526 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 9, NO. 4, DECEMBER 2000 REFERENCES [1] Epstein et al., “Power MEMS and <strong>micro</strong><strong>engine</strong>s,” in IEEE Conf. Solid State Sensors Actuators, Chicago, IL, 1997. [2] , “Micro-heat <strong>engine</strong>s, <strong>gas</strong> <strong>turbine</strong>s, and rocket <strong>engine</strong>s,” in 28th AIAA Fluid Dyn. Conf. 4th AIAA Shear Flow Contr. Conf., Snowmass Village, CO, 1997. [3] C. Groshenry, “Preliminary study of a <strong>micro</strong>-<strong>gas</strong> <strong>turbine</strong> <strong>engine</strong>,” S.M. thesis, Mass. Inst. Technol., Cambridge, 1995. [4] Waitz et al., “Combustors <strong>for</strong> <strong>micro</strong>-<strong>gas</strong> <strong>turbine</strong> <strong>engine</strong>s,” ASME J. Fluids Eng., vol. 120, Mar. 1998. [5] A. Mehra and I. A. Waitz, “Development of a hydrogen combustor <strong>for</strong> a <strong>micro</strong>fabricated <strong>gas</strong> <strong>turbine</strong> <strong>engine</strong>,” in Solid-State Sensor Actuator Workshop, Hilton Head, SC, 1998. [6] A. Mehra et al., “Microfabrication of high temperature <strong>silicon</strong> devices using <strong>wafer</strong> bonding and deep reactive ion etching,” IEEE/ASME J. Microelectromech. Syst., vol. 8, June 1999. [7] K.-S. Chen, “Materials characterization and structural design of ceramic <strong>micro</strong> turbomachinery,” Ph.D. dissertation, Mass. Inst. Technol., Cambridge, 1999. [8] A. Mehra, “Development of a high power sensity <strong>combustion</strong> <strong>system</strong> <strong>for</strong> a <strong>silicon</strong> <strong>micro</strong> <strong>gas</strong> <strong>turbine</strong> <strong>engine</strong>,” Ph.D. dissertation, Mass. Inst. Technol., Cambridge, 2000. [9] J. A. Schetz, “Injection and mixing in turbulent flow,” AIAA Prog. Aeronaut. Astronaut., vol. 68, 1980. [10] Ayón et al., “Characterization of a time multiplexed inductively coupled plasma etcher,” J. Electrochem. Soc., vol. 146, no. 1, Jan. 1999. [11] W. Kern and D. A. Puotinen, “Cleaning solutions based on hydrogen peroxide <strong>for</strong> use in <strong>silicon</strong> semiconductor technology,” RCA Rev., vol. 31, pp. 187–206, 1970. [12] A. P. London, “Development and test of a <strong>micro</strong>fabricated bipropellant rocket <strong>engine</strong>,” Ph.D. dissertation, Dept. Aeronaut. Astronaut., Mass. Inst. Technol., Cambridge, 2000. [13] P. Coffee et al., “The overall reaction concept in premixed, laminar, steady-state flames. I. Stoichiometries,” Combust. Flame, vol. 54, pp. 155–169, 1983. [14] K. K. Kuo, Principles of Combustion. New York: Wiley, 1986. Amit Mehra received the B.S. degree in <strong>engine</strong>ering and applied science from the Cali<strong>for</strong>nia Institute of Technology, Pasadena, in June 1995. He received the S.M. and Ph.D. degrees in aeronautics and astronautics from the Massachusetts Institute of Technology, Cambridge, in June 1997 and January 2000, respectively. His areas of research include turbomachinery fluid dynamics, <strong>combustion</strong>, and MEMS. He is currently working <strong>for</strong> a strategy consulting firm in Washington, D.C. Dr. Mehra is a Member of the American Society of Mechanical Engineers, the American Institute of Aeronautics and Astronautics, the Tau Beta Pi National Engineering Honor Society, and the Sigma Xi National Research Society. Xin Zhang (M’99) received the B.S. and M.S. degrees in materials science and <strong>engine</strong>ering from Northeastern University, Shenyang, China, in 1991 and 1994, respectively. She received the Ph.D. degree in mechanical <strong>engine</strong>ering from Hong Kong University of Science and Technology, Hong Kong, in 1998. Her Ph.D. research focused on residual stress and mechanical properties of thin films <strong>for</strong> MEMS applications. Since 1998, she has been with the Massachusetts Institute of Technology, Cambridge, where she is currently a Research Scientist with the Micro<strong>system</strong>s Technology Laboratories. Her research interests are in MEMS, especially the advanced <strong>micro</strong>fabrication technologies <strong>for</strong> realization of <strong>micro</strong>machined <strong>turbine</strong> <strong>engine</strong>s, and the issues related to materials science and <strong>engine</strong>ering, including materials science in MEMS, new materials <strong>for</strong> MEMS, and reliability of MEMS. Dr. Zhang is a Member of the IEEE Electron Devices Society, the Materials Research Society, the Electrochemical Society, and the American Vacuum Society. Arturo A. Ayón (M’95) was born in Navojoa, Mexico, on July 17, 1958. He received the B.S. degree in electronic <strong>engine</strong>ering from the Universidad de Guadalajara, Guadalajara, Mexico in 1983 and the Ph.D degree in nuclear science and <strong>engine</strong>ering from Cornell University, Ithaca, NY, in 1996. Beginning in 1983, based in Rochester, MN, he served as <strong>engine</strong>ering liaison between the IBM manufacturing plant in Mexico and the IBM development plant in the United States. In 1985, he was appointed Manufacturing and Quality Engineering Manager and moved to Mexico to oversee the operation of the newly installed manufacturing lines <strong>for</strong> computer <strong>system</strong>s. In 1986, he started a marketing and distribution center <strong>for</strong> plastic commodities in Guadalajara. He later sold this operation to return to graduate school. In 1996, he joined the Massachusetts Institute of Technology (MIT), Cambridge, where he actively participated in the emerging field of power MEMS. That ef<strong>for</strong>t involved the development and <strong>micro</strong>fabrication of turbomachinery, <strong>micro</strong>rockets, and power generation devices. During his commitment at MIT, he was extensively involved with deep reactive ion etching of <strong>silicon</strong>, thin-film characterization, and <strong>wafer</strong> bonding. He is currently MEMS business Development Manager at the Sony semiconductor facility, San Antonio, TX. Dr. Ayón is a Member of the American Vacuum Society, the Electrochemical Society, and the IEEE Electron Devices Society. Ian A. Waitz received the B.S. degree in aerospace <strong>engine</strong>ering from Pennsylvania State University, State College, in 1986, the M.S. degree in aeronautics from Joint Institute <strong>for</strong> Advancement of Flight Sciences, NASA Langley Research Center, George Washington University, Hampton, VA, in 1988, and the Ph.D. degree in aeronautics from the Cali<strong>for</strong>nia Institute of Technology, Pasadena, in 1991. He is an Associate Professor of Aeronautics and Astronautics at the Massachusetts Institute of Technology (MIT), Cambridge, where he is Associate Director of the MIT Gas Turbine Laboratory, Director of the Aero-Environmental Research Laboratory, and the Raymond L. Bisplinghoff Faculty Fellow. His principal fields of interest include propulsion; fluid mechanics; thermodynamics; reacting flows; aeroacoustics; and, in particular, aspects of the above that relate to environmental issues associated with aircraft design and operation. He has written approximately 50 technical publications on these topics, holds two patents, and has served as a consultant <strong>for</strong> 20 different organizations and as an Associate Editor of the AIAA Journal of Propulsion and Power. Dr. Waitz is an Associate Fellow of the AIAA, a Member of ASME and ASEE, and currently teaches graduate and undergraduate courses in the fields of thermodynamics and energy conversion, propulsion, fluid mechanics, and environmental effects of aircraft. Martin A. Schmidt is a Professor of Electrical Engineering with the Department of Electrical Engineering and Computer Science, the Massachusetts Institute of Technology (MIT), Cambridge. He is also Director of the Micro<strong>system</strong>s Technology Laboratory at MIT. His research interests are <strong>micro</strong>fabrication of sensors, actuators, and electronic devices, MEMS, the design of <strong>micro</strong>mechanical sensors, and actuator <strong>micro</strong>fabrication technology. He investigates <strong>micro</strong>fabrication technologies <strong>for</strong> integrated circuits, sensors, and actuators; the design of <strong>micro</strong>mechanical sensor and actuator <strong>system</strong>s; mechanical properties of <strong>micro</strong>electronic materials, with emphasis on <strong>silicon</strong> <strong>wafer</strong> bonding technology; integrated <strong>micro</strong>sensors; and <strong>micro</strong>fluidic devices. His current research projects involve novel applications of MEMS technologies to a variety of fields, including miniature <strong>gas</strong> <strong>turbine</strong>s, miniature chemical reactors, <strong>micro</strong>switches, biological applications, and sensors monolithically integrated with electronics.
MEHRA et al.: 6-WAFER COMBUSTION SYSTEM FOR A SILICON MICRO GAS TURBINE ENGINE 527 Christopher M. Spadaccini received the B.S. and M.S. degrees from the Department of Aeronautics and Astronautics, Massachusetts Institute of Technology (MIT), Cambridge, in 1997 and 1999, respectively. He is a graduate research assistant and is pursuing the Ph.D. degree with the MIT Gas Turbine Laboratory. His current research involves the development of a hydrocarbon-fueled <strong>micro</strong>scale <strong>combustion</strong> <strong>system</strong> <strong>for</strong> a <strong>micro</strong> <strong>gas</strong> <strong>turbine</strong> <strong>engine</strong>. His research interests in the MEMS field include <strong>micro</strong>fluidics, <strong>combustion</strong> at the <strong>micro</strong>-scale, and high-speed <strong>micro</strong>-turbomachinery. Other areas of interest are aero-propulsion, fluid mechanics, reacting flows, thermodynamics and heat transfer, and shortduration turbomachinery testing. Mr. Spadaccini is a member of the American Society of Mechanical Engineers, the American Institute of Aeronautics and Astronautics, and the Sigma Xi National Research Society.
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