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Oerlikon Balzers Coating – global leader in advanced ... - VeMet

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Enhanced Sputter-process<br />

C.B6.02 (0304) e<br />

Argon<br />

< 250°C<br />

Substrates<br />

Hot filament cathode<br />

Auxiliary anode Low voltage arc discharge<br />

Reactive gas<br />

Planar Magnetron-<br />

Sputter<strong>in</strong>g source<br />

(coat<strong>in</strong>g material)<br />

Vacuum pump

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