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LA PLATE-FORME SILICIUM du CEA-LETI - RTB - CNRS

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Miniaturisation et accroissement de la complexitéminiaturisation130nm90nm65nmbipolaire RF MEMSSourcebiopucesd’énergieBiCMOSrf CMOS+ passivesembeddedMEMSComplexité etdiversification45nm32nmFD SOICMOSmultigrilleenvironnementconscioussmart devices22nmLoi de Moore300mm-NanosciencesWorkshop Réseau National des Gdes Centrales_ 20/21-12-04_ AB - PD

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