Oerlikon Balzers Coating – global leader in advanced ... - VeMet
Oerlikon Balzers Coating – global leader in advanced ... - VeMet
Oerlikon Balzers Coating – global leader in advanced ... - VeMet
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Ionplat<strong>in</strong>g-process<br />
C.B6.04 (0204) e<br />
Argon<br />
Substrat<br />
e<br />
Crucible (Anode)<br />
< 500°C<br />
Hot filament cathode<br />
<strong>Coat<strong>in</strong>g</strong> material<br />
Reactive gas<br />
Substrates<br />
Low voltage<br />
arc discharge<br />
Vacuum pump
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