EFM Evaporators - FOCUS GmbH
EFM Evaporators - FOCUS GmbH
EFM Evaporators - FOCUS GmbH
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How to contact us<br />
Headquarters:<br />
Omicron NanoTechnology <strong>GmbH</strong><br />
Limburger Str. 75<br />
65232 Taunusstein, Germany<br />
Tel. +49 (0) 61 28 / 987 - 0<br />
Fax +49 (0) 61 28 / 987 - 185<br />
Web: www.omicron.de<br />
e-mail: info@omicron.de<br />
We have agents and partners<br />
worldwide – please check our<br />
website to find your nearest contact.<br />
Omicron NanoTechnology is part<br />
of the Oxford Instruments Group.<br />
For more information:<br />
www.oxford-instruments.com<br />
or just send us an e-mail:<br />
info.plc@oxinst.com<br />
Evaporator Conditions<br />
Ion FLux [nA]<br />
Ion Flux [nA]<br />
Mo rod 2 mm diameter<br />
70 mA emission emission.<br />
ca. about 700V 700 V<br />
stabilised flux<br />
stabilised flux Flux setpoint<br />
changed to 94 nA<br />
Time [s]<br />
Minneapolis Pittsburgh East Grinstead Linköping Moscow Poznan<br />
Denver<br />
<strong>EFM</strong> 3: Flat top diameter 10 mm<br />
(Nozzle - sample distance 90 mm,<br />
Mo-crucible 8 mm diameter)<br />
<strong>EFM</strong> 4: Flat top diameter 36 mm<br />
(Nozzle - sample distance 90 mm,<br />
Mo-crucible 8 mm diameter)<br />
<strong>EFM</strong> 6: Flat top diameter 50 mm,<br />
(Nozzle - sample distance 40 mm,<br />
Mo-crucible XXXL)<br />
Madrid<br />
Stable conditions:<br />
The EVC 300 flux monitoring<br />
system provides<br />
precise control of the<br />
evaporant flux. The<br />
regulation parameters<br />
can be adjusted<br />
to ensure excellent<br />
response even with<br />
rapid changes of the<br />
flux setting as demonstrated<br />
here.<br />
Crucible tempertaures [°C] Beam diameter [mm]<br />
St. Cannat Rome Bucharest<br />
50<br />
50<br />
40<br />
40<br />
30<br />
30<br />
20<br />
20<br />
10<br />
10<br />
2000<br />
2000<br />
1500<br />
1500<br />
1000<br />
<strong>EFM</strong> 4<br />
<strong>EFM</strong> 4<br />
19 mm aperture<br />
19 mm aperture<br />
14 mm aperture<br />
10 mm aperture<br />
14 mm aperture<br />
5 mm aperture<br />
4 mm aperture<br />
3<br />
5<br />
mm<br />
mm<br />
aperture<br />
aperture<br />
4 mm aperture<br />
3 mm aperture<br />
10 mm aperture<br />
<strong>EFM</strong> 3<br />
7.5 mm aperture<br />
6 mm aperture<br />
4 mm aperture<br />
Triple <strong>EFM</strong><br />
0 50 100 150 200 250 300<br />
0 50 100 150 200 250 300<br />
600 V High voltage<br />
800 V<br />
1000 600 V VHigh<br />
voltage<br />
800 V<br />
1000 V<br />
<strong>EFM</strong> 3<br />
7.5 mm aperture<br />
6 mm aperture<br />
4 mm aperture<br />
Triple <strong>EFM</strong><br />
small<br />
medium<br />
small<br />
medium large<br />
large<br />
10000<br />
50 100 150 200 250 300<br />
Spot diameter (FWHM)<br />
[mm]<br />
0 50 100 150 200 250 300<br />
50<br />
10<br />
0<br />
Nozzle-sample distance [mm]<br />
Heating power [W]<br />
0 10 50 100<br />
Working distance [mm]<br />
broad spot<br />
(40W)<br />
fine spot<br />
(80W)<br />
Beijing<br />
Seoul<br />
Tokyo<br />
Taipei<br />
Mumbai<br />
Singapore<br />
Sales<br />
Sales & Service<br />
Melbourne Headquarters<br />
Deposition area<br />
as a function of<br />
distance for three<br />
different aperture<br />
sizes for <strong>EFM</strong> 3,<br />
<strong>EFM</strong> 4 and Triple<br />
<strong>EFM</strong>.<br />
Crucible temperatures<br />
for<br />
different crucible<br />
sizes with three<br />
typical e-beam<br />
energies. For this<br />
measurement<br />
Mo-crucibles<br />
were used.<br />
Spot size as<br />
a function of<br />
working distance<br />
and for different<br />
heating power<br />
settings for the<br />
<strong>EFM</strong>-H.<br />
<strong>EFM</strong> 701-V05/Mar12<br />
Printed by Druckerei und Verlag Klaus Koch <strong>GmbH</strong>
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