In-situ layer thickness measurement by spectral reflectance - Laytec
In-situ layer thickness measurement by spectral reflectance - Laytec
In-situ layer thickness measurement by spectral reflectance - Laytec
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Measurement principle<br />
Established <strong>measurement</strong> technique:<br />
Optical transmission <strong>measurement</strong><br />
• yields <strong>thickness</strong> of deposition<br />
<strong>layer</strong>s<br />
• disadvantages:<br />
• needs two view ports<br />
• not applicable to nontransparent<br />
substrates<br />
light<br />
source<br />
optics<br />
<strong>layer</strong>s<br />
substrate<br />
detector<br />
30 June 2009 <strong>In</strong>-<strong>situ</strong> <strong>layer</strong> <strong>thickness</strong> <strong>measurement</strong> <strong>by</strong> <strong>spectral</strong> <strong>reflectance</strong><br />
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