In-situ layer thickness measurement by spectral reflectance - Laytec
In-situ layer thickness measurement by spectral reflectance - Laytec
In-situ layer thickness measurement by spectral reflectance - Laytec
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Outline<br />
• <strong>measurement</strong> principle<br />
• single wavelength <strong>measurement</strong><br />
• <strong>spectral</strong> <strong>reflectance</strong> <strong>measurement</strong><br />
• <strong>measurement</strong> of OLED processes<br />
• summary and outlook<br />
30 June 2009 <strong>In</strong>-<strong>situ</strong> <strong>layer</strong> <strong>thickness</strong> <strong>measurement</strong> <strong>by</strong> <strong>spectral</strong> <strong>reflectance</strong><br />
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