SC7640 Auto/Manual High Resolution Sputter Coater Operating ...

OM-SC7640 Description
4.6.2 SC7640 Rear Panel Connections
The connection points and other components mounted on the rear panel of the SC7640 Sputter
Coater are described below and identified in Figure 4.4 and described in Table 4.2.
The rear panel, includes the necessary fuses F1-F4, the HT outlet which is connected to the sputter
head, the vacuum interlock socket for the sputter head (which prevent the operation of the HV
power supply without vacuum being applied to the head), the Mains ON/OFF switch, the rotary
pump socket, argon gas inlet nipple, and the ground (earthing) terminal for the sputter head. There
are two 4mm sockets which enables the user to measure the actual voltage being applied to the
head using a standard DVM in a ratio of 10,000:1 (i.e. 100mV = 1000V).
Figure 4.4 – SC7640 Sputter Coater, Rear Panel Connections.
CONNECTION DESCRIPTION
MOTOR This toggle switch sets the rotating sample stage motor ON/OFF, when set down the
motor is ON. On systems not equipped with a Rotary Planetary Stage (RC7606),
this switch has no effect.
FTM A six way DIN socket provides for the connection of the controlling function of the
Film Thickness Monitor (FT7690).
XTAL This BNC fixed socket provides a connection point to the FTM oscillator and
internally to the crystal holder stage (FT7607).
GAS
A 3 mm nipple provides the gas (argon) input connection point.
DVM+/- Two sockets provide for the connection of a Digital Voltmeter Meter to enable an
accurate measurement of the HT voltage.
(DVM output 1 volt = 10 kV dc).
HT High voltage socket, connects a negative supply to the cathode mounted in the top
plate assembly.
VACUUM A 20 mm vacuum hose connection point, connects to the vacuum pump.
F1 Rotary Pump fuse, (240 Volt, 10 Amp), (110 Volt, 15 Amp).
F2 Main supply fuse, (240 Volt, 1 Amp), (110 Volt, 2 Amp).
F3 HT fuse, 630 mA.
F4 Pirani timer supply fuse, 2 Amp.
I/LOCK A three way socket connects the top plate pressure switch to the control unit.
POWER ON/OFF A vertically operated rocker switch acts as a mains isolator.
POWER IN A flying lead provides the connection of power to the system.
ROTARY PUMP A three way mains outlet socket provides power to the rotary pump.
GROUND Earth connecting point, from the top plate assembly.
WATER Inlet and outlet connections for cooling water supplies. On systems not equipped
with water cooling, panel cut-outs are fitted with blind grommets.
Table 4.2 – SC7640 Rear Panel Components
Issue 1 19 SC7640 Sputter Coater