material do curso - LSI - USP
material do curso - LSI - USP
material do curso - LSI - USP
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MICROMACHINING TECHNIQUES<br />
Boron etch stop<br />
Deep boron diffusion<br />
– high temperature and time<br />
Lateral diffusion<br />
– “large”dimensions<br />
Strong crystal orientation<br />
dependence<br />
Plasma etching<br />
Low temperature process<br />
Better shape definition and<br />
thickness control<br />
– without lateral diffusion<br />
Quick process<br />
Low silicon crystalline orientation<br />
dependence
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