Fred L. Terry, Jr., ICSE-3, Vienna, Austria - University of Michigan

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Trapezoidal Fit 400-825 nm Fred L. Terry, Jr., ICSE-3, Vienna, Austria, July 7, 2003 16
Trapezoidal Fit Fred L. Terry, Jr., ICSE-3, Vienna, Austria, July 7, 2003 17
Page 1 and 2: Spectroscopic Ellipsometry and Refl
Page 3 and 4: Goals & Background • Nondestructi
Page 5 and 6: Background II Single Wavelength Sca
Page 7 and 8: Rigorous Coupled-Wave Analysis Meth
Page 9 and 10: ε 1(λ) Λ Grating ⇔ Anisotropic
Page 11 and 12: Topography Extraction Example W>λ
Page 13 and 14: alpha, beta Near Normal SE for RIE
Page 15: Fred L. Terry, Jr., ICSE-3, Vienna,
Page 19 and 20: Triangle-Trapezoid-Rectangle Fit Fr
Page 21 and 22: Extracted Topography Comparison Fre
Page 23 and 24: In Situ Measurements: Real-Time Mon
Page 25 and 26: Real-Time Ellipsometry Pararmeters
Page 27 and 28: • Lam 9400 TCP Etcher • O 2 Pla
Page 29 and 30: Fred L. Terry, Jr., ICSE-3, Vienna,
Page 35 and 36: In Situ Optical CD/Automated Etch t
Page 43 and 44: Limitations & Challenges Fred L. Te
Page 47 and 48: Cruelty of Diffraction Physics: W/
Page 49 and 50: nm 120 100 80 60 40 20 Simulated ~4
Page 51 and 52: d 3 β/dλ 3 x 10-4 6 4 2 0 -2 -4 -
Page 53 and 54: Conclusions & Challenges • Spectr
Page 55: • Collabators: Acknowledgements -

Fred L. Terry, Jr., ICSE-3, Vienna, Austria - University of Michigan

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