TPS-Compact Turbopump
TPS-Compact Turbopump
TPS-Compact Turbopump
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Gauge Connector<br />
<strong>TPS</strong>-compact is equipped with new generation<br />
gauge reading card able to drive/read a Varian<br />
“EyeSys Mini-IMG” gauge or a Varian Full Range<br />
Gauge FRG-700.<br />
The EyeSys Mini-IMG is a vacuum measurement<br />
instrument based on the inverted magnetron ion<br />
gauge design (see orderable parts table).<br />
The gauge pressure operation range goes from<br />
6.6x10 -3 mbar [5x10 -3 Torr] to 6.6x10 -9 mbar<br />
[5x10 -9 Torr] and its operation temperature range<br />
goes from 0°C to 50°C [32°-122°F].<br />
The FRG-700 Full Range Gauge is a combined<br />
technologies gauge (Inverted Magnetron plus Pirani<br />
Gauge).<br />
FRG-700 measure from 5x10 -9 mbar to atmosphere<br />
(3.8x10 -9 Torr to atmosphere) and its temperature<br />
range goes from 5°C to 55°C [41°-131°F].<br />
Pressure data is available on three independent<br />
reading channels:<br />
1. On-board display (data expressed in mbar,<br />
Torr or Pa) – (see Pressure Display Module<br />
picture)<br />
2. Serial communication line (Win 224)<br />
3. Analogical output.<br />
Vent Valve Diagram in “Auto” mode<br />
TECHNICAL INFORMATION<br />
Pressure gauge can be connected/disconnected<br />
from the <strong>TPS</strong>-compact during normal operation.<br />
Gauge Connector<br />
NOTE<br />
The Mini-IMG gauge is intended for high vacuum<br />
use, so with pressure above 50 mTorr the signal is<br />
misinterpreted and a “false” pressure is displayed.<br />
Use a transition gauge to understand if the reading<br />
is really under 50 mTorr or not.<br />
Pressure Display Module<br />
PRESSURE<br />
x10<br />
Pressure display module<br />
mBar<br />
Torr<br />
63/74 87-901-010-01<br />
Pa
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