more than 3500 machines
built has led to the improvement of
numerous details in the existing family.
SINGULUS TECHNOLOGIES latest
metallizer features compact size and
user-friendly operation. It is specially
designed for easy and fast integration
into any replication line. With high
yields and high reliability, the system
continues the SINGULUS metallizer
legacy. The SINGULUS V is equipped
with an entirely new drive technology,
featuring servo drives only for disc
handling and transport.
The new metallizer is a true turnkey
system with the smallest footprint
ever. It has a built-in power supply.
The controls have been further reduced
in size and are an integrated part of
the machine.
A 10”- touch screen human interface,
coupled with a PC, facilitates easy
operation of the unit. It controls all
sputter processes as well as the
optional Layer Thickness Measurement
Device TMD 02.
The entirely new designed vacuum
pumping system provides extraordinary
short pumpdown time.
The machine has the shortest
installation period in the market. Two
SINGULUS V Smart systems for DVD
can be installed directly adjacent to
each other. The offered processes
include all commonly used materials
for discs including aluminum, gold,
silicon, and silver.
Main Features
n Performs all optical disc coating
applications, based on a modular
system configuration
n The entire designed concept allows
easiest integration into any
replication line
n Smallest machine on the market,
with a 0.4 sqm footprint
n All mechanical and electrical
components are contained within
the machine frame
n Simplified loading/unloading of the
machine due to independant vertical
movement of the handling arm
n The fully integrated TMD 02
layer thickness measuring device
is available as an option
The Focus Cathode
The Focus Cathode serves for high
deposition efficiency of sputtered
material onto the disc. Therefore,
the target utilization and the power
efficiency are remarkably high: a
15 kW power supply is sufficient for
1.5 second machine cycle time. The
Focus Cathode allows a yet unmatched
targetlife of 200,000 discs at 55 nm
layer thickness. The 2.5 second version
is equipped with an 8 kW power supply.
The SMART CATHODE ®
The metallizers for DVD, CD-R and
DVD ±
R are equipped with the unique
and patented SMART CATHODE and
a process control system for the
deposition of various target materials,
such as aluminum, silver, gold or
silicon, with high uniformity. In
addition to the permanent magnetic
field a variable magnetic field created
by electromagnets is superimposed.
Electrically powered coils are located
at the rear of the target.

Main Characteristics of the
Smart Cathode ®
n Planar targets are used
n Optimization for target utilization
or layer thickness uniformity
n 2 step metallization from OD to ID,
the deposition of each step is
monitored and controlled by an
"energy mode"
n Automatic optimization of layer
distribution for different target
material, on-line during production,
without hardware change other
than the target itself
n Static masks (no particles created
by mask handling) for trouble free
production
n Capable to sputter all suitable
material without hardware change
(Au/Si/Ag/Ag alloy/Al)
n Layers designed to your process
needs
n Maximized target utilization for
the requested layer
Options: TMD 02
Inline Layer Thickness Measuring and
Closed Loop Sputter-Control for DVD
The TMD 02 is specially designed to
measure the layer thickness and layer
uniformity of each sputter coated
DVD half, directly after the sputtering
chamber. The TMD unit is installed
onto the machine body. The disc is
driven through the measuring device
by the integrated wireless connected
handling arm.
The layer thickness distribution
of each disc is displayed at the Touch
Screen Operation Panel, and different
thickness profiles as well as the
tolerances can be pre-set. A closed
loop control system uses the measured
thickness distribution to control the
sputter characteristics of the SMART
CATHODE ® .
Wireless Transmission Device
The SINGULUS V is equipped with a
newly designed servo-driven handling
arm. A new wireless electronic signal
transmission device that is attached
to the handling drive is available as
an option. This wireless transmission
principle allows reliable and wear-free
control of the handling grippers and
sensors.
This system is particularly advantageous
when combined with the abovereferenced
TMD 02. Since the handling
arm continuously rotates in a single
direction, every disc can be measured
by the TMD 02.

04/2003-Metacom-2 Printed in Germany - Technical alterations reserved
Typical Process Characteristics
Purpose Sputtering Typical layer thickness No. of discs per target Layer thickness
material nm uniformity
CD/CD-ROM Al 55 200,000 ± 8 %
CD-R Au 70 70,000 ± 5 %
Ag 60 160,000 ± 8 %
DVD± R Ag / Ag Alloy 100 100,000 ± 8 %
Ag / Ag Alloy 100 50,000 ± 4 %
DVD Si 17 180,000 ± 1,5 %
Au 14 300,000 ± 1,5 %
France: SINGULUS TECHNOLOGIES France
Tel.: +33-47-5 86 09 54, Fax: +33-47-5 86 09 55
e-mail: singulus@club-internet.fr
Great Britain: SINGULUS TECHNOLOGIES UK Ltd.
Tel.: +44-1793-78 42 00, Fax: +44-17 93-78 42 22
e-mail: singulus_uk@msn.com
Italy: SINGULUS TECHNOLOGIES Italia s.r.l.
Tel.: +39-071-7 93 03 12, Fax: +39-071-7 93 08 21
e-mail: singulus.italia@fastnet.it
Latin America: SINGULUS TECHNOLOGIES Ltda. Latin America
Tel.: +55-11-36 41 01 13, Fax: +55-11-36 41 14 46
e-mail: latinamerica@singulus.com.br
Ag Alloy 9 (layer 0 / Al for layer 1) 400,000 ± 1,5 %
Al 50 (layer 1) 100,000 ± 5 %
Technical Data SINGULUS V Metallizer
SINGULUS V Focus 1 with Focus Cathode and 1 Turbo Molecular Pump
for CD with a cycle time of 2.5 s
SINGULUS V Focus 2 with Focus Cathode and 2 Turbo Molecular Pumps
for CD with a cycle time of 1.5 s
SINGULUS V Smart 1 with SMART CATHODE® and 1 Turbo Molecular Pump
for CD-R, DVD±R and DVD with a cycle time of 2.5 s
SINGULUS V Smart 2 with SMART CATHODE ® and 2 Turbo Molecular Pumps
for CD-R, DVD±R and DVD with a cycle time of 1.5 s
Singapore: SINGULUS TECHNOLOGIES Asia Pacific
Tel.: +65-67 41 19 12, Fax: +65-67 41 12 13
e-mail: singulus@singnet.com.sg
Spain: SINGULUS TECHNOLOGIES Iberica
Tel.: +34-93-6 75 00 25, Fax: +34-93-5 90 64 26
e-mail: singulus@singulus-iberica.com
United States and Canada:
SINGULUS TECHNOLOGIES Inc.
Tel.: +1-860-6 83 80 00, Fax: +1-860-6 83 80 10
e-mail: sales@singulus.com
West-Coast Office:
SINGULUS TECHNOLOGIES Inc.
Tel.: +1-805-3 73 62 16, Fax: +1-805-3 71 74 33
e-mail: sales@singulus.com
Headquarters:
SINGULUS TECHNOLOGIES AG
Hanauer Landstrasse 103
D - 63796 Kahl
Tel.: +49 [0]61 88-440-0
Fax: +49 [0]61 88-440-110
e-mail: sales@singulus.de
Internet: www.singulus.de