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LA PLATE-FORME SILICIUM du CEA-LETI - RTB - CNRS

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UNE P<strong>LA</strong>TE-<strong>FORME</strong> TECHNOLOGIQUE PROCHE DE <strong>LA</strong>RECHERCHE FONDAMENTALELTM<strong>CNRS</strong>-UJFPlus de 40 chercheurs basés au LétiNouveaux équipements de caractérisation« Nano-scale etching, EUV litho, nanoimprint,high K materials »Workshop Réseau National des Gdes Centrales_ 20/21-12-04_ AB - PD

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