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MICROPROBE FABRICATION Glass micropipette Carbon Metal – Single electrode – Low reproducibility
MICROMACHINING TECHNIQUES Boron etch stop Deep boron diffusion – high temperature and time Lateral diffusion – “large”dimensions Strong crystal orientation dependence Plasma etching Low temperature process Better shape definition and thickness control – without lateral diffusion Quick process Low silicon crystalline orientation dependence
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TÓPICOS EM DETECÇÃO QUÍMICA UTI
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Sensor: Materiales • Plásticos
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Transductor: [ETYMOLOGY: 20th Centu
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Sistema: [ETYMOLOGY: 17th Century:
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Sequência de detecção (Sensibili
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Ambientes complexos
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HISTÓRICO DO DESENVOLVIMENTO DE SE
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I-STAT Chemfet (quimio-transistor)
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TAS: Micro Total Analysis System An
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-ChemLab (Sandia) http://www.ca.san
Page 22 and 23:
Qual sensor utilizar
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QUIMIO-RESISTORES Óxidos metálico
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QUIMIO-RESISTORES Seletividade / se
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QUIMIO-RESISTORES Cristais orgânic
Page 30 and 31: QUIMIO-CAPACITORES
Page 32 and 33: Quimio-Diodos Pd Semicondutor
Page 34 and 35: Quimio-transistores Porous Pd gate
Page 36 and 37: Chemfets - materiais
Page 38 and 39: Teoria dos Centros Ativos
Page 40: ISE -> CHEMFET
Page 47 and 48: Sensores Potenciométricos ISE - io
Page 49 and 50: Membrana de vidro Vidro (pH - 1922)
Page 51 and 52: Membrana de vidro (gases) E = cte -
Page 53 and 54: Membranas poliméricas com ionófor
Page 55 and 56: Detecção de K +
Page 57 and 58: CWE (coated-wire electrode)
Page 59 and 60: Quimio-transistores pH Urea
Page 61 and 62: Sensor de Oxigênio V = -800 mV | A
Page 63 and 64: Sensor de Glicose V = +600 mV | AgA
Page 65 and 66: Sensor de Colesterol V = - 50 mV |
Page 67 and 68: Glucose - Commercial applications (
Page 69 and 70: Detecção Eletroanalítica de meta
Page 71 and 72: Curva de Calibração Finalmente um
Page 73 and 74: LTCC Processing
Page 75 and 76: Resultados (Hg)
Page 77 and 78: Implantes DEVELOPMENT OF AN ARRAY O
Page 79: AMPEROMETRIC DETECTION NO NO 2- N
Page 83 and 84: FABRICATION RESULTS - SEM and AFM H
Page 85 and 86: FABRICATION RESULTS - FINAL DEVICE
Page 87 and 88: SENSOR DESIGN SENSOR 3 x 10 mm FEAT
Page 89 and 90: Tecnologia de modificação de elet
Page 91 and 92: Self-Assembled Monolayers (SAM) of
Page 93 and 94: Porphryrins Nickel-Tetrakis Porphyr
Page 95 and 96: ELECTROCHEMICAL DETECTION : DPV PAR
Page 97 and 98: IN VITRO DETECTION ELECTROCHEMICAL
Page 99 and 100: NITRIDE SENSITIVITY 8.67 x 10 -5 A
Page 101 and 102: SENSOR'S RESPONSE : NITRIC OXIDE CO
Page 103 and 104: Aplicações médicas
Page 109 and 110: Microelectrodes Array
Page 111 and 112: Microelectrodes Array
Page 113 and 114: Sensores de massa Sensor SAW (LiNbO
Page 115 and 116: Sensores ópticos
Page 117: Evanescent field Chemical Optical S
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