Praxair Chemax Semiconductor Materials Taiwan

Praxair Chemax
Semiconductor Materials Taiwan
Praxair Chemax Semiconductor
Materials (Praxair Chemax) Co.,
Ltd is a joint venture between
Praxair, Inc. and China Petrochemical
Development Corporation.
Headquartered in Hsinchu, with
a warehouse in Toufen and a
service center near the Tainan
Science Park, Praxair Chemax
offers a complete gas and
chemical solution to semi-conductor
manufacturers.
Located near Hsinchu Science
Based Park, we provide our
customers with high purity gases
safe, reliable specialty gas
delivery systems, and total gas
management services.
Serving the Compound
Semiconductor Industry
To better serve the growing the
compound semiconductor market,
Praxair has developed a high
flow bulk ammonia gas delivery
system and a 6.5 grade ammonia.
With our new, patented technology,
our bulk ammonia system has a
standard flow rate of 600 liters
per minute and a peak flow rate
of 900 liters per minute - the
highest flow rate in the industry.
The higher flow rate decreases
the system change-outs, which
in turn decreases the chances
of possible contamination, reduces
personal injuries and operating
costs. Our new ammonia provides
our customers with the highest
specification in the industry.
Semiconductor Portfolio
Praxair Chemax provides a full
line of semiconductor specialty
gases, systems and services
including:
Silicon Precursor Gases
SiH 4 , SiH 2 Cl 2 , Si 2 H 6 , SiF 4 ,
SiHCl 3 , GeF 4
Dopant Gases
AsH 3 , BF 3 , B 2 H 6 , PH 3
B(CH 3 ) 3
Etchant Gases
BCl 3 , Cl 2 , CHF 3 , CH 2 F 2 ,
C 2 F 6 , C 3 F 8 , C 4 F 8 , HBr, HCl,
NF 3 , SF 6 , C 4 F 8 O
Reactant Gases
NH 3 , CO 2 , CO, N 2 O,
SO 2 , WF 6
Atmospheric Gases
Ar, He, H 2 , N 2 , O 2
Total Gas Management Services
Gas Delivery Systems
Bulk Gas Delivery Systems

Gas Delivery Systems
Praxair products are supplied in
the following ways:
■ Bulk liquid and gas
delivery
■ On-site generation
■ Pipeline
■ Cylinders
Praxair is a leading supplier of
gas delivery systems including
bulk specialty gas systems,
valve manifold boxes (VMBs), gas
panels and gas cabinets. All of
our high quality systems provide:
■ One of the highest
safety ratings
■ Maximum reliability
■ Simple operation
■ Low total cost of
ownership
■ Rapid lead times
■ Easy installation
Our gas delivery systems are
time-tested, proven components,
designed to provide reliable
gas delivery, automatic purging,
continuous monitoring and
emergency shutdown for semiconductor
process gases.
Praxair, Inc.
Semiconductor Materials
101 West Renner Road, Suite 440
Richardson, TX 75082 USA
www.praxair.com/semiconductor
info@praxair.com
Telephone:
1-800-446-8765
(972) 479-8612
Total Gas Management
Services
Praxair Chemax Semiconductor
Materials service centers are
located in Hsinchu and Tainan
near the science-based parks.
Our Point One SM service portfolio
includes total materials management,
site services supply chain
optimization, inventory management,
and process tool integration.
Praxair and the Flowing
Airstream design are trademarks
or registered trademarks of
Praxair Technology, Inc. in the
United States and other
countries.
© Copyright 2001 Praxair Technology, Inc.
All rights reserved
Praxair Inc.
P8631
Additional services include:
analytical systems and services,
gas monitoring and quality
assurance to ensure a consistent
and reliable supply of all gases
to the point of use.
Contact Information:
Praxair Chemax Semiconductor Materials, Co., Ltd.
4F, No. 133, Guang Ming 9th Road
Jubei, Hsinchu
Taiwan, 302
Tel: 886.3.5543538
Fax: 886.3.5543539