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Abstract The main contents of this study include: (1) methodologies for preliminaryseismic capacity assessment and retrofit of high-tech fabs;(2) AGV/RGV induced floor microvibration analysis of high-tech fabs. In regard to methodologies for preliminaryseismic capacity assessment and retrofit of high-tech fabs, this study is to develop a methodology for preliminary seismic capacity assessment of high-tech fabs for the industries as an effective tool to evaluate the seismic capacity of their fabs in a rapid way, which serves as the basis for deciding whether seismic retrofit is necessary. In this study a typical double fab structure is considered for demonstration of the seismic capacityassessment using the proposed method and adequacy of the results. The study shows that seismic demand may be under-estimented if the structural period is calculated based on code specified empirical formula. It is suggested to use structural period by eigen analysis or the rule-of-thumb principle as T=N/10(sec) for estimating the seismic demand. In addition, even if there is an abvious soft-and-weak story in the structure, the story shear demand of the corresponding floor level should be considered as the basis for determining the seismic performance index. The seismic performance index based on time history analysis results with 2% and 3% structural dampin. It is therefore suggested that damping ratio of 2% and 3% should be used in obtaining the seismic demand by the proposed method.This study also investigates the control efficiency using metallic yielding dampers or bracing system for seismic retrofit of iii
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