A six-wafer combustion system for a silicon micro gas turbine engine ...

526 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 9, NO. 4, DECEMBER 2000
REFERENCES
[1] Epstein et al., “Power MEMS and microengines,” in IEEE Conf. Solid
State Sensors Actuators, Chicago, IL, 1997.
[2] , “Micro-heat engines, gas turbines, and rocket engines,” in 28th
AIAA Fluid Dyn. Conf. 4th AIAA Shear Flow Contr. Conf., Snowmass
Village, CO, 1997.
[3] C. Groshenry, “Preliminary study of a micro-gas turbine engine,” S.M.
thesis, Mass. Inst. Technol., Cambridge, 1995.
[4] Waitz et al., “Combustors for micro-gas turbine engines,” ASME J.
Fluids Eng., vol. 120, Mar. 1998.
[5] A. Mehra and I. A. Waitz, “Development of a hydrogen combustor for
a microfabricated gas turbine engine,” in Solid-State Sensor Actuator
Workshop, Hilton Head, SC, 1998.
[6] A. Mehra et al., “Microfabrication of high temperature silicon devices
using wafer bonding and deep reactive ion etching,” IEEE/ASME J. Microelectromech.
Syst., vol. 8, June 1999.
[7] K.-S. Chen, “Materials characterization and structural design of ceramic
micro turbomachinery,” Ph.D. dissertation, Mass. Inst. Technol., Cambridge,
1999.
[8] A. Mehra, “Development of a high power sensity combustion system
for a silicon micro gas turbine engine,” Ph.D. dissertation, Mass. Inst.
Technol., Cambridge, 2000.
[9] J. A. Schetz, “Injection and mixing in turbulent flow,” AIAA Prog. Aeronaut.
Astronaut., vol. 68, 1980.
[10] Ayón et al., “Characterization of a time multiplexed inductively coupled
plasma etcher,” J. Electrochem. Soc., vol. 146, no. 1, Jan. 1999.
[11] W. Kern and D. A. Puotinen, “Cleaning solutions based on hydrogen
peroxide for use in silicon semiconductor technology,” RCA Rev., vol.
31, pp. 187–206, 1970.
[12] A. P. London, “Development and test of a microfabricated bipropellant
rocket engine,” Ph.D. dissertation, Dept. Aeronaut. Astronaut., Mass.
Inst. Technol., Cambridge, 2000.
[13] P. Coffee et al., “The overall reaction concept in premixed, laminar,
steady-state flames. I. Stoichiometries,” Combust. Flame, vol. 54, pp.
155–169, 1983.
[14] K. K. Kuo, Principles of Combustion. New York: Wiley, 1986.
Amit Mehra received the B.S. degree in engineering
and applied science from the California Institute of
Technology, Pasadena, in June 1995. He received the
S.M. and Ph.D. degrees in aeronautics and astronautics
from the Massachusetts Institute of Technology,
Cambridge, in June 1997 and January 2000, respectively.
His areas of research include turbomachinery
fluid dynamics, combustion, and MEMS. He is currently
working for a strategy consulting firm in Washington,
D.C.
Dr. Mehra is a Member of the American Society of
Mechanical Engineers, the American Institute of Aeronautics and Astronautics,
the Tau Beta Pi National Engineering Honor Society, and the Sigma Xi National
Research Society.
Xin Zhang (M’99) received the B.S. and M.S.
degrees in materials science and engineering from
Northeastern University, Shenyang, China, in 1991
and 1994, respectively. She received the Ph.D.
degree in mechanical engineering from Hong Kong
University of Science and Technology, Hong Kong,
in 1998. Her Ph.D. research focused on residual
stress and mechanical properties of thin films for
MEMS applications.
Since 1998, she has been with the Massachusetts
Institute of Technology, Cambridge, where she is
currently a Research Scientist with the Microsystems Technology Laboratories.
Her research interests are in MEMS, especially the advanced microfabrication
technologies for realization of micromachined turbine engines, and the issues
related to materials science and engineering, including materials science in
MEMS, new materials for MEMS, and reliability of MEMS.
Dr. Zhang is a Member of the IEEE Electron Devices Society, the Materials
Research Society, the Electrochemical Society, and the American Vacuum Society.
Arturo A. Ayón (M’95) was born in Navojoa,
Mexico, on July 17, 1958. He received the B.S. degree
in electronic engineering from the Universidad
de Guadalajara, Guadalajara, Mexico in 1983 and
the Ph.D degree in nuclear science and engineering
from Cornell University, Ithaca, NY, in 1996.
Beginning in 1983, based in Rochester, MN,
he served as engineering liaison between the IBM
manufacturing plant in Mexico and the IBM development
plant in the United States. In 1985, he was
appointed Manufacturing and Quality Engineering
Manager and moved to Mexico to oversee the operation of the newly installed
manufacturing lines for computer systems. In 1986, he started a marketing and
distribution center for plastic commodities in Guadalajara. He later sold this
operation to return to graduate school. In 1996, he joined the Massachusetts
Institute of Technology (MIT), Cambridge, where he actively participated in
the emerging field of power MEMS. That effort involved the development
and microfabrication of turbomachinery, microrockets, and power generation
devices. During his commitment at MIT, he was extensively involved with
deep reactive ion etching of silicon, thin-film characterization, and wafer
bonding. He is currently MEMS business Development Manager at the Sony
semiconductor facility, San Antonio, TX.
Dr. Ayón is a Member of the American Vacuum Society, the Electrochemical
Society, and the IEEE Electron Devices Society.
Ian A. Waitz received the B.S. degree in aerospace
engineering from Pennsylvania State University,
State College, in 1986, the M.S. degree in aeronautics
from Joint Institute for Advancement of Flight
Sciences, NASA Langley Research Center, George
Washington University, Hampton, VA, in 1988, and
the Ph.D. degree in aeronautics from the California
Institute of Technology, Pasadena, in 1991.
He is an Associate Professor of Aeronautics
and Astronautics at the Massachusetts Institute
of Technology (MIT), Cambridge, where he is
Associate Director of the MIT Gas Turbine Laboratory, Director of the
Aero-Environmental Research Laboratory, and the Raymond L. Bisplinghoff
Faculty Fellow. His principal fields of interest include propulsion; fluid
mechanics; thermodynamics; reacting flows; aeroacoustics; and, in particular,
aspects of the above that relate to environmental issues associated with aircraft
design and operation. He has written approximately 50 technical publications
on these topics, holds two patents, and has served as a consultant for 20
different organizations and as an Associate Editor of the AIAA Journal of
Propulsion and Power.
Dr. Waitz is an Associate Fellow of the AIAA, a Member of ASME and
ASEE, and currently teaches graduate and undergraduate courses in the fields of
thermodynamics and energy conversion, propulsion, fluid mechanics, and environmental
effects of aircraft.
Martin A. Schmidt is a Professor of Electrical
Engineering with the Department of Electrical Engineering
and Computer Science, the Massachusetts
Institute of Technology (MIT), Cambridge. He
is also Director of the Microsystems Technology
Laboratory at MIT. His research interests are
microfabrication of sensors, actuators, and electronic
devices, MEMS, the design of micromechanical
sensors, and actuator microfabrication technology.
He investigates microfabrication technologies for
integrated circuits, sensors, and actuators; the design
of micromechanical sensor and actuator systems; mechanical properties of
microelectronic materials, with emphasis on silicon wafer bonding technology;
integrated microsensors; and microfluidic devices. His current research
projects involve novel applications of MEMS technologies to a variety of fields,
including miniature gas turbines, miniature chemical reactors, microswitches,
biological applications, and sensors monolithically integrated with electronics.