Oerlikon Balzers Coating – global leader in advanced ... - VeMet
Oerlikon Balzers Coating – global leader in advanced ... - VeMet
Oerlikon Balzers Coating – global leader in advanced ... - VeMet
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
Enhanced Sputter-process<br />
C.B6.02 (0304) e<br />
Argon<br />
< 250°C<br />
Substrates<br />
Hot filament cathode<br />
Auxiliary anode Low voltage arc discharge<br />
Reactive gas<br />
Planar Magnetron-<br />
Sputter<strong>in</strong>g source<br />
(coat<strong>in</strong>g material)<br />
Vacuum pump